添加 MX-PD-盘古 项目文件
将 MX-PD-盘古 - new 目录下的所有文件添加到主仓库
This commit is contained in:
Shi.Ji
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using System;
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using System.Collections.Generic;
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using System.IO;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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using SemiPoint = SemiconductorVisionAlgorithm.SemiParams.Point;
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namespace MainShell.AlgorithmCalib.Service
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{
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public static class CalibFileService
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{
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public static void SaveCalibPointsFile(string path, List<SemiPoint> real, List<SemiPoint> ruler)
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{
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using (var sw = new StreamWriter(path))
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{
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sw.WriteLine("# realX, realY, rulerX, rulerY");
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int count = Math.Max(real.Count, ruler.Count);
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for (int i = 0; i < count; i++)
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{
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var r = i < real.Count ? real[i] : new SemiPoint(0, 0);
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var u = i < ruler.Count ? ruler[i] : new SemiPoint(0, 0);
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sw.WriteLine($"{r.X},{r.Y},{u.X},{u.Y}");
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}
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}
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}
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public static void ReadCalibPointsFile(string path, out List<SemiPoint> real, out List<SemiPoint> ruler)
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{
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real = new List<SemiPoint>();
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ruler = new List<SemiPoint>();
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if (!File.Exists(path))
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return;
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foreach (var line in File.ReadLines(path))
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{
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var l = line.Trim();
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if (string.IsNullOrEmpty(l)) continue;
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if (l.StartsWith("#")) continue;
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var sp = l.Split(',');
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if (sp.Length < 4) continue;
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real.Add(new SemiPoint(
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double.Parse(sp[0]),
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double.Parse(sp[1])
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));
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ruler.Add(new SemiPoint(
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double.Parse(sp[2]),
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double.Parse(sp[3])
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));
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}
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}
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}
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}
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@@ -0,0 +1,300 @@
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using MainShell.AlgorithmCalib.Common;
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using MainShell.AlgorithmCalib.Model;
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using MainShell.Common;
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using MainShell.Hardware;
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using MainShell.Log;
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using MainShell.Motion;
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using SemiconductorVisionAlgorithm.SemiParams;
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using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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using System.Threading;
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using System.Threading.Tasks;
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using SemiPoint = SemiconductorVisionAlgorithm.SemiParams.Point;
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namespace MainShell.AlgorithmCalib.Service
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{
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/// <summary>
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/// 融合对位处理器
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/// 3步对位流程：
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/// 1. 抓Pad点（框选ROI识别Pad坐标）
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/// 2. Die网格飞拍（首点+参数 → 蛇形扫描获取x*y个Die点）
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/// 3. 对位验证（选择一个Die点 → 与Pad点对位 → 输出结果）
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/// </summary>
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public class FusionAlignProcessor
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{
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private readonly FusionCalibMotionService _motionService;
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private readonly HardwareManager _hardware;
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private readonly FusionCalibModuleItem _moduleItem;
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private readonly ApproachAlignmentService _approachAlignmentService;
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// 飞拍参数
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private double _flyScanStartX;
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private double _flyScanStartY;
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private int _flyScanXCount;
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private int _flyScanYCount;
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private double _flyScanStep;
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public event EventHandler<CalibrationProgressEventArgs> ProgressChanged;
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private readonly Func<Rectangle1> _roiRectProvider; // ROI 提供者委托
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public FusionAlignProcessor(
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FusionCalibMotionService motionService,
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HardwareManager hardware,
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FusionCalibModuleItem moduleItem,
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Func<Rectangle1> roiRectProvider)
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{
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_motionService = motionService;
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_hardware = hardware;
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_moduleItem = moduleItem;
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_approachAlignmentService = IoC.Get<ApproachAlignmentService>();
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_roiRectProvider = roiRectProvider;
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}
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/// <summary>
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/// 设置飞拍参数
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/// </summary>
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public void SetFlyScanParams(double startX, double startY, int xCount, int yCount, double step)
