7.0 KiB
7.0 KiB
| 1 | # Device IO 定义表 |
|---|---|
| 2 | # 列顺序：Id Module Name Type Card StationNo LineNo Enabled DefaultValue IsInverse Description |
| 3 | # Module: 业务模块名（如 SubstrateLoad/ChipLoad/SubstrateOut/ChipUnload） |
| 4 | # Type: Input/Output (也支持 IN/OUT/DI/DO) |
| 5 | # Card: Td/Acs |
| 6 | # StationNo: 台达站号 |
| 7 | # LineNo: 实际接线线标/号码管标识 |
| 8 | # Enabled: 1/0 或 true/false |
| 9 | # DefaultValue: 当 IO 未启用或无法读取时使用的默认状态，1/0 或 true/false |
| 10 | Id,Module,Name,Type,Card,StationNo,LineNo,Enabled,DefaultValue,IsInverse,Description |
| 11 | 0,WZ,PG.WZ.StartButton,Input,Td,1,X00100,1,1,0,WZ 启动按钮 |
| 12 | 1,WZ,PG.WZ.StopButton,Input,Td,1,X00101,1,1,0,WZ 停止按钮 |
| 13 | 2,WZ,PG.WZ.ResetButton,Input,Td,1,X00102,1,1,0,WZ 复位按钮 |
| 14 | 3,WZ,PG.WZ.EmergencyStopButton,Input,Td,1,X00103,1,1,0,WZ 急停按钮 |
| 15 | 4,WZ,PG.WZ.BlueButton,Input,Td,1,X00104,1,1,0,WZ 蓝色按钮(预留) |
| 16 | 5,Stage,PG.Stage.ToolSetterSignal,Input,Td,1,X00105,1,1,0,Stage 对刀信号 |
| 17 | 6,Stage,PG.Stage.SubstrateInPlace,Input,Td,1,X00106,1,1,0,Stage 基板到位感应 |
| 18 | 7,Stage,PG.Stage.LifterCyl1WorkPos,Input,Td,1,X00107,1,1,0,Stage 顶升气缸1动点 |
| 19 | 8,Stage,PG.Stage.LifterCyl1HomePos,Input,Td,1,X00108,1,1,0,Stage 顶升气缸1原点 |
| 20 | 9,Stage,PG.Stage.LifterCyl2WorkPos,Input,Td,1,X00109,1,1,0,Stage 顶升气缸2动点 |
| 21 | 10,Stage,PG.Stage.LifterCyl2HomePos,Input,Td,1,X00110,1,1,0,Stage 顶升气缸2原点 |
| 22 | 11,WS,PG.WS.ThetaClampCyl1WorkPos,Input,Td,1,X00111,1,1,0,WS θ夹紧气缸1动点 |
| 23 | 12,WS,PG.WS.ThetaClampCyl1HomePos,Input,Td,1,X00112,1,1,0,WS θ夹紧气缸1原点 |
| 24 | 13,WS,PG.WS.ThetaClampCyl2WorkPos,Input,Td,1,X00113,1,1,0,WS θ夹紧气缸2动点 |
| 25 | 14,WS,PG.WS.ThetaClampCyl2HomePos,Input,Td,1,X00114,1,1,0,WS θ夹紧气缸2原点 |
| 26 | 15,WS,PG.WS.ThetaClampCyl3WorkPos,Input,Td,1,X00115,1,1,0,WS θ夹紧气缸3动点 |
| 27 | 0,WS,PG.WS.ThetaClampCyl3HomePos,Input,Td,2,X00200,1,1,0,WS θ夹紧气缸3原点 |
| 28 | 1,WS,PG.WS.ThetaClampCyl4WorkPos,Input,Td,2,X00201,1,1,0,WS θ夹紧气缸4动点 |
| 29 | 2,WS,PG.WS.ThetaClampCyl4HomePos,Input,Td,2,X00202,1,1,0,WS θ夹紧气缸4原点 |
| 30 | 3,WS,PG.WS.ThetaTrayPresentSensor1,Input,Td,2,X00203,1,1,0,WS θ料盘有无感应1 |
| 31 | 4,WS,PG.WS.ThetaTrayPresentSensor2,Input,Td,2,X00204,1,1,0,WS θ料盘有无感应2 |
| 32 | 5,WS,PG.WS.ThetaTrayPresentSensor3,Input,Td,2,X00205,1,1,0,WS θ料盘有无感应3 |
| 33 | 6,WS,PG.WS.ThetaTrayPresentSensor4,Input,Td,2,X00206,1,1,0,WS θ料盘有无感应4 |
| 34 | 7,WS,PG.WS.BondHead1InPlace,Input,Td,2,X00207,1,1,0,WS 刺晶头1在位 |
