6.7 KiB
6.7 KiB
| 1 | # Device IO 定义表 | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 2 | # 列顺序：Id Module Name Type Card StationNo LineNo Enabled DefaultValue IsInverse Description | ||||||||||
| 3 | # Module: 业务模块名（如 SubstrateLoad/ChipLoad/SubstrateOut/ChipUnload） | ||||||||||
| 4 | # Type: Input/Output (也支持 IN/OUT/DI/DO) | ||||||||||
| 5 | # Card: Td/Acs | ||||||||||
| 6 | # StationNo: 台达站号 | ||||||||||
| 7 | # LineNo: 实际接线线标/号码管标识 | ||||||||||
| 8 | # Enabled: 1/0 或 true/false | ||||||||||
| 9 | # DefaultValue: 当 IO 未启用或无法读取时使用的默认状态，1/0 或 true/false | ||||||||||
| 10 | Id | Module | Name | Type | Card | StationNo | LineNo | Enabled | DefaultValue | IsInverse | Description |
| 11 | 0 | WZ | PG.WZ.StartButton | Input | Td | 1 | X00100 | 1 | 1 | 0 | WZ 启动按钮 |
| 12 | 1 | WZ | PG.WZ.StopButton | Input | Td | 1 | X00101 | 1 | 1 | 0 | WZ 停止按钮 |
| 13 | 2 | WZ | PG.WZ.ResetButton | Input | Td | 1 | X00102 | 1 | 1 | 0 | WZ 复位按钮 |
| 14 | 3 | WZ | PG.WZ.EmergencyStopButton | Input | Td | 1 | X00103 | 1 | 1 | 0 | WZ 急停按钮 |
| 15 | 4 | WZ | PG.WZ.BlueButton | Input | Td | 1 | X00104 | 1 | 1 | 0 | WZ 蓝色按钮（预留） |
| 16 | 5 | Stage | PG.Stage.ToolSetterSignal | Input | Td | 1 | X00105 | 1 | 1 | 0 | Stage 对刀信号 |
| 17 | 6 | Stage | PG.Stage.SubstrateInPlace | Input | Td | 1 | X00106 | 1 | 1 | 0 | Stage 基板到位感应 |
| 18 | 7 | Stage | PG.Stage.LifterCyl1WorkPos | Input | Td | 1 | X00107 | 1 | 1 | 0 | Stage 顶升气缸1动点 |
| 19 | 8 | Stage | PG.Stage.LifterCyl1HomePos | Input | Td | 1 | X00108 | 1 | 1 | 0 | Stage 顶升气缸1原点 |
| 20 | 9 | Stage | PG.Stage.LifterCyl2WorkPos | Input | Td | 1 | X00109 | 1 | 1 | 0 | Stage 顶升气缸2动点 |
| 21 | 10 | Stage | PG.Stage.LifterCyl2HomePos | Input | Td | 1 | X00110 | 1 | 1 | 0 | Stage 顶升气缸2原点 |
| 22 | 11 | WS | PG.WS.ThetaClampCyl1WorkPos | Input | Td | 1 | X00111 | 1 | 1 | 0 | WS θ 夹紧气缸1动点 |
| 23 | 12 | WS | PG.WS.ThetaClampCyl1HomePos | Input | Td | 1 | X00112 | 1 | 1 | 0 | WS θ 夹紧气缸1原点 |
| 24 | 13 | WS | PG.WS.ThetaClampCyl2WorkPos | Input | Td | 1 | X00113 | 1 | 1 | 0 | WS θ 夹紧气缸2动点 |
| 25 | 14 | WS | PG.WS.ThetaClampCyl2HomePos | Input | Td | 1 | X00114 | 1 | 1 | 0 | WS θ 夹紧气缸2原点 |
| 26 | 15 | WS | PG.WS.ThetaClampCyl3WorkPos | Input | Td | 1 | X00115 | 1 | 1 | 0 | WS θ 夹紧气缸3动点 |
