# Device IO 定义表,,,,,,,,,,
"# 列顺序：Id	Module	Name	Type	Card	StationNo	LineNo	Enabled	DefaultValue	IsInverse	Description",,,,,,,,,,
# Module: 业务模块名（如 SubstrateLoad/ChipLoad/SubstrateOut/ChipUnload）,,,,,,,,,,
# Type: Input/Output (也支持 IN/OUT/DI/DO),,,,,,,,,,
# Card: Td/Acs,,,,,,,,,,
# StationNo: 台达站号,,,,,,,,,,
# LineNo: 实际接线线标/号码管标识,,,,,,,,,,
# Enabled: 1/0 或 true/false,,,,,,,,,,
# DefaultValue: 当 IO 未启用或无法读取时使用的默认状态，1/0 或 true/false,,,,,,,,,,
Id,Module,Name,Type,Card,StationNo,LineNo,Enabled,DefaultValue,IsInverse,Description
0,WZ,PG.WZ.StartButton,Input,Td,1,X00100,1,1,0,WZ 启动按钮
1,WZ,PG.WZ.StopButton,Input,Td,1,X00101,1,1,0,WZ 停止按钮
2,WZ,PG.WZ.ResetButton,Input,Td,1,X00102,1,1,0,WZ 复位按钮
3,WZ,PG.WZ.EmergencyStopButton,Input,Td,1,X00103,1,1,0,WZ 急停按钮
4,WZ,PG.WZ.BlueButton,Input,Td,1,X00104,1,1,0,WZ 蓝色按钮（预留）
5,Stage,PG.Stage.ToolSetterSignal,Input,Td,1,X00105,1,1,0,Stage 对刀信号
6,Stage,PG.Stage.SubstrateInPlace,Input,Td,1,X00106,1,1,0,Stage 基板到位感应
7,Stage,PG.Stage.LifterCyl1WorkPos,Input,Td,1,X00107,1,1,0,Stage 顶升气缸1动点
8,Stage,PG.Stage.LifterCyl1HomePos,Input,Td,1,X00108,1,1,0,Stage 顶升气缸1原点
9,Stage,PG.Stage.LifterCyl2WorkPos,Input,Td,1,X00109,1,1,0,Stage 顶升气缸2动点
10,Stage,PG.Stage.LifterCyl2HomePos,Input,Td,1,X00110,1,1,0,Stage 顶升气缸2原点
11,WS,PG.WS.ThetaClampCyl1WorkPos,Input,Td,1,X00111,1,1,0,WS θ 夹紧气缸1动点
12,WS,PG.WS.ThetaClampCyl1HomePos,Input,Td,1,X00112,1,1,0,WS θ 夹紧气缸1原点
13,WS,PG.WS.ThetaClampCyl2WorkPos,Input,Td,1,X00113,1,1,0,WS θ 夹紧气缸2动点
14,WS,PG.WS.ThetaClampCyl2HomePos,Input,Td,1,X00114,1,1,0,WS θ 夹紧气缸2原点
15,WS,PG.WS.ThetaClampCyl3WorkPos,Input,Td,1,X00115,1,1,0,WS θ 夹紧气缸3动点
0,WS,PG.WS.ThetaClampCyl3HomePos,Input,Td,2,X00200,1,1,0,WS θ 夹紧气缸3原点
1,WS,PG.WS.ThetaClampCyl4WorkPos,Input,Td,2,X00201,1,1,0,WS θ 夹紧气缸4动点
2,WS,PG.WS.ThetaClampCyl4HomePos,Input,Td,2,X00202,1,1,0,WS θ 夹紧气缸4原点
3,WS,PG.WS.ThetaTrayPresentSensor1,Input,Td,2,X00203,1,1,0,WS θ 料盘有无感应1
4,WS,PG.WS.ThetaTrayPresentSensor2,Input,Td,2,X00204,1,1,0,WS θ 料盘有无感应2
5,WS,PG.WS.ThetaTrayPresentSensor3,Input,Td,2,X00205,1,1,0,WS θ 料盘有无感应3
6,WS,PG.WS.ThetaTrayPresentSensor4,Input,Td,2,X00206,1,1,0,WS θ 料盘有无感应4