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{
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_flyScanStartX = startX;
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_flyScanStartY = startY;
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_flyScanXCount = xCount;
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_flyScanYCount = yCount;
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_flyScanStep = step;
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}
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/// <summary>
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/// 步骤1：抓Pad点
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/// 框选ROI区域，识别Pad目标点坐标（pad运动系：X1,Y2）
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/// </summary>
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public async Task CapturePadPointAsync(CancellationToken cancellationToken)
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{
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await Task.Run(async () =>
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{
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ReportProgress("抓Pad点...", 1, 3);
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bool success = await ApproachAtPointAsync(cancellationToken).ConfigureAwait(false);
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if (!success)
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{
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throw new InvalidOperationException($"逼近对齐失败");
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}
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_moduleItem.PadRealX = _hardware.Axis_X1.State.ActualPos;
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_moduleItem.PadRealY = _hardware.Axis_Y2.State.ActualPos;
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"抓Pad点完成".LogInfo();
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}, cancellationToken);
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}
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/// <summary>
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/// 步骤2a：抓Die首点
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/// 框选ROI区域，识别Die首点坐标（die运动系：X2,Y1）
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/// </summary>
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public async Task CaptureDieFirstPointAsync(CancellationToken cancellationToken)
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{
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await Task.Run(async() =>
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{
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ReportProgress("抓Die首点...", 1, 3);
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bool success = await ApproachAtPointAsync(cancellationToken).ConfigureAwait(false);
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if (!success)
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{
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throw new InvalidOperationException($"逼近对齐失败");
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}
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_moduleItem.DieRealX = _hardware.Axis_X2.State.ActualPos;
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_moduleItem.DieRealY = _hardware.Axis_Y1.State.ActualPos;
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"抓Die首点完成".LogInfo();
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}, cancellationToken);
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}
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/// <summary>
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/// 步骤2b：Die网格飞拍
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/// 以首点为起点，按step和count执行蛇形网格飞拍，获取x*y个Die点
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/// </summary>
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public async Task ExecuteDieGridFlyScanAsync(CancellationToken cancellationToken)
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{
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await Task.Run(async() =>
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{
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var sw = Stopwatch.StartNew();
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int totalPoints = _flyScanXCount * _flyScanYCount;
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int captured = 0;
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ReportProgress($"开始飞拍，网格{_flyScanXCount}×{_flyScanYCount}，共{totalPoints}点...", 0, totalPoints);
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// 清空之前的数据
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_moduleItem.DieGridPoints = new List<Tuple<int, int, SemiPoint>>();
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for (int row = 0; row < _flyScanYCount; row++)
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{
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// 蛇形扫描：偶数行从左到右，奇数行从右到左
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for (int col = 0; col < _flyScanXCount; col++)
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{
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cancellationToken.ThrowIfCancellationRequested();
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int actualCol = row % 2 == 0 ? col : (_flyScanXCount - 1 - col);
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// 计算目标位置
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double targetX2 = _flyScanStartX + actualCol * _flyScanStep;
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double targetY1 = _flyScanStartY + row * _flyScanStep;
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// 移动轴到目标位置
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_motionService.MoveWsAvoidance(targetX2, targetY1);
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// 等待运动完成
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Thread.Sleep(200);
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bool success = await ApproachAtPointAsync(cancellationToken).ConfigureAwait(false);
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if (!success)
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{
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throw new InvalidOperationException($"逼近对齐失败");
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}
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// 读取当前位置
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double currentX2 = _hardware.Axis_X2.State.ActualPos;
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double currentY1 = _hardware.Axis_Y1.State.ActualPos;
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SemiPoint point = new SemiPoint(currentX2, currentY1);
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_moduleItem.DieGridPoints.Add(Tuple.Create(row, actualCol, point));
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captured++;
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ReportProgress($"飞拍中... ({captured}/{totalPoints})", captured, totalPoints);
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}
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}
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sw.Stop();
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$"Die网格飞拍完成，共{captured}点，耗时{sw.ElapsedMilliseconds}ms".LogInfo();
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}, cancellationToken);
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}
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/// <summary>
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/// 步骤3：执行对位
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/// 用户选择网格中的一个Die点（row, col），与Pad点执行对位
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/// 对位流程：Die X对齐Pad → Pad Y对齐Die → X2补偿
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/// </summary>
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public async Task ExecuteAlignAsync(CancellationToken ct, int selectedRow, int selectedCol)
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{
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await Task.Run(() =>