| 27 | 0 | WS | PG.WS.ThetaClampCyl3HomePos | Input | Td | 2 | X00200 | 1 | 1 | 0 | WS θ 夹紧气缸3原点 |
| 28 | 1 | WS | PG.WS.ThetaClampCyl4WorkPos | Input | Td | 2 | X00201 | 1 | 1 | 0 | WS θ 夹紧气缸4动点 |
| 29 | 2 | WS | PG.WS.ThetaClampCyl4HomePos | Input | Td | 2 | X00202 | 1 | 1 | 0 | WS θ 夹紧气缸4原点 |
| 30 | 3 | WS | PG.WS.ThetaTrayPresentSensor1 | Input | Td | 2 | X00203 | 1 | 1 | 0 | WS θ 料盘有无感应1 |
| 31 | 4 | WS | PG.WS.ThetaTrayPresentSensor2 | Input | Td | 2 | X00204 | 1 | 1 | 0 | WS θ 料盘有无感应2 |
| 32 | 5 | WS | PG.WS.ThetaTrayPresentSensor3 | Input | Td | 2 | X00205 | 1 | 1 | 0 | WS θ 料盘有无感应3 |
| 33 | 6 | WS | PG.WS.ThetaTrayPresentSensor4 | Input | Td | 2 | X00206 | 1 | 1 | 0 | WS θ 料盘有无感应4 |
| 34 | 7 | WS | PG.WS.BondHead1InPlace | Input | Td | 2 | X00207 | 1 | 1 | 0 | WS 刺晶头1在位 |
| 35 | 8 | WS | PG.WS.BondHead2InPlace | Input | Td | 2 | X00208 | 1 | 1 | 0 | WS 刺晶头2在位 |
| 36 | 9 | WS | PG.WS.BondHead3InPlace | Input | Td | 2 | X00209 | 1 | 1 | 0 | WS 刺晶头3在位 |
| 37 | 10 | WS | PG.WS.BondHead4InPlace | Input | Td | 2 | X00210 | 1 | 1 | 0 | WS 刺晶头4在位 |
| 38 | 11 | WEU | PG.WEU.Z11MaterialSensor1 | Input | Td | 2 | X00211 | 1 | 1 | 0 | WEU Z11 有无料感应1 |
| 39 | 12 | WEU | PG.WEU.Z11MaterialSensor2 | Input | Td | 2 | X00212 | 1 | 1 | 0 | WEU Z11 有无料感应2 |
| 40 | 13 | WEU | PG.WEU.Z12MaterialSensor3 | Input | Td | 2 | X00213 | 1 | 1 | 0 | WEU Z12 有无料感应3 |
| 41 | 14 | WEU | PG.WEU.Z12MaterialSensor4 | Input | Td | 2 | X00214 | 1 | 1 | 0 | WEU Z12 有无料感应4 |
| 42 | 0 | CV | PG.CV.UpperInletSensor | Input | Td | 3 | X00300 | 1 | 1 | 0 | CV 上层进料感应 |
| 43 | 1 | CV | PG.CV.UpperInPlaceSensor | Input | Td | 3 | X00301 | 1 | 1 | 0 | CV 上层到位感应 |
| 44 | 2 | CV | PG.CV.LowerOutletSensor | Input | Td | 3 | X00302 | 1 | 1 | 0 | CV 下层出料感应 |
| 45 | 3 | CV | PG.CV.LowerInPlaceSensor | Input | Td | 3 | X00303 | 1 | 1 | 0 | CV 下层到位感应 |
| 46 | 4 | WZ | PG.WZ.SafetyDoor1Closed | Input | Td | 3 | X00304 | 1 | 1 | 0 | WZ 安全门1关门检测 |
| 47 | 5 | WZ | PG.WZ.SafetyDoor2Closed | Input | Td | 3 | X00305 | 1 | 1 | 0 | WZ 安全门2关门检测 |
| 48 | 6 | WZ | PG.WZ.SafetyDoor3Closed | Input | Td | 3 | X00306 | 1 | 1 | 0 | WZ 安全门3关门检测 |
| 49 | 7 | WZ | PG.WZ.SafetyDoor4Closed | Input | Td | 3 | X00307 | 1 | 1 | 0 | WZ 安全门4关门检测 |
| 50 | 8 | WZ | PG.WZ.SecurityDoorShield | Input | Td | 3 | X00308 | 1 | 1 | 0 | WZ 安全门屏蔽 |