7,WS,PG.WS.BondHead1InPlace,Input,Td,2,X00207,1,1,0,WS 刺晶头1在位
8,WS,PG.WS.BondHead2InPlace,Input,Td,2,X00208,1,1,0,WS 刺晶头2在位
9,WS,PG.WS.BondHead3InPlace,Input,Td,2,X00209,1,1,0,WS 刺晶头3在位
10,WS,PG.WS.BondHead4InPlace,Input,Td,2,X00210,1,1,0,WS 刺晶头4在位
11,WEU,PG.WEU.Z11MaterialSensor1,Input,Td,2,X00211,1,1,0,WEU Z11 有无料感应1
12,WEU,PG.WEU.Z11MaterialSensor2,Input,Td,2,X00212,1,1,0,WEU Z11 有无料感应2
13,WEU,PG.WEU.Z12MaterialSensor3,Input,Td,2,X00213,1,1,0,WEU Z12 有无料感应3
14,WEU,PG.WEU.Z12MaterialSensor4,Input,Td,2,X00214,1,1,0,WEU Z12 有无料感应4
0,CV,PG.CV.UpperInletSensor,Input,Td,3,X00300,1,1,0,CV 上层进料感应
1,CV,PG.CV.UpperInPlaceSensor,Input,Td,3,X00301,1,1,0,CV 上层到位感应
2,CV,PG.CV.LowerOutletSensor,Input,Td,3,X00302,1,1,0,CV 下层出料感应
3,CV,PG.CV.LowerInPlaceSensor,Input,Td,3,X00303,1,1,0,CV 下层到位感应
4,WZ,PG.WZ.SafetyDoor1Closed,Input,Td,3,X00304,1,1,0,WZ 安全门1关门检测
5,WZ,PG.WZ.SafetyDoor2Closed,Input,Td,3,X00305,1,1,0,WZ 安全门2关门检测
6,WZ,PG.WZ.SafetyDoor3Closed,Input,Td,3,X00306,1,1,0,WZ 安全门3关门检测
7,WZ,PG.WZ.SafetyDoor4Closed,Input,Td,3,X00307,1,1,0,WZ 安全门4关门检测
8,WZ,PG.WZ.SecurityDoorShield,Input,Td,3,X00308,1,1,0,WZ 安全门屏蔽
10,General,PG.General.PhaseLossSensor,Input,Td,3,X00310,1,1,0,缺相检测
11,General,PG.General.SafetyCircuitStatus1,Input,Td,3,X00311,1,1,0,安全回路状态1
12,General,PG.General.SafetyCircuitStatus2,Input,Td,3,X00312,1,1,0,安全回路状态2
13,CV,PG.CV.IonWindRodAlarmDetection,Input,Td,3,X00313,1,1,0,CV 离子风棒报警检测
14,EFEM,PG.EFEM.IonWindRodAlarmDetection1,Input,Td,3,X00314,1,1,0,EFEM离子风棒报警检测1
15,EFEM,PG.EFEM.IonWindRodAlarmDetection2,Input,Td,3,X00315,1,1,0,EFEM离子风棒报警检测2
0,AxisZ,PG.AxisZ.Z1GuideRailBrake,Output,Td,4,Y00100,1,1,0,Z1轴导轨抱闸
1,AxisZ,PG.AxisZ.Z3CameraAirCooling,Output,Td,4,Y00101,1,1,0,Z3相机气冷
2,AxisZ,PG.AxisZ.Z5CameraAirCooling,Output,Td,4,Y00102,1,1,0,Z5相机气冷
3,AxisZ,PG.AxisZ.Z10CameraAirCooling,Output,Td,4,Y00103,1,1,0,Z10相机气冷
4,AxisZ,PG.AxisZ.Z2BondHeadAirCooling,Output,Td,4,Y00104,1,1,0,Z2刺晶头气冷
5,CV,PG.CV.IonBarAct,Output,Td,4,Y00105,1,1,0,CV 离子风棒
6,WEU,PG.WEU.IonBarAct1,Output,Td,4,Y00106,1,1,0,WEU离子风棒1
7,WEU,PG.WEU.IonBarAct2,Output,Td,4,Y00107,1,1,0,WEU离子风棒2