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{
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ReportProgress("执行对位...", 1, 6);
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// 从网格中找到选中的Die点
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SemiPoint selectedDie = null;
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foreach (var pt in _moduleItem.DieGridPoints)
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{
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if (pt.Item1 == selectedRow && pt.Item2 == selectedCol)
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{
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selectedDie = pt.Item3;
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break;
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}
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}
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if (selectedDie == null)
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{
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throw new Exception($"未找到Die点[{selectedRow},{selectedCol}]");
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}
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// 使用选中的Die点作为对位基准
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_moduleItem.DieRealX = selectedDie.X;
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_moduleItem.DieRealY = selectedDie.Y;
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_moduleItem.PadRealX = _moduleItem.PadRulerX;
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_moduleItem.PadRealY = _moduleItem.PadRulerY;
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ReportProgress("Die X方向对齐Pad...", 2, 6);
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// === 步骤3a：Die X方向对齐Pad ===
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// 查die融合表，将Die的X方向对齐到Pad的X方向
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// 移动X2,Y1 → Y1会产生少许偏移
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//
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// TODO: 接入JM1融合表查询
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// SemiPoint dieReal = new SemiPoint(_moduleItem.DieRealX, _moduleItem.DieRealY);
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// SemiPoint padReal = new SemiPoint(_moduleItem.PadRealX, _moduleItem.PadRealY);
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// SemiJM1Manager.Instance.get_ws_pos_die(dieReal, padReal, out SemiPoint wsTarget);
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//
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// 暂时模拟：使用Die坐标作为目标
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double wsTargetX = _moduleItem.DieRealX;
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double wsTargetY = _moduleItem.DieRealY;
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_motionService.MoveWsAvoidance(wsTargetX, wsTargetY);
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// 读取此时Y1位置（已产生偏移）
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double currentY1 = _hardware.Axis_Y1.State.ActualPos;
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ReportProgress("Pad Y方向对齐Die...", 3, 6);
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// === 步骤3b：Pad Y方向对齐Die ===
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// 根据当前Y1值，查pad融合表，计算X1,Y2目标位置
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// 移动X1,Y2 → X1会产生少许偏移
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//
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// TODO: 接入pad融合表查询
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// SemiPoint padTarget = FusionTableLookupPad(padReal, currentY1);
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//
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// 暂时模拟
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double padTargetX = _moduleItem.PadRealX;
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double padTargetY = _moduleItem.PadRealY;
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_motionService.MovePhsAvoidance(padTargetX, padTargetY);
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// 读取此时X1位置（已产生偏移）
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double currentX1 = _hardware.Axis_X1.State.ActualPos;
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ReportProgress("X2补偿...", 4, 6);
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// === 步骤3c：X2补偿 ===
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// X2跟上X1的移动量
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double x1Delta = currentX1 - _moduleItem.PadRulerX;
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double x2Target = wsTargetX + x1Delta;
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_motionService.SafeMove(_hardware.Axis_X2, x2Target);
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// 记录结果
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_moduleItem.AlignResultX = currentX1;
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_moduleItem.AlignResultY = currentY1;
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_moduleItem.AlignResultX2 = x2Target;
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ReportProgress("对位完成", 5, 6);
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$"对位完成: Die[{selectedRow},{selectedCol}] → Pad, X1={currentX1:F4}, Y1={currentY1:F4}, X2 ={ x2Target: F4}".LogInfo();
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}, ct);
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}
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private void ReportProgress(string message, int current, int total)
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{
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ProgressChanged?.Invoke(this, new CalibrationProgressEventArgs
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{
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Message = message,
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Current = current,
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Total = total
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});
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}
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/// <summary>
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/// 逼近对齐
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/// </summary>
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private async Task<bool> ApproachAtPointAsync(CancellationToken cancellationToken)
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{
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Rectangle1 roiRect = _roiRectProvider?.Invoke();
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var request = new ApproachAlignmentRequest(
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axes: new[]
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{
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new ApproachAlignmentAxis(_hardware.Axis_X2.Name, 0.005),
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new ApproachAlignmentAxis(_hardware.Axis_Y1.Name, 0.005)
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},
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camera: CameraType.TopPositionCamera)
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{
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MaxIterations = 3,
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RecognitionTimeoutMilliseconds = 5000,
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RecognitionParameters = new CenterRecognitionParameters()
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{
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Type = CenterRecognitionType.EdgeCircle,
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rectangle = roiRect
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}
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};
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var result = await _approachAlignmentService.ApproachAlignmentAsync(request, cancellationToken).ConfigureAwait(false);
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return result.Succeeded;