| 51 | 10 | General | PG.General.PhaseLossSensor | Input | Td | 3 | X00310 | 1 | 1 | 0 | 缺相检测 |
| 52 | 11 | General | PG.General.SafetyCircuitStatus1 | Input | Td | 3 | X00311 | 1 | 1 | 0 | 安全回路状态1 |
| 53 | 12 | General | PG.General.SafetyCircuitStatus2 | Input | Td | 3 | X00312 | 1 | 1 | 0 | 安全回路状态2 |
| 54 | 13 | CV | PG.CV.IonWindRodAlarmDetection | Input | Td | 3 | X00313 | 1 | 1 | 0 | CV 离子风棒报警检测 |
| 55 | 14 | EFEM | PG.EFEM.IonWindRodAlarmDetection1 | Input | Td | 3 | X00314 | 1 | 1 | 0 | EFEM离子风棒报警检测1 |
| 56 | 15 | EFEM | PG.EFEM.IonWindRodAlarmDetection2 | Input | Td | 3 | X00315 | 1 | 1 | 0 | EFEM离子风棒报警检测2 |
| 57 | 0 | AxisZ | PG.AxisZ.Z1GuideRailBrake | Output | Td | 4 | Y00100 | 1 | 1 | 0 | Z1轴导轨抱闸 |
| 58 | 1 | AxisZ | PG.AxisZ.Z3CameraAirCooling | Output | Td | 4 | Y00101 | 1 | 1 | 0 | Z3相机气冷 |
| 59 | 2 | AxisZ | PG.AxisZ.Z5CameraAirCooling | Output | Td | 4 | Y00102 | 1 | 1 | 0 | Z5相机气冷 |
| 60 | 3 | AxisZ | PG.AxisZ.Z10CameraAirCooling | Output | Td | 4 | Y00103 | 1 | 1 | 0 | Z10相机气冷 |
| 61 | 4 | AxisZ | PG.AxisZ.Z2BondHeadAirCooling | Output | Td | 4 | Y00104 | 1 | 1 | 0 | Z2刺晶头气冷 |
| 62 | 5 | CV | PG.CV.IonBarAct | Output | Td | 4 | Y00105 | 1 | 1 | 0 | CV 离子风棒 |
| 63 | 6 | WEU | PG.WEU.IonBarAct1 | Output | Td | 4 | Y00106 | 1 | 1 | 0 | WEU离子风棒1 |
| 64 | 7 | WEU | PG.WEU.IonBarAct2 | Output | Td | 4 | Y00107 | 1 | 1 | 0 | WEU离子风棒2 |
| 65 | 8 | WS | PG.WS.ThetaClampCylAct | Output | Td | 4 | Y00108 | 1 | 1 | 0 | WS θ 夹紧气缸动作 |
| 66 | 9 | WS | PG.WS.ThetaBrakePressCylAct | Output | Td | 4 | Y00109 | 1 | 1 | 0 | WS θ刹车压紧气缸动作 |
| 67 | 10 | Stage | PG.Stage.LifterCyl1Act | Output | Td | 4 | Y00110 | 1 | 1 | 0 | Stage 顶升气缸1动作 |
| 68 | 11 | Stage | PG.Stage.LifterCyl2Act | Output | Td | 4 | Y00111 | 1 | 1 | 0 | Stage 顶升气缸2动作 |
| 69 | 0 | WZ | PG.WZ.StartButtonLight | Output | Td | 5 | Y00200 | 1 | 1 | 0 | WZ 启动按钮灯 |
| 70 | 1 | WZ | PG.WZ.StopButtonLight | Output | Td | 5 | Y00201 | 1 | 1 | 0 | WZ 停止按钮灯 |
| 71 | 2 | WZ | PG.WZ.ResetButtonLight | Output | Td | 5 | Y00202 | 1 | 1 | 0 | WZ 复位按钮灯 |
| 72 | 3 | WZ | PG.WZ.BlueButtonLight | Output | Td | 5 | Y00203 | 1 | 1 | 0 | WZ 蓝色按钮灯 |
| 73 | 4 | WZ | PG.WZ.WorkLight1 | Output | Td | 5 | Y00204 | 1 | 1 | 0 | WZ 照明灯1 |