| 35 | 8,WS,PG.WS.BondHead2InPlace,Input,Td,2,X00208,1,1,0,WS 刺晶头2在位 |
| 36 | 9,WS,PG.WS.BondHead3InPlace,Input,Td,2,X00209,1,1,0,WS 刺晶头3在位 |
| 37 | 10,WS,PG.WS.BondHead4InPlace,Input,Td,2,X00210,1,1,0,WS 刺晶头4在位 |
| 38 | 11,WEU,PG.WEU.Z11MaterialSensor1,Input,Td,2,X00211,1,1,0,WEU Z11 有无料感应1 |
| 39 | 12,WEU,PG.WEU.Z11MaterialSensor2,Input,Td,2,X00212,1,1,0,WEU Z11 有无料感应2 |
| 40 | 13,WEU,PG.WEU.Z12MaterialSensor3,Input,Td,2,X00213,1,1,0,WEU Z12 有无料感应3 |
| 41 | 14,WEU,PG.WEU.Z12MaterialSensor4,Input,Td,2,X00214,1,1,0,WEU Z12 有无料感应4 |
| 42 | 0,CV,PG.CV.UpperInletSensor,Input,Td,3,X00300,1,1,0,CV 上层进料感应 |
| 43 | 1,CV,PG.CV.UpperInPlaceSensor,Input,Td,3,X00301,1,1,0,CV 上层到位感应 |
| 44 | 2,CV,PG.CV.LowerOutletSensor,Input,Td,3,X00302,1,1,0,CV 下层出料感应 |
| 45 | 3,CV,PG.CV.LowerInPlaceSensor,Input,Td,3,X00303,1,1,0,CV 下层到位感应 |
| 46 | 4,WZ,PG.WZ.SafetyDoor1Closed,Input,Td,3,X00304,1,1,0,WZ 安全门1关门检测 |
| 47 | 5,WZ,PG.WZ.SafetyDoor2Closed,Input,Td,3,X00305,1,1,0,WZ 安全门2关门检测 |
| 48 | 6,WZ,PG.WZ.SafetyDoor3Closed,Input,Td,3,X00306,1,1,0,WZ 安全门3关门检测 |
| 49 | 7,WZ,PG.WZ.SafetyDoor4Closed,Input,Td,3,X00307,1,1,0,WZ 安全门4关门检测 |
| 50 | 8,WZ,PG.WZ.SecurityDoorShield,Input,Td,3,X00308,1,1,0,WZ 安全门屏蔽 |
| 51 | 10,General,PG.General.PhaseLossSensor,Input,Td,3,X00310,1,1,0,缺相检测 |
| 52 | 11,General,PG.General.SafetyCircuitStatus1,Input,Td,3,X00311,1,1,0,安全回路状态1 |
| 53 | 12,General,PG.General.SafetyCircuitStatus2,Input,Td,3,X00312,1,1,0,安全回路状态2 |
| 54 | 13,CV,PG.CV.IonWindRodAlarmDetection,Input,Td,3,X00313,1,1,0,CV 离子风棒报警检测 |
| 55 | 14,EFEM,PG.EFEM.IonWindRodAlarmDetection1,Input,Td,3,X00314,1,1,0,EFEM离子风棒报警检测1 |
| 56 | 15,EFEM,PG.EFEM.IonWindRodAlarmDetection2,Input,Td,3,X00315,1,1,0,EFEM离子风棒报警检测2 |
| 57 | 0,AxisZ,PG.AxisZ.Z1GuideRailBrake,Output,Td,4,Y00100,1,1,0,Z1轴导轨抱闸 |
| 58 | 1,AxisZ,PG.AxisZ.Z3CameraAirCooling,Output,Td,4,Y00101,1,1,0,Z3相机气冷 |
| 59 | 2,AxisZ,PG.AxisZ.Z5CameraAirCooling,Output,Td,4,Y00102,1,1,0,Z5相机气冷 |
| 60 | 3,AxisZ,PG.AxisZ.Z10CameraAirCooling,Output,Td,4,Y00103,1,1,0,Z10相机气冷 |
| 61 | 4,AxisZ,PG.AxisZ.Z2BondHeadAirCooling,Output,Td,4,Y00104,1,1,0,Z2刺晶头气冷 |
| 62 | 5,CV,PG.CV.IonBarAct,Output,Td,4,Y00105,1,1,0,CV 离子风棒 |
| 63 | 6,WEU,PG.WEU.IonBarAct1,Output,Td,4,Y00106,1,1,0,WEU离子风棒1 |
| 64 | 7,WEU,PG.WEU.IonBarAct2,Output,Td,4,Y00107,1,1,0,WEU离子风棒2 |
| 65 | 8,WS,PG.WS.ThetaClampCylAct,Output,Td,4,Y00108,1,1,0,WS θ 夹紧气缸动作 |