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}
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}
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}
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@@ -0,0 +1,60 @@
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using MainShell.Hardware;
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using MainShell.Motion;
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using MaxwellFramework.Core.Attributes;
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using MwFramework.Device;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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namespace MainShell.AlgorithmCalib.Service
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{
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[Singleton]
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public class FusionCalibMotionService
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{
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private readonly HardwareManager _hardware;
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private readonly SafeAxisMotion _safeAxisMotion;
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public FusionCalibMotionService(HardwareManager hardware, SafeAxisMotion safeAxisMotion)
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{
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_hardware = hardware ?? throw new ArgumentNullException(nameof(hardware));
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_safeAxisMotion = safeAxisMotion ?? throw new ArgumentNullException(nameof(safeAxisMotion));
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}
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public void SafeMove(IAxis axis, double position)
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{
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_safeAxisMotion.SafeMove(
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MotionMoveRequest.ForAxis(GetRequiredAxis(axis, nameof(axis)), position));
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}
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public void MoveWsAvoidance(double xPosition, double yPosition)
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{
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_safeAxisMotion.SafeMove(
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MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_X2, nameof(_hardware.Axis_X2)), xPosition),
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MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_Y1, nameof(_hardware.Axis_Y1)), yPosition));
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}
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public void MovePhsAvoidance(double xPosition, double yPosition)
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{
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_safeAxisMotion.SafeMove(
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MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_X1, nameof(_hardware.Axis_X1)), xPosition),
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MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_Y2, nameof(_hardware.Axis_Y2)), yPosition));
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}
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public void RotatePos(double rotatePosition)
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{
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_safeAxisMotion.SafeMove(
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MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_WS_R, nameof(_hardware.Axis_WS_R)), rotatePosition));
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}
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|
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private static MwFramework.Device.IAxis GetRequiredAxis(MwFramework.Device.IAxis axis, string axisPropertyName)
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{
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if (axis == null)
|
||||
{
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throw new InvalidOperationException(string.Format("Axis '{0}' is not available.", axisPropertyName));
|
||||
}
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return axis;
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}
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}
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||||
}
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@@ -0,0 +1,229 @@
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using MainShell.AlgorithmCalib.Common;
|
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using MainShell.AlgorithmCalib.Model;
|
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using MainShell.Hardware;
|
||||
using MainShell.Log;
|
||||
using SemiconductorVisionAlgorithm.SemiParams;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.IO;
|
||||
using System.Linq;
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||||
using System.Text;
|
||||
using System.Threading;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace MainShell.AlgorithmCalib.Service
|
||||
{
|
||||
/// <summary>
|
||||
/// 融合标定后处理器（Die/Pad共用）
|
||||
/// 通过 IsWaferCalib 内部区分行为
|
||||
/// </summary>
|
||||
public class FusionCalibPostProcessor : IAlgorithmCalibrationPostProcessor
|
||||
{
|
||||
private readonly FusionCalibMotionService _motionService;
|
||||
private readonly HardwareManager _hardware;
|
||||
private readonly FusionCalibModuleItem _moduleItem;
|
||||
private readonly Func<Rectangle1> _roiRectProvider;
|
||||
|
||||
public event EventHandler<CalibrationProgressEventArgs> ProgressChanged;
|
||||
|
||||
private Point[,] _initialwsPos;
|
||||
private Dictionary<int, Point[,]> _calibResultPointData = new Dictionary<int, Point[,]>();
|
||||
private List<double> _calibPosList = new List<double>();
|
||||
|
||||
public string Name => "FusionCalib";
|
||||
|
||||
public FusionCalibPostProcessor(
|
||||
FusionCalibMotionService motionService,
|
||||
HardwareManager hardware,
|
||||
FusionCalibModuleItem moduleItem,
|
||||
Func<Rectangle1> roiRectProvider)
|
||||
{
|
||||
_motionService = motionService ?? throw new ArgumentNullException(nameof(motionService));
|
||||
_hardware = hardware ?? throw new ArgumentNullException(nameof(hardware));
|
||||
_moduleItem = moduleItem ?? throw new ArgumentNullException(nameof(moduleItem));
|
||||
_roiRectProvider = roiRectProvider;
|
||||
}
|
||||
|
||||
public async Task ExecuteAsync(AlgorithmCalibExecutionResult calibrationResult, CancellationToken cancellationToken)
|
||||
{
|
||||
$"{(_moduleItem.IsWaferCalib ? "Die" : "Pad")}融合标定开始。".LogInfo();
|
||||
|
||||
try
|
||||
{
|
||||
_calibResultPointData.Clear();
|
||||
_calibPosList.Clear();
|
||||
|
||||
double waferStep = _moduleItem.CalibStep;
|
||||
string path = Path.Combine(AppDomain.CurrentDomain.BaseDirectory, _moduleItem.ModelPath);
|
||||
|
||||
int totalSteps = _moduleItem.Count + 1;
|
||||
ReportProgress("采集初始网格点...", 0, totalSteps);
|
||||
|
||||
// 1. 初始网格
|
||||
_initialwsPos = await Task.Run(() =>
|
||||
ApprochTable(waferStep,
|
||||
_moduleItem.MoveAxisPos,
|
||||
GetCurrentY1(),
|
||||
_moduleItem.ApproachXPos,
|
||||
_moduleItem.ApproachYPos,
|
||||
0, path, cancellationToken),
|
||||
cancellationToken);
|
||||
|
||||
// 2. 循环采集
|
||||
for (int i = 0; i < _moduleItem.Count; i++)
|
||||
{
|
||||
cancellationToken.ThrowIfCancellationRequested();
|
||||
ReportProgress($"采集第 {i + 1}/{_moduleItem.Count} 组...", i + 1, totalSteps);
|
||||
|
||||
double x1, y1, x2, y2;
|
||||
CalculatePositions(i, out x1, out y1, out x2, out y2);
|
||||
|
||||
Point[,] points = await Task.Run(() =>
|
||||
ApprochTable(waferStep, x1, y1, x2, y2, i + 1, path, cancellationToken),
|
||||
cancellationToken);
|
||||
|
||||
_calibResultPointData[i] = points;
|
||||
_calibPosList.Add(GetCurrentMoveAxisPos());
|
||||
}
|
||||
|
||||
// 3. 调用平台算法
|
||||
ReportProgress("计算融合矩阵...", totalSteps, totalSteps);
|
||||
await Task.Run(() =>
|
||||
{
|
||||
string filePath = Path.Combine(AppDomain.CurrentDomain.BaseDirectory, "CalibData");