| 74 | 6 | EFEM | PG.EFEM.WorkLight1 | Output | Td | 5 | Y00206 | 1 | 1 | 0 | EFEM 照明灯1 |
| 75 | 8 | WZ | PG.WZ.StackLightRed | Output | Td | 5 | Y00208 | 1 | 1 | 0 | WZ 四色灯-红 |
| 76 | 9 | WZ | PG.WZ.StackLightYellow | Output | Td | 5 | Y00209 | 1 | 1 | 0 | WZ 四色灯-黄 |
| 77 | 10 | WZ | PG.WZ.StackLightGreen | Output | Td | 5 | Y00210 | 1 | 1 | 0 | WZ 四色灯-绿 |
| 78 | 11 | WZ | PG.WZ.StackLightBlue | Output | Td | 5 | Y00211 | 1 | 1 | 0 | WZ 四色灯-蓝 |
| 79 | 12 | WZ | PG.WZ.BuzzerAct | Output | Td | 5 | Y00212 | 1 | 1 | 0 | WZ 蜂鸣器 |
| 80 | 0 | Stage | PG.Stage.BreakingTheVacuum1 | Output | Td | 6 | Y00300 | 1 | 1 | 0 | STAGE 破真空1 |
| 81 | 1 | Stage | PG.Stage.BreakingTheVacuum2 | Output | Td | 6 | Y00301 | 1 | 1 | 0 | STAGE 破真空2 |
| 82 | 2 | Stage | PG.Stage.BreakingTheVacuum3 | Output | Td | 6 | Y00302 | 1 | 1 | 0 | STAGE 破真空3 |
| 83 | 3 | Stage | PG.Stage.BreakingTheVacuum4 | Output | Td | 6 | Y00303 | 1 | 1 | 0 | STAGE 破真空4 |
| 84 | 4 | WEU | PG.WEU.TrayBreakVacuum1 | Output | Td | 6 | Y00304 | 1 | 1 | 0 | WEU 料盘破真空1 |
| 85 | 5 | WEU | PG.WEU.TrayBreakVacuum2 | Output | Td | 6 | Y00305 | 1 | 1 | 0 | WEU 料盘破真空2 |
| 86 | 6 | AxisZ | PG.AxisZ.Z2BondHeadBreakVacuum | Output | Td | 6 | Y00306 | 1 | 1 | 0 | PHS Z2 刺晶头破真空 |
| 87 | 7 | Stage | PG.Stage.Vacuum1 | Output | Td | 6 | Y00307 | 1 | 1 | 0 | STAGE 吸真空1 |
| 88 | 8 | Stage | PG.Stage.Vacuum2 | Output | Td | 6 | Y00308 | 1 | 1 | 0 | STAGE 吸真空2 |
| 89 | 9 | Stage | PG.Stage.Vacuum3 | Output | Td | 6 | Y00309 | 1 | 1 | 0 | STAGE 吸真空3 |
| 90 | 10 | Stage | PG.Stage.Vacuum4 | Output | Td | 6 | Y00310 | 1 | 1 | 0 | STAGE 吸真空4 |
| 91 | 11 | WEU | PG.WEU.TrayVacuum1 | Output | Td | 6 | Y00311 | 1 | 1 | 0 | WEU 料盘吸真空1 |
| 92 | 12 | WEU | PG.WEU.TrayVacuum2 | Output | Td | 6 | Y00312 | 1 | 1 | 0 | WEU 料盘吸真空2 |
| 93 | 13 | AxisZ | PG.AxisZ.Z2BondHeadVacuum | Output | Td | 6 | Y00313 | 1 | 1 | 0 | PHS Z2 刺晶头吸真空 |
| 94 | 1 | WZ | PG.WZ.SafetyDoor1Open | Output | Td | 7 | Y00400 | 1 | 1 | 0 | WZ 安全门1打开 |
| 95 | 2 | WZ | PG.WZ.SafetyDoor2Open | Output | Td | 7 | Y00401 | 1 | 1 | 0 | WZ 安全门2打开 |
| 96 | 3 | WZ | PG.WZ.SafetyDoor3Open | Output | Td | 7 | Y00402 | 1 | 1 | 0 | WZ 安全门3打开 |
| 97 | 4 | WZ | PG.WZ.SafetyDoor4Open | Output | Td | 7 | Y00403 | 1 | 1 | 0 | WZ 安全门4打开 |