| 66 | 9,WS,PG.WS.ThetaBrakePressCylAct,Output,Td,4,Y00109,1,1,0,WS θ 刹车压紧气缸动作 |
| 67 | 10,Stage,PG.Stage.LifterCyl1Act,Output,Td,4,Y00110,1,1,0,Stage 顶升气缸1动作 |
| 68 | 11,Stage,PG.Stage.LifterCyl2Act,Output,Td,4,Y00111,1,1,0,Stage 顶升气缸2动作 |
| 69 | 0,WZ,PG.WZ.StartButtonLight,Output,Td,5,Y00200,1,1,0,WZ 启动按钮灯 |
| 70 | 1,WZ,PG.WZ.StopButtonLight,Output,Td,5,Y00201,1,1,0,WZ 停止按钮灯 |
| 71 | 2,WZ,PG.WZ.ResetButtonLight,Output,Td,5,Y00202,1,1,0,WZ 复位按钮灯 |
| 72 | 3,WZ,PG.WZ.BlueButtonLight,Output,Td,5,Y00203,1,1,0,WZ 蓝色按钮灯 |
| 73 | 4,WZ,PG.WZ.WorkLight1,Output,Td,5,Y00204,1,1,0,WZ 照明灯1 |
| 74 | 6,EFEM,PG.EFEM.WorkLight1,Output,Td,5,Y00206,1,1,0,EFEM 照明灯1 |
| 75 | 8,WZ,PG.WZ.StackLightRed,Output,Td,5,Y00208,1,1,0,WZ 四色灯-红 |
| 76 | 9,WZ,PG.WZ.StackLightYellow,Output,Td,5,Y00209,1,1,0,WZ 四色灯-黄 |
| 77 | 10,WZ,PG.WZ.StackLightGreen,Output,Td,5,Y00210,1,1,0,WZ 四色灯-绿 |
| 78 | 11,WZ,PG.WZ.StackLightBlue,Output,Td,5,Y00211,1,1,0,WZ 四色灯-蓝 |
| 79 | 12,WZ,PG.WZ.BuzzerAct,Output,Td,5,Y00212,1,1,0,WZ 蜂鸣器 |
| 80 | 0,Stage,PG.Stage.BreakingTheVacuum1,Output,Td,6,Y00300,1,1,0,Stage 破真空1 |
| 81 | 1,Stage,PG.Stage.BreakingTheVacuum2,Output,Td,6,Y00301,1,1,0,STAGE 破真空2 |
| 82 | 2,Stage,PG.Stage.BreakingTheVacuum3,Output,Td,6,Y00302,1,1,0,STAGE 破真空3 |
| 83 | 3,Stage,PG.Stage.BreakingTheVacuum4,Output,Td,6,Y00303,1,1,0,STAGE 破真空4 |
| 84 | 4,WEU,PG.WEU.TrayBreakVacuum1,Output,Td,6,Y00304,1,1,0,WEU 料盘破真空1 |
| 85 | 5,WEU,PG.WEU.TrayBreakVacuum2,Output,Td,6,Y00305,1,1,0,WEU 料盘破真空2 |
| 86 | 6,AxisZ,PG.AxisZ.Z2BondHeadBreakVacuum,Output,Td,6,Y00306,1,1,0,PHS Z2 刺晶头破真空 |
| 87 | 7,Stage,PG.Stage.Vacuum1,Output,Td,6,Y00307,1,1,0,STAGE 吸真空1 |
| 88 | 8,Stage,PG.Stage.Vacuum2,Output,Td,6,Y00308,1,1,0,STAGE 吸真空2 |
| 89 | 9,Stage,PG.Stage.Vacuum3,Output,Td,6,Y00309,1,1,0,STAGE 吸真空3 |
| 90 | 10,Stage,PG.Stage.Vacuum4,Output,Td,6,Y00310,1,1,0,STAGE 吸真空4 |
| 91 | 11,WEU,PG.WEU.TrayVacuum1,Output,Td,6,Y00311,1,1,0,WEU 料盘吸真空1 |
| 92 | 12,WEU,PG.WEU.TrayVacuum2,Output,Td,6,Y00312,1,1,0,WEU 料盘吸真空2 |
| 93 | 13,AxisZ,PG.AxisZ.Z2BondHeadVacuum,Output,Td,6,Y00313,1,1,0,PHS Z2 刺晶头吸真空 |
| 94 | 1,WZ,PG.WZ.SafetyDoor1Open,Output,Td,7,Y00401,1,1,0,WZ 安全门1打开 |
| 95 | 2,WZ,PG.WZ.SafetyDoor2Open,Output,Td,7,Y00402,1,1,0,WZ 安全门2打开 |
| 96 | 3,WZ,PG.WZ.SafetyDoor3Open,Output,Td,7,Y00402,1,1,0,WZ 安全门3打开 |
| 97 | 4,WZ,PG.WZ.SafetyDoor4Open,Output,Td,7,Y00403,1,1,0,WZ 安全门4打开 |