|
||||
|
||||
if (_moduleItem.IsWaferCalib)
|
||||
{
|
||||
SemiJM1Vision.SemiJM1Manager.Instance.cal_wafer_fusion_die(
|
||||
_calibResultPointData, _calibPosList, _initialwsPos,
|
||||
_moduleItem.CalibStep, waferStep, _moduleItem.CalibCount);
|
||||
}
|
||||
else
|
||||
{
|
||||
SemiJM1Vision.SemiJM1Manager.Instance.cal_wafer_fusion_pad(
|
||||
_moduleItem.Index, _calibResultPointData, _calibPosList, _initialwsPos,
|
||||
_moduleItem.CalibStep, waferStep, _moduleItem.CalibCount);
|
||||
SemiJM1Vision.SemiJM1Manager.Instance.set_center(new Point(0, 0));
|
||||
}
|
||||
|
||||
SemiJM1Vision.SemiJM1Manager.Instance.Save(filePath);
|
||||
}, cancellationToken);
|
||||
|
||||
$"{(_moduleItem.IsWaferCalib ? "Die" : "Pad")}融合标定完成。".LogInfo();
|
||||
}
|
||||
catch (OperationCanceledException)
|
||||
{
|
||||
"融合标定已取消。".LogInfo();
|
||||
throw;
|
||||
}
|
||||
catch (Exception ex)
|
||||
{
|
||||
$"融合标定失败：{ex.Message}".LogSysError();
|
||||
throw;
|
||||
}
|
||||
}
|
||||
|
||||
public async Task VerifyAsync(CancellationToken cancellationToken)
|
||||
{
|
||||
// TODO: 验证流程
|
||||
await Task.CompletedTask;
|
||||
}
|
||||
|
||||
#region 位置计算（Die/Pad分支）
|
||||
|
||||
private void CalculatePositions(int stepIndex, out double x1, out double y1, out double x2, out double y2)
|
||||
{
|
||||
if (_moduleItem.IsWaferCalib)
|
||||
{
|
||||
// Die: 移动X1，逼近X2+Y1
|
||||
x1 = _moduleItem.CameraAxisPos + _moduleItem.Step * stepIndex;
|
||||
y1 = _moduleItem.StartY;
|
||||
x2 = _moduleItem.StartX + _moduleItem.Step * stepIndex;
|
||||
y2 = _hardware.Axis_Y2.State.ActualPos;
|
||||
}
|
||||
else
|
||||
{
|
||||
// Pad: 移动Y1，逼近X1+Y2
|
||||
x1 = _moduleItem.StartX;
|
||||
y1 = _moduleItem.CameraAxisPos + _moduleItem.Step * stepIndex;
|
||||
x2 = _hardware.Axis_X2.State.ActualPos;
|
||||
y2 = _moduleItem.StartY + _moduleItem.Step * stepIndex;
|
||||
}
|
||||
}
|
||||
|
||||
private double GetCurrentY1()
|
||||
{
|
||||
return _hardware.Axis_Y1.State.ActualPos;
|
||||
}
|
||||
|
||||
private double GetCurrentMoveAxisPos()
|
||||
{
|
||||
return _moduleItem.IsWaferCalib
|
||||
? _hardware.Axis_X1.State.ActualPos
|
||||
: _hardware.Axis_Y1.State.ActualPos;
|
||||
}
|
||||
|
||||
#endregion
|
||||
|
||||
#region 网格采集
|
||||
|
||||
private Point[,] ApprochTable(double calibStep, double x1, double y1, double x2, double y2,
|
||||
int count, string path, CancellationToken ct)
|
||||
{
|
||||
int calibCount = _moduleItem.CalibCount;
|
||||
Point[,] pointArray = new Point[calibCount, calibCount];
|
||||
|
||||
// 先移到起始位置
|
||||
if (_moduleItem.IsWaferCalib)
|
||||
_motionService.MoveWsAvoidance(x2, y1);
|
||||
else
|
||||
_motionService.MovePhsAvoidance(x1, y2);
|
||||
|
||||
for (int y = 0; y < calibCount; y++)
|
||||
{
|
||||
double Y1 = y * calibStep + y1;
|
||||
double Y2 = y * calibStep + y2;
|
||||
|
||||
for (int x = 0; x < calibCount; x++)
|
||||
{
|
||||
ct.ThrowIfCancellationRequested();
|
||||
|
||||
int index = y % 2 == 0 ? x : calibCount - 1 - x;
|
||||
double X2 = index * calibStep + x2;
|
||||
double X1 = index * calibStep + x1;
|
||||
|
||||
if (_moduleItem.IsWaferCalib)
|
||||
{
|
||||
_motionService.MoveWsAvoidance(X2, Y1);
|
||||
// TODO: 调用逼近识别
|
||||
pointArray[index, y] = new Point(
|
||||
_hardware.Axis_X2.State.ActualPos,
|
||||
_hardware.Axis_Y1.State.ActualPos);
|
||||
}
|
||||
else
|
||||
{
|
||||
_motionService.MovePhsAvoidance(X1, Y2);
|
||||
// TODO: 调用逼近识别
|
||||
pointArray[index, y] = new Point(
|
||||
_hardware.Axis_X1.State.ActualPos,
|
||||
_hardware.Axis_Y2.State.ActualPos);
|
||||
}
|
||||
}
|
||||
}
|
||||
|
||||
return pointArray;
|
||||
}
|
||||
|
||||
#endregion
|
||||
|
||||
private void ReportProgress(string message, int current, int total)
|
||||
{
|
||||
ProgressChanged?.Invoke(this, new CalibrationProgressEventArgs
|
||||
{
|
||||
Message = message,
|
||||
Current = current,
|
||||
Total = total
|
||||
});
|
||||
}
|
||||
}
|
||||
}
|
||||
@@ -0,0 +1,58 @@
|
||||
using SemiconductorVisionAlgorithm.SemiParams;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.IO;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace MainShell.AlgorithmCalib.Service
|
||||
{
|
||||
public static class MotionCalibFileService
|
||||
{
|
||||
public static void SaveCalibPointsFile(string path, List<Point> real, List<Point> ruler)
|
||||
{
|
||||
using (var sw = new StreamWriter(path))
|
||||
{
|
||||
sw.WriteLine("# realX, realY, rulerX, rulerY");
|
||||
int count = Math.Max(real.Count, ruler.Count);
|
||||
for (int i = 0; i < count; i++)
|
||||
{
|
||||
var r = i < real.Count ? real[i] : new Point(0, 0);
|
||||
var u = i < ruler.Count ? ruler[i] : new Point(0, 0);
|
||||
sw.WriteLine($"{r.X},{r.Y},{u.X},{u.Y}");
|
||||
}
|
||||
}
|
||||
}
|
||||
|
||||
public static void ReadCalibPointsFile(string path, out List<Point> real, out List<Point> ruler)
|
||||
{
|
||||
real = new List<Point>();
|
||||
ruler = new List<Point>();
|
||||
|
||||
if (!File.Exists(path))
|
||||
return;
|
||||
|
||||
foreach (var line in File.ReadLines(path))
|
||||
{
|
||||
var l = line.Trim();
|
||||
if (string.IsNullOrEmpty(l)) continue;
|
||||
if (l.StartsWith("#")) continue;
|
||||
|
||||
var sp = l.Split(',');
|
||||
if (sp.Length < 4) continue;
|
||||
|
||||
real.Add(new Point(
|
||||
double.Parse(sp[0]),
|
||||
double.Parse(sp[1])
|
||||
));
|
||||
ruler.Add(new Point(
|
||||
double.Parse(sp[2]),
|
||||
double.Parse(sp[3])
|
||||
));
|
||||
}
|
||||
}
|
||||
}
|
||||
|
||||
}
|
||||
|
||||
@@ -0,0 +1,52 @@
|
||||
using SemiconductorVisionAlgorithm.SemiParams;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.IO;
|
||||
|
||||
namespace MainShell.AlgorithmCalib.Service
|
||||
{
|
||||
/// <summary>
|
||||
/// 旋转表标定文件服务
|
||||
/// </summary>
|
||||
public static class RotateMatixFormCalibFileService
|
||||
{
|
||||
/// <summary>
|
||||
/// 保存验证点数据
|
||||
/// </summary>
|
||||
public static void SaveVerifyPointsFile(string path, List<Point> cal, List<Point> real)
|
||||
{
|
||||
using (var sw = new StreamWriter(path))
|
||||
{
|
||||
int count = cal.Count;
|
||||
sw.WriteLine("Cal_X,Cal_Y,Real_X,Real_Y");
|
||||
for (int i = 0; i < count; i++)
|
||||
{
|
||||
sw.WriteLine($"{cal[i].X},{cal[i].Y},{real[i].X},{real[i].Y}");
|
||||
}
|
||||
}
|
||||
}
|
||||
|
||||
/// <summary>
|
||||
/// 保存标定网格数据（用于调试）
|
||||
/// </summary>
|
||||
public static void SaveCalibrationGridData(string path, List<Point[,]> calibData,List<double> rotatePosList)
|
||||
{
|
||||
using (var sw = new StreamWriter(path))
|
||||
{
|
||||
sw.WriteLine("RotatePos,GridY,GridX,PointX,PointY");
|
||||
for (int step = 0; step < calibData.Count; step++)
|
||||
{
|
||||
var grid = calibData[step];
|
||||
int n = grid.GetLength(0);
|
||||
for (int y = 0; y < n; y++)
|
||||
{
|
||||
for (int x = 0; x < n; x++)
|
||||
{
|
||||
sw.WriteLine($"{rotatePosList[step]:F4},{y},{x},{grid[y,x].X:F6},{grid[y, x].Y:F6}");
|
||||
}
|
||||
}
|
||||
}
|
||||
}
|
||||
}
|
||||
}
|
||||
}
|
||||
@@ -0,0 +1,134 @@
|
||||
using MainShell.Hardware;
|
||||
using MainShell.Log;
|
||||
using MainShell.Motion;
|
||||
using MaxwellFramework.Core.Attributes;
|
||||
using MwFramework.Device;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Threading;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace MainShell.AlgorithmCalib.Service
|
||||
{
|
||||
/// <summary>
|
||||
/// 旋转表标定运动服务
|
||||
/// 对标 OriginCalibrationMotionService
|
||||
/// </summary>
|
||||
[Singleton]
|
||||
public class RotateMatixFormCalibMotionService
|
||||
{
|
||||
private const int PositionSettleDelayMilliseconds = 200;
|
||||
|
||||
private readonly HardwareManager _hardware;
|
||||
private readonly SafeAxisMotion _safeAxisMotion;
|
||||
|
||||
public RotateMatixFormCalibMotionService(HardwareManager hardware, SafeAxisMotion safeAxisMotion)
|
||||
{
|
||||
_hardware = hardware ?? throw new ArgumentNullException(nameof(hardware));
|
||||
_safeAxisMotion = safeAxisMotion ?? throw new ArgumentNullException(nameof(safeAxisMotion));
|
||||
}
|
||||
|
||||
#region 低级运动方法
|
||||
|
||||
public void SafeMove(IAxis axis, double position)
|
||||
{
|
||||
_safeAxisMotion.SafeMove(
|
||||
MotionMoveRequest.ForAxis(GetRequiredAxis(axis, nameof(axis)), position));