8,WS,PG.WS.ThetaClampCylAct,Output,Td,4,Y00108,1,1,0,WS θ 夹紧气缸动作
9,WS,PG.WS.ThetaBrakePressCylAct,Output,Td,4,Y00109,1,1,0,WS θ刹车压紧气缸动作
10,Stage,PG.Stage.LifterCyl1Act,Output,Td,4,Y00110,1,1,0,Stage 顶升气缸1动作
11,Stage,PG.Stage.LifterCyl2Act,Output,Td,4,Y00111,1,1,0,Stage 顶升气缸2动作
0,WZ,PG.WZ.StartButtonLight,Output,Td,5,Y00200,1,1,0,WZ 启动按钮灯
1,WZ,PG.WZ.StopButtonLight,Output,Td,5,Y00201,1,1,0,WZ 停止按钮灯
2,WZ,PG.WZ.ResetButtonLight,Output,Td,5,Y00202,1,1,0,WZ 复位按钮灯
3,WZ,PG.WZ.BlueButtonLight,Output,Td,5,Y00203,1,1,0,WZ 蓝色按钮灯
4,WZ,PG.WZ.WorkLight1,Output,Td,5,Y00204,1,1,0,WZ 照明灯1
6,EFEM,PG.EFEM.WorkLight1,Output,Td,5,Y00206,1,1,0,EFEM 照明灯1
8,WZ,PG.WZ.StackLightRed,Output,Td,5,Y00208,1,1,0,WZ 四色灯-红
9,WZ,PG.WZ.StackLightYellow,Output,Td,5,Y00209,1,1,0,WZ 四色灯-黄
10,WZ,PG.WZ.StackLightGreen,Output,Td,5,Y00210,1,1,0,WZ 四色灯-绿
11,WZ,PG.WZ.StackLightBlue,Output,Td,5,Y00211,1,1,0,WZ 四色灯-蓝
12,WZ,PG.WZ.BuzzerAct,Output,Td,5,Y00212,1,1,0,WZ 蜂鸣器
0,Stage,PG.Stage.BreakingTheVacuum1,Output,Td,6,Y00300,1,1,0,STAGE 破真空1
1,Stage,PG.Stage.BreakingTheVacuum2,Output,Td,6,Y00301,1,1,0,STAGE 破真空2
2,Stage,PG.Stage.BreakingTheVacuum3,Output,Td,6,Y00302,1,1,0,STAGE 破真空3
3,Stage,PG.Stage.BreakingTheVacuum4,Output,Td,6,Y00303,1,1,0,STAGE 破真空4
4,WEU,PG.WEU.TrayBreakVacuum1,Output,Td,6,Y00304,1,1,0,WEU 料盘破真空1
5,WEU,PG.WEU.TrayBreakVacuum2,Output,Td,6,Y00305,1,1,0,WEU 料盘破真空2
6,AxisZ,PG.AxisZ.Z2BondHeadBreakVacuum,Output,Td,6,Y00306,1,1,0,PHS Z2 刺晶头破真空
7,Stage,PG.Stage.Vacuum1,Output,Td,6,Y00307,1,1,0,STAGE 吸真空1
8,Stage,PG.Stage.Vacuum2,Output,Td,6,Y00308,1,1,0,STAGE 吸真空2
9,Stage,PG.Stage.Vacuum3,Output,Td,6,Y00309,1,1,0,STAGE 吸真空3
10,Stage,PG.Stage.Vacuum4,Output,Td,6,Y00310,1,1,0,STAGE 吸真空4
11,WEU,PG.WEU.TrayVacuum1,Output,Td,6,Y00311,1,1,0,WEU 料盘吸真空1
12,WEU,PG.WEU.TrayVacuum2,Output,Td,6,Y00312,1,1,0,WEU 料盘吸真空2
13,AxisZ,PG.AxisZ.Z2BondHeadVacuum,Output,Td,6,Y00313,1,1,0,PHS Z2 刺晶头吸真空
1,WZ,PG.WZ.SafetyDoor1Open,Output,Td,7,Y00400,1,1,0,WZ 安全门1打开
2,WZ,PG.WZ.SafetyDoor2Open,Output,Td,7,Y00401,1,1,0,WZ 安全门2打开
3,WZ,PG.WZ.SafetyDoor3Open,Output,Td,7,Y00402,1,1,0,WZ 安全门3打开
4,WZ,PG.WZ.SafetyDoor4Open,Output,Td,7,Y00403,1,1,0,WZ 安全门4打开