|
||||
}
|
||||
|
||||
public async Task SafeMoveAsync(IAxis axis, double position, CancellationToken cancellationToken = default)
|
||||
{
|
||||
var result = await _safeAxisMotion.SafeMoveAsync(
|
||||
cancellationToken,
|
||||
MotionMoveRequest.ForAxis(GetRequiredAxis(axis, nameof(axis)),position)).ConfigureAwait(false);
|
||||
result.EnsureSuccess();
|
||||
}
|
||||
|
||||
public void MoveWsAvoidance(double xPosition, double yPosition)
|
||||
{
|
||||
_safeAxisMotion.SafeMove(
|
||||
MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_X2,nameof(_hardware.Axis_X2)), xPosition),
|
||||
MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_Y1,nameof(_hardware.Axis_Y1)), yPosition));
|
||||
}
|
||||
|
||||
public async Task MoveWsAvoidanceAsync(double xPosition, double yPosition,CancellationToken cancellationToken = default)
|
||||
{
|
||||
var result = await _safeAxisMotion.SafeMoveAsync(
|
||||
cancellationToken,
|
||||
MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_X2,nameof(_hardware.Axis_X2)), xPosition),
|
||||
MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_Y1,nameof(_hardware.Axis_Y1)), yPosition)).ConfigureAwait(false);
|
||||
result.EnsureSuccess();
|
||||
}
|
||||
|
||||
public void RotatePos(double rotatePosition)
|
||||
{
|
||||
_safeAxisMotion.SafeMove(
|
||||
MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_WS_R,nameof(_hardware.Axis_WS_R)), rotatePosition));
|
||||
}
|
||||
|
||||
public async Task RotatePosAsync(double rotatePosition, CancellationToken cancellationToken = default)
|
||||
{
|
||||
var result = await _safeAxisMotion.SafeMoveAsync(
|
||||
cancellationToken,
|
||||
MotionMoveRequest.ForAxis(GetRequiredAxis(_hardware.Axis_WS_R,nameof(_hardware.Axis_WS_R)), rotatePosition)).ConfigureAwait(false);
|
||||
result.EnsureSuccess();
|
||||
}
|
||||
|
||||
#endregion
|
||||
|
||||
#region 批量运动方法（对标 OriginCalibrationMotionService）
|
||||
|
||||
/// <summary>
|
||||
/// 批量移动避让轴
|
||||
/// </summary>
|
||||
public async Task MoveAvoidanceAxesAsync(CancellationToken cancellationToken = default)
|
||||
{
|
||||
// 移动 X1 到避让位
|
||||
if (_hardware.Axis_PHS_X1 != null)
|
||||
{
|
||||
string.Format("旋转表标定移动避让轴 X1 到位置。").LogInfo();
|
||||
await SafeMoveAsync(_hardware.Axis_PHS_X1, 0,cancellationToken).ConfigureAwait(false);
|
||||
}
|
||||
}
|
||||
|
||||
/// <summary>
|
||||
/// 等待轴稳定后采集实际位置
|
||||
/// </summary>
|
||||
public async Task<Dictionary<string, double>> CollectActualPositionsAsync(
|
||||
IEnumerable<string> axisNames,
|
||||
CancellationToken cancellationToken = default)
|
||||
{
|
||||
string.Format("旋转表标定等待 {0} ms 以稳定轴反馈。",PositionSettleDelayMilliseconds).LogInfo();
|
||||
await Task.Delay(PositionSettleDelayMilliseconds,cancellationToken).ConfigureAwait(false);
|
||||
|
||||
var positions = new Dictionary<string, double>(StringComparer.Ordinal);
|
||||
foreach (var axisName in axisNames)
|
||||
{
|
||||
if (string.IsNullOrWhiteSpace(axisName)) continue;
|
||||
|
||||
var axis = _hardware.GetAxisByName(axisName);
|
||||
if (axis == null) continue;
|
||||
|
||||
positions[axisName] = GetActualPosition(axis);
|
||||
string.Format("旋转表标定已采集轴'{0}'的实际位置：{1:F3}。", axisName,positions[axisName]).LogInfo();
|
||||
}
|
||||
|
||||
return positions;
|
||||
}
|
||||
|
||||
#endregion
|
||||
|
||||
private static double GetActualPosition(IAxis axis)
|
||||
{
|
||||
return axis.State != null ? axis.State.ActualPos : axis.GetPositionImmediate();
|
||||
}
|
||||
|
||||
private static IAxis GetRequiredAxis(IAxis axis, string axisPropertyName)
|
||||
{
|
||||
if (axis == null)
|
||||
throw new InvalidOperationException(string.Format("Axis '{0}' is not available.",axisPropertyName));
|
||||
return axis;
|
||||
}
|
||||
}
|
||||
}
|
||||
@@ -0,0 +1,598 @@
|
||||
using JM1Vision;
|
||||
using MainShell.AlgorithmCalib.Common;
|
||||
using MainShell.AlgorithmCalib.Model;
|
||||
using MainShell.Common;
|
||||
using MainShell.Hardware;
|
||||
using MainShell.Log;
|
||||
using MainShell.Motion;
|
||||
using MainShell.PageCalib.OriginCalib.Service;
|
||||
using SemiconductorVisionAlgorithm.SemiCalib;
|
||||
using SemiconductorVisionAlgorithm.SemiParams;
|
||||
using SemiJM1Vision;
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.IO;
|
||||
using System.Linq;
|
||||
using System.Reflection;
|
||||
using System.Threading;
|
||||
using System.Threading.Tasks;
|
||||
using Point = SemiconductorVisionAlgorithm.SemiParams.Point;
|
||||
|
||||
namespace MainShell.AlgorithmCalib.Service
|
||||
{
|
||||
/// <summary>
|
||||
/// 旋转表标定后处理器
|
||||
/// 对标原 RotateFormCalibTask 的逻辑
|
||||
/// </summary>
|
||||
public class RotateMatixFormCalibPostProcessor : IAlgorithmCalibrationPostProcessor
|
||||
{
|
||||
private readonly RotateMatixFormCalibMotionService _motionService;
|
||||
private readonly HardwareManager _hardware;
|
||||
private readonly RotateMatixFormCalibModuleItem _moduleItem;
|
||||
private readonly ApproachAlignmentService _approachAlignmentService;
|
||||
private readonly Func<Rectangle1> _roiRectProvider; // ROI 提供者委托
|
||||
|
||||
public event EventHandler<CalibrationProgressEventArgs> ProgressChanged;
|
||||
|
||||
// 运行时数据
|
||||
private Point[,] _initialwsPos;
|
||||
private List<Point[,]> _calibWaferData = new List<Point[,]>();
|
||||
private List<double> _rotatePosList = new List<double>();
|
||||
private double _initialwsRotate;
|
||||
|
||||
public string Name => "RotateFormCalib";
|
||||
|
||||
public RotateMatixFormCalibPostProcessor(
|
||||
RotateMatixFormCalibMotionService motionService,
|
||||
HardwareManager hardware,
|
||||
RotateMatixFormCalibModuleItem moduleItem,
|
||||
ApproachAlignmentService approachAlignmentService,
|
||||
Func<Rectangle1> roiRectProvider)
|
||||
{
|
||||
_motionService = motionService ?? throw new ArgumentNullException(nameof(motionService));
|
||||
_hardware = hardware ?? throw new ArgumentNullException(nameof(hardware));
|
||||
_moduleItem = moduleItem ?? throw new ArgumentNullException(nameof(moduleItem));
|
||||
_approachAlignmentService = approachAlignmentService ?? throw new ArgumentNullException(nameof(approachAlignmentService));
|
||||
_roiRectProvider = roiRectProvider;
|
||||
}
|
||||
|
||||
/// <summary>
|
||||
/// 标定主流程
|
||||
/// 对标原 RotateFormCalibTask.RotateCalib()
|
||||
/// </summary>
|
||||
public async Task ExecuteAsync(AlgorithmCalibExecutionResult calibrationResult, CancellationToken cancellationToken)
|
||||
{
|
||||
"旋转表标定开始。".LogInfo();
|
||||
|
||||
try
|
||||
{
|
||||
// 清空历史数据
|
||||
_calibWaferData.Clear();
|
||||
_rotatePosList.Clear();
|
||||
|
||||
double waferStep = _moduleItem.WaferStep;
|
||||
int rowCol = _moduleItem.RowCol;
|
||||
|
||||
// 1. 移动到起始位置，采集初始网格点
|
||||
ReportProgress("采集初始网格点...", 0, 1);
|
||||
_initialwsPos = await GetInitPointsAsync(
|
||||
waferStep,
|
||||
_moduleItem.X1AvoidancePosition,
|
||||
_moduleItem.StartY,
|
||||
_moduleItem.StartX,
|
||||
cancellationToken).ConfigureAwait(false);
|
||||
|
||||
_initialwsRotate = _hardware.Axis_WS_R.State.ActualPos;
|
||||
string.Format("旋转表标定：初始旋转位置 = {0:F4}。", _initialwsRotate).LogInfo();
|
||||
|
||||
// 2. 计算总旋转步数
|
||||
double rotateStep = _moduleItem.RotateStep;
|
||||
|
||||
double negLimit = 0;
|
||||
double posLimit = 0;
|
||||
|
||||
_hardware.Axis_WS_R.GetSoftMel(ref negLimit);
|
||||
_hardware.Axis_WS_R.GetSoftPel(ref posLimit);
|
||||
|
||||
// 如果限位为0，使用默认范围
|
||||
if (negLimit == 0 && posLimit == 0)
|
||||
{
|
||||
negLimit = -180;
|
||||
posLimit = 180;
|
||||
"旋转表标定：限位为0，使用默认范围 [-180, 180]。".LogInfo();
|
||||
}
|
||||
|
||||
double startAngle = negLimit;
|
||||
double range = posLimit - startAngle;
|
||||
int totalCount = (int)(range / rotateStep) + 1;
|
||||
|
||||
string.Format("旋转表标定：旋转步数 = {0}，范围 = [{1:F4}, {2:F4}]。", totalCount, negLimit, posLimit).LogInfo();
|
||||
|
||||
// 初始化数据容器
|
||||
for (int i = 0; i < totalCount; i++)
|
||||
{
|
||||
_rotatePosList.Add(0);
|
||||
_calibWaferData.Add(new Point[rowCol, rowCol]);
|
||||
}
|
||||
|
||||
// 3. 旋转轴先转到负限位
|
||||
ReportProgress("旋转轴移动到负限位...", 0, totalCount);
|
||||
await _motionService.RotatePosAsync(negLimit, cancellationToken).ConfigureAwait(false);
|
||||
|
||||
// 4. 从负限位开始，逐步旋转到正限位，每步采集网格
|
||||
for (int stepIndex = 0; stepIndex < totalCount; stepIndex++)
|
||||
{
|
||||
double targetRotate = startAngle + rotateStep * stepIndex;
|
||||
|
||||
if (targetRotate > posLimit)
|
||||
break;
|
||||
|
||||
cancellationToken.ThrowIfCancellationRequested();
|
||||
|
||||
ReportProgress($"旋转到 {targetRotate:F2}°", stepIndex, totalCount);
|
||||
// 旋转到目标角度
|
||||
await _motionService.RotatePosAsync(targetRotate, cancellationToken).ConfigureAwait(false);
|
||||
_rotatePosList[stepIndex] = _hardware.Axis_WS_R.State.ActualPos;
|
||||
|
||||
|
||||
// 计算旋转后的拍照位置
|
||||
var rotateOffset = targetRotate - _initialwsRotate;
|
||||
var resultPts = new Point[rowCol, rowCol];
|
||||
SemiJM1Manager.Instance.RotatePts("", _initialwsPos, rotateOffset, out resultPts);
|
||||
ReportProgress($"采集网格点 ({stepIndex + 1}/{totalCount})", stepIndex + 1, totalCount);
|
||||
|
||||
var resultPoints = await GetApproachCenterPointsAsync(resultPts, stepIndex, cancellationToken).ConfigureAwait(false);
|
||||
_calibWaferData[stepIndex] = resultPoints;
|
||||
}
|
||||
|
||||
// 5. 融合计算
|
||||
ReportProgress("融合计算...", totalCount, totalCount);
|
||||
SemiJM1Manager.Instance.MakeRotateTable(
|
||||
_calibWaferData, _rotatePosList, _moduleItem.RotateStep);
|
||||
|
||||
// 6. 保存标定数据
|
||||
ReportProgress("保存标定数据...", totalCount, totalCount);
|
||||
string filePath = Path.Combine(AppDomain.CurrentDomain.BaseDirectory, "CalibData");
|
||||
Directory.CreateDirectory(filePath);
|
||||
JM1Manager.Instance.Save(filePath);
|
||||
string.Format("旋转表标定：标定数据已保存到 {0}。", filePath).LogInfo();
|
||||
|
||||
// 7. 保存调试数据
|
||||
string debugPath = Path.Combine(filePath, "RotateFormCalibDebug.csv");
|
||||
RotateMatixFormCalibFileService.SaveCalibrationGridData(debugPath, _calibWaferData, _rotatePosList);
|
||||
ReportProgress("标定完成", totalCount, totalCount);
|
||||
"旋转表标定完成。".LogInfo();
|
||||
}
|
||||
catch (OperationCanceledException)
|
||||
{
|
||||
"旋转表标定已取消。".LogInfo();
|
||||
throw;
|
||||
}
|
||||
catch (Exception ex)
|
||||
{
|
||||
string.Format("旋转表标定失败：{0}", ex.Message).LogSysError();
|
||||
throw;
|
||||
}
|
||||
}
|
||||
|
||||
/// <summary>
|
||||
/// 验证流程
|
||||
/// 对标原 RotateFormCalibTask.RotateCalibVerify()
|
||||
/// </summary>
|
||||
public async Task VerifyAsync(CancellationToken cancellationToken)
|
||||
{
|
||||
"旋转表验证开始。".LogInfo();
|
||||
|
||||
try
|
||||
{
|
||||
double verifyWaferStep = _moduleItem.VerifyWaferStep;
|
||||
double initWsRotate = _hardware.Axis_WS_R.State.ActualPos;
|
||||
double rotateOffset = _moduleItem.VerifyRotateRange;
|
||||
int totalSteps = _moduleItem.VerifyRowCol * _moduleItem.VerifyRowCol + 2;
|
||||
|
||||
// 1. 获取验证初始点
|
||||
ReportProgress("获取验证初始点...", 0, totalSteps);
|
||||
var initVerifyPts = await GetInitListPointsAsync(
|
||||
verifyWaferStep,
|
||||
_moduleItem.VerifyStartX,
|
||||
_moduleItem.VerifyStartY,
|
||||
cancellationToken).ConfigureAwait(false);
|
||||
|
||||
// 2. 旋转轴转到目标位置
|
||||
double targetRotate = initWsRotate + rotateOffset;
|
||||
ReportProgress("旋转到目标角度...", 1, totalSteps);
|
||||
await _motionService.RotatePosAsync(targetRotate, cancellationToken).ConfigureAwait(false);
|
||||
|
||||
// 3. 调用算法接口计算预期位置
|
||||
ReportProgress("计算预期位置...", 2, totalSteps);
|
||||
var calPts = new List<Point>();
|
||||
SemiJM1Manager.Instance.GetRotateDstPos(initVerifyPts, initWsRotate, rotateOffset, out calPts);
|
||||
|
||||
// 4. 逐个移动并采集实际位置
|
||||
ReportProgress("逐个采集实际位置...", 2, totalSteps);
|
||||
var approachPts = await MoveAndGetPtsAsync(calPts, cancellationToken).ConfigureAwait(false);
|
||||
|
||||
// 5. 保存验证数据
|
||||
ReportProgress("保存验证数据...", totalSteps, totalSteps);
|
||||
string filePath = Path.Combine(AppDomain.CurrentDomain.BaseDirectory, "RotateFormVerify.csv");
|
||||
RotateMatixFormCalibFileService.SaveVerifyPointsFile(filePath, calPts, approachPts);
|
||||
ReportProgress("验证完成", totalSteps, totalSteps);
|
||||
|
||||
"旋转表验证完成。".LogInfo();
|
||||
}
|
||||
catch (OperationCanceledException)
|
||||
{
|
||||
"旋转表验证已取消。".LogInfo();
|
||||
throw;
|
||||
}
|
||||
catch (Exception ex)
|
||||
{
|
||||
string.Format("旋转表验证失败：{0}", ex.Message).LogSysError();
|
||||
throw;
|
||||
}
|
||||
}
|
||||
|
||||
#region 辅助方法
|
||||
|
||||
///// <summary>
|
||||
///// 蛇形扫描网格，返回 Point[RowCol, RowCol]
|
||||
///// 对标原 RotateFormCalibTask.GetInitPoints()
|
||||
///// </summary>
|
||||
//private async Task<Point[,]> GetInitPointsAsync(
|
||||
// double waferStep, double x1, double y1, double x2,
|
||||
// CancellationToken cancellationToken)
|
||||
//{
|
||||
// int n = _moduleItem.RowCol;
|
||||
// var pointArray = new Point[n, n];
|
||||
|
||||
// // 移动 X1 到避让位
|
||||
// await _motionService.SafeMoveAsync(_hardware.Axis_PHS_X1, x1, cancellationToken).ConfigureAwait(false);
|
||||
|
||||
// for (int y = 0; y < n; y++)
|
||||
// {
|
||||
// for (int x = 0; x < n; x++)
|
||||
// {
|
||||
// int index = y % 2 == 0 ? x : n - 1 - x;
|
||||
// double waferX = index * waferStep + x2;
|
||||
// double waferY = y * waferStep + y1;
|
||||
|
||||
// cancellationToken.ThrowIfCancellationRequested();
|
||||
|
||||
// // 粗移到目标位置
|
||||
// await _motionService.MoveWsAvoidanceAsync(waferX, waferY, cancellationToken).ConfigureAwait(false);
|
||||
|
||||
// // 逼近对齐
|
||||
// bool success = await ApproachAtPointAsync(cancellationToken).ConfigureAwait(false);
|
||||
// if (!success)
|
||||
// {
|
||||
// throw new InvalidOperationException(string.Format("逼近对齐失败 at ({0:F4}, {0:F4})。", waferX, waferY));
|
||||
// }
|
||||
|
||||
// // 采集光栅尺位置
|
||||
// var rulerX2 = _hardware.Axis_X2.State.ActualPos;
|
||||
// var rulerY1 = _hardware.Axis_Y1.State.ActualPos;
|
||||
// pointArray[y, index] = new Point(rulerX2, rulerY1);
|
||||
|
||||
// string.Format("初始网格点 [{0},{1}] = ({2:F4}, {3:F4})。", y, index, rulerX2,
|
||||
// rulerY1).LogInfo();
|
||||
// }
|
||||
// }
|
||||
|
||||
// return pointArray;
|
||||
//}
|
||||
|
||||
///// <summary>
|
||||
///// 根据旋转后的拍照位置，蛇形逐个对齐
|
||||
///// 对标原 RotateFormCalibTask.GetApproachCenterPoints()
|
||||
///// </summary>
|
||||
//private async Task<Point[,]> GetApproachCenterPointsAsync(
|
||||
// Point[,] cameraPoints, int stepIndex,
|
||||
// CancellationToken cancellationToken)
|
||||
//{
|
||||
// int n = _moduleItem.RowCol;
|
||||
// var resultArray = new Point[n, n];
|
||||
|
||||
// for (int y = 0; y < n; y++)
|
||||
// {
|
||||
// for (int x = 0; x < n; x++)
|
||||
// {
|
||||
// int index = y % 2 == 0 ? x : n - 1 - x;
|
||||
// cancellationToken.ThrowIfCancellationRequested();
|
||||
|
||||
// double px = cameraPoints[y, index].X;
|
||||
// double py = cameraPoints[y, index].Y;
|
||||
|
||||
// // 粗移到目标位置
|
||||
// await _motionService.MoveWsAvoidanceAsync(px, py, cancellationToken).ConfigureAwait(false);
|
||||
|
||||
// // 逼近对齐
|
||||
// bool success = await ApproachAtPointAsync(cancellationToken).ConfigureAwait(false);
|
||||
// if (!success)
|
||||
// {
|
||||
// throw new InvalidOperationException(string.Format("逼近对齐失败 at ({0:F4}, {1:F4})。", px, py));
|
||||
// }
|
||||
|
||||
// // 采集光栅尺位置
|
||||
// var rulerX2 = _hardware.Axis_X2.State.ActualPos;
|
||||
// var rulerY1 = _hardware.Axis_Y1.State.ActualPos;
|
||||
// resultArray[y, index] = new Point(rulerX2, rulerY1);
|
||||
// }
|
||||
// }
|
||||
|
||||
// return resultArray;
|
||||
//}
|
||||
|
||||
///// <summary>
|
||||
///// 蛇形扫描网格，返回 List<Point>
|
||||
///// 对标原 RotateFormCalibTask.GetInitListPoints()
|
||||
///// </summary>
|
||||
//private async Task<List<Point>> GetInitListPointsAsync(
|
||||
// double waferStep, double x2, double y1,
|
||||
// CancellationToken cancellationToken)
|
||||
//{
|
||||
// int n = _moduleItem.VerifyRowCol;
|
||||
|
||||
// // 移动 X1 到避让位
|
||||
// await _motionService.SafeMoveAsync(_hardware.Axis_PHS_X1, _moduleItem.X1AvoidancePosition, cancellationToken).ConfigureAwait(false);
|
||||
|
||||
// var pointArray = new List<Point>();
|
||||
|
||||
// for (int y = 0; y < n; y++)
|
||||
// {
|
||||
// for (int x = 0; x < n; x++)
|
||||
// {
|
||||
// int index = y % 2 == 0 ? x : n - 1 - x;
|
||||
// double waferX = index * waferStep + x2;
|
||||
// double waferY = y * waferStep + y1;
|
||||
|
||||
// cancellationToken.ThrowIfCancellationRequested();
|
||||
|
||||
// // 粗移到目标位置
|
||||
// await _motionService.MoveWsAvoidanceAsync(waferX, waferY, cancellationToken).ConfigureAwait(false);
|
||||
|
||||
// // 逼近对齐
|
||||
// bool success = await ApproachAtPointAsync(cancellationToken).ConfigureAwait(false);
|
||||
// if (!success)
|
||||
// {
|
||||
// throw new InvalidOperationException(string.Format("逼近对齐失败 at ({0:F4},{1:F4})。", waferX, waferY));
|
||||
// }
|
||||
|
||||
// // 采集光栅尺位置
|
||||
// var rulerX2 = _hardware.Axis_X2.State.ActualPos;
|
||||
// var rulerY1 = _hardware.Axis_Y1.State.ActualPos;
|
||||
// pointArray.Add(new Point(rulerX2, rulerY1));
|
||||
// }
|
||||
// }
|
||||
|
||||
// return pointArray;
|
||||
//}
|
||||
|
||||
///// <summary>
|
||||
///// 逐个移动到目标点并采集实际位置
|
||||
///// 对标原 RotateFormCalibTask.MoveAndGetPts()
|
||||
///// </summary>
|
||||
//private async Task<List<Point>> MoveAndGetPtsAsync(
|
||||
// List<Point> targetPts,
|
||||
// CancellationToken cancellationToken)
|
||||
//{
|
||||
// var pointArray = new List<Point>();
|
||||
|
||||
// foreach (var pt in targetPts)
|
||||
// {
|
||||
// cancellationToken.ThrowIfCancellationRequested();
|
||||
|
||||
// // 粗移到目标位置
|
||||
// await _motionService.MoveWsAvoidanceAsync(pt.X, pt.Y,
|
||||
//cancellationToken).ConfigureAwait(false);
|
||||
|
||||
// // 逼近对齐
|
||||
// bool success = await ApproachAtPointAsync(cancellationToken).ConfigureAwait(false);
|
||||
// if (!success)
|
||||
// {
|
||||
// throw new InvalidOperationException(string.Format("逼近对齐失败 at ({0:F4},{1:F4})。", pt.X, pt.Y));
|
||||
// }
|
||||
|
||||
// // 采集光栅尺位置
|
||||
// var rulerX2 = _hardware.Axis_X2.State.ActualPos;
|
||||
// var rulerY1 = _hardware.Axis_Y1.State.ActualPos;
|
||||
// pointArray.Add(new Point(rulerX2, rulerY1));
|
||||
// }
|
||||
|
||||
// return pointArray;
|
||||
//}
|
||||
|
||||
/// <summary>
|
||||
/// 移动逼近公共方法
|
||||
/// </summary>
|
||||
/// <param name="targetX"></param>
|
||||
/// <param name="targetY"></param>
|
||||
/// <param name="cancellationToken"></param>
|
||||
/// <returns></returns>
|
||||
/// <exception cref="InvalidOperationException"></exception>
|
||||
private async Task<Point> MoveApproachAndCollectAsync(
|
||||
double targetX, double targetY, CancellationToken cancellationToken)
|
||||
{
|
||||
await _motionService.MoveWsAvoidanceAsync(targetX, targetY,
|
||||
cancellationToken).ConfigureAwait(false);
|
||||
|
||||
bool success = await ApproachAtPointAsync(cancellationToken).ConfigureAwait(false);
|
||||
if (!success)
|
||||
{
|
||||
throw new InvalidOperationException($"逼近对齐失败 at ({targetX:F4}, {targetY:F4})。");
|
||||
}
|
||||
|
||||
var rulerX2 = _hardware.Axis_X2.State.ActualPos;
|
||||
var rulerY1 = _hardware.Axis_Y1.State.ActualPos;
|
||||
return new Point(rulerX2, rulerY1);
|
||||
}
|
||||
|
||||
|
||||
/// <summary>
|
||||
/// 获取标定初始点组
|
||||
/// </summary>
|
||||
/// <param name="waferStep"></param>
|
||||
/// <param name="x1"></param>
|
||||
/// <param name="y1"></param>
|
||||
/// <param name="x2"></param>
|
||||
/// <param name="cancellationToken"></param>
|
||||
/// <returns></returns>
|
||||
private async Task<Point[,]> GetInitPointsAsync(
|
||||
double waferStep, double x1, double y1, double x2,
|
||||
CancellationToken cancellationToken)
|
||||
{
|
||||
int n = _moduleItem.RowCol;
|
||||
var pointArray = new Point[n, n];
|
||||
|
||||
await _motionService.SafeMoveAsync(_hardware.Axis_PHS_X1, x1,
|
||||
cancellationToken).ConfigureAwait(false);
|
||||
|
||||
for (int y = 0; y < n; y++)
|
||||
{
|
||||
for (int x = 0; x < n; x++)
|
||||
{
|
||||
int index = y % 2 == 0 ? x : n - 1 - x;
|
||||
double waferX = index * waferStep + x2;
|
||||
double waferY = y * waferStep + y1;
|
||||
|
||||
cancellationToken.ThrowIfCancellationRequested();
|
||||
|
||||
pointArray[y, index] = await MoveApproachAndCollectAsync(
|
||||
waferX, waferY, cancellationToken).ConfigureAwait(false);
|
||||
|
||||
string.Format("初始网格点 [{0},{1}] = ({2:F4}, {3:F4})。",
|
||||
y, index, pointArray[y, index].X, pointArray[y, index].Y).LogInfo();
|
||||
}
|
||||
}
|
||||
|
||||
return pointArray;
|
||||
}
|
||||
|
||||
/// <summary>
|
||||
/// 标定流程内获取点
|
||||
/// </summary>
|
||||
/// <param name="cameraPoints"></param>
|
||||
/// <param name="stepIndex"></param>
|
||||
/// <param name="cancellationToken"></param>
|
||||
/// <returns></returns>
|
||||
private async Task<Point[,]> GetApproachCenterPointsAsync(
|
||||
Point[,] cameraPoints, int stepIndex,
|
||||
CancellationToken cancellationToken)
|
||||
{
|
||||
int n = _moduleItem.RowCol;
|
||||
var resultArray = new Point[n, n];
|
||||
|
||||
for (int y = 0; y < n; y++)
|
||||
{
|
||||
for (int x = 0; x < n; x++)
|
||||
{
|
||||
int index = y % 2 == 0 ? x : n - 1 - x;
|
||||
cancellationToken.ThrowIfCancellationRequested();
|
||||
|
||||
resultArray[y, index] = await MoveApproachAndCollectAsync(
|
||||
cameraPoints[y, index].X, cameraPoints[y, index].Y,
|
||||
cancellationToken).ConfigureAwait(false);
|
||||
}
|
||||
}
|
||||
|
||||
return resultArray;
|
||||
}
|
||||
|
||||
/// <summary>
|
||||
/// 验证流程获取初始点
|
||||
/// </summary>
|
||||
/// <param name="waferStep"></param>
|
||||
/// <param name="x2"></param>
|
||||
/// <param name="y1"></param>
|
||||
/// <param name="cancellationToken"></param>
|
||||
/// <returns></returns>
|
||||
private async Task<List<Point>> GetInitListPointsAsync(
|
||||
double waferStep, double x2, double y1,
|
||||
CancellationToken cancellationToken)
|
||||
{
|
||||
int n = _moduleItem.VerifyRowCol;
|
||||
await _motionService.SafeMoveAsync(_hardware.Axis_PHS_X1, _moduleItem.X1AvoidancePosition,
|
||||
cancellationToken).ConfigureAwait(false);
|
||||
|
||||
var pointArray = new List<Point>();
|
||||
|
||||
for (int y = 0; y < n; y++)
|
||||
{
|
||||
for (int x = 0; x < n; x++)
|
||||
{
|
||||
int index = y % 2 == 0 ? x : n - 1 - x;
|
||||
double waferX = index * waferStep + x2;
|
||||
double waferY = y * waferStep + y1;
|
||||
|
||||
cancellationToken.ThrowIfCancellationRequested();
|
||||
|
||||
pointArray.Add(await MoveApproachAndCollectAsync(
|
||||
waferX, waferY, cancellationToken).ConfigureAwait(false));
|
||||
}
|
||||
}
|
||||
|
||||
return pointArray;
|
||||
}
|
||||
|
||||
/// <summary>
|
||||
/// 验证流程获取旋转后验证点
|
||||
/// </summary>
|
||||
/// <param name="targetPts"></param>
|
||||
/// <param name="cancellationToken"></param>
|
||||
/// <returns></returns>
|
||||
private async Task<List<Point>> MoveAndGetPtsAsync(
|
||||
List<Point> targetPts,
|
||||
CancellationToken cancellationToken)
|
||||
{
|
||||
var pointArray = new List<Point>();
|
||||
|
||||
foreach (var pt in targetPts)
|
||||
{
|
||||
cancellationToken.ThrowIfCancellationRequested();
|
||||
|
||||
pointArray.Add(await MoveApproachAndCollectAsync(
|
||||
pt.X, pt.Y, cancellationToken).ConfigureAwait(false));
|
||||
}
|
||||
|
||||
return pointArray;
|
||||
}
|
||||
|
||||
/// <summary>
|
||||
/// 逼近对齐
|
||||
/// </summary>
|
||||
private async Task<bool> ApproachAtPointAsync(CancellationToken cancellationToken)
|
||||
{
|
||||
Rectangle1 roiRect = _roiRectProvider?.Invoke();
|
||||
var request = new ApproachAlignmentRequest(
|
||||
axes: new[]
|
||||
{
|
||||
new ApproachAlignmentAxis("X2轴", _moduleItem.AlignTolerance),
|
||||
new ApproachAlignmentAxis("Y1轴", _moduleItem.AlignTolerance)
|
||||
},
|
||||
camera: CameraType.TopPositionCamera)
|
||||
{
|
||||
MaxIterations = 3,
|
||||
RecognitionTimeoutMilliseconds = 5000,
|
||||
RecognitionParameters = new CenterRecognitionParameters()
|
||||
{
|
||||
Type = CenterRecognitionType.EdgeCircle,
|
||||
rectangle = roiRect
|
||||
}
|
||||
};
|
||||
|
||||
var result = await _approachAlignmentService.ApproachAlignmentAsync(request, cancellationToken).ConfigureAwait(false);
|
||||
return result.Succeeded;
|
||||
}
|
||||
|
||||
|
||||
private void ReportProgress(string message, int current, int total)
|
||||
{
|
||||
ProgressChanged?.Invoke(this, new CalibrationProgressEventArgs
|
||||
{
|
||||
Message = message,
|
||||
Current = current,
|
||||
Total = total
|
||||
});
|
||||
}
|
||||
#endregion
|
||||
}
|
||||
}
|
||||
Reference in New Issue
Block a user