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添加 MX-PD-盘古 项目文件

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将 MX-PD-盘古 - new 目录下的所有文件添加到主仓库
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Shi.Ji
2026-05-18 11:43:09 +08:00
parent 03632a379d
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MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/DeviceIoPoints1.csv Normal file
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# Device IO <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>,,,,,,,,,,
"# <20><>˳<EFBFBD><CBB3><EFBFBD><EFBFBD>Id Module Name Type Card StationNo LineNo Enabled DefaultValue IsInverse Description",,,,,,,,,,
# Module: ҵ<><D2B5>ģ<EFBFBD><C4A3><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD> SubstrateLoad/ChipLoad/SubstrateOut/ChipUnload<61><64>,,,,,,,,,,
# Type: Input/Output (Ҳ֧<D2B2><D6A7> IN/OUT/DI/DO),,,,,,,,,,
# Card: Td/Acs,,,,,,,,,,
# StationNo: ̨<><CCA8>վ<EFBFBD><D5BE>,,,,,,,,,,
# LineNo: ʵ<>ʽ<EFBFBD><CABD><EFBFBD><EFBFBD>߱<EFBFBD>/<2F><><EFBFBD><EFBFBD><EFBFBD>ܱ<EFBFBD>ʶ,,,,,,,,,,
# Enabled: 1/0 <20><> true/false,,,,,,,,,,
# DefaultValue: <20><> IO δ<><CEB4><EFBFBD>û<EFBFBD><C3BB>޷<EFBFBD><DEB7><EFBFBD>ȡʱʹ<CAB1>õ<EFBFBD>Ĭ<EFBFBD><C4AC>״̬<D7B4><CCAC>1/0 <20><> true/false,,,,,,,,,,
Id,Module,Name,Type,Card,StationNo,LineNo,Enabled,DefaultValue,IsInverse,Description
0,WZ,PG.WZ.StartButton,Input,Td,1,X00100,1,1,0,WZ <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>ť
1,WZ,PG.WZ.StopButton,Input,Td,1,X00101,1,1,0,WZ ֹͣ<CDA3><D6B9>ť
2,WZ,PG.WZ.ResetButton,Input,Td,1,X00102,1,1,0,WZ <20><>λ<EFBFBD><CEBB>ť
3,WZ,PG.WZ.EmergencyStopButton,Input,Td,1,X00103,1,1,0,WZ <20><>ͣ<EFBFBD><CDA3>ť
4,WZ,PG.WZ.BlueButton,Input,Td,1,X00104,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>ť<EFBFBD><C5A5>Ԥ<EFBFBD><D4A4><EFBFBD><EFBFBD>
5,Stage,PG.Stage.ToolSetterSignal,Input,Td,1,X00105,1,1,0,Stage <20>Ե<EFBFBD><D4B5>ź<EFBFBD>
6,Stage,PG.Stage.SubstrateInPlace,Input,Td,1,X00106,1,1,0,Stage <20><><EFBFBD>嵽λ<E5B5BD><CEBB>Ӧ
7,Stage,PG.Stage.LifterCyl1WorkPos,Input,Td,1,X00107,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1<EFBFBD><31><EFBFBD><EFBFBD>
8,Stage,PG.Stage.LifterCyl1HomePos,Input,Td,1,X00108,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1ԭ<31><D4AD>
9,Stage,PG.Stage.LifterCyl2WorkPos,Input,Td,1,X00109,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2<EFBFBD><32><EFBFBD><EFBFBD>
10,Stage,PG.Stage.LifterCyl2HomePos,Input,Td,1,X00110,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2ԭ<32><D4AD>
11,WS,PG.WS.ThetaClampCyl1WorkPos,Input,Td,1,X00111,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>1<EFBFBD><31><EFBFBD><EFBFBD>
12,WS,PG.WS.ThetaClampCyl1HomePos,Input,Td,1,X00112,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>1ԭ<31><D4AD>
13,WS,PG.WS.ThetaClampCyl2WorkPos,Input,Td,1,X00113,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>2<EFBFBD><32><EFBFBD><EFBFBD>
14,WS,PG.WS.ThetaClampCyl2HomePos,Input,Td,1,X00114,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>2ԭ<32><D4AD>
15,WS,PG.WS.ThetaClampCyl3WorkPos,Input,Td,1,X00115,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>3<EFBFBD><33><EFBFBD><EFBFBD>
0,WS,PG.WS.ThetaClampCyl3HomePos,Input,Td,2,X00200,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>3ԭ<33><D4AD>
1,WS,PG.WS.ThetaClampCyl4WorkPos,Input,Td,2,X00201,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>4<EFBFBD><34><EFBFBD><EFBFBD>
2,WS,PG.WS.ThetaClampCyl4HomePos,Input,Td,2,X00202,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>4ԭ<34><D4AD>
3,WS,PG.WS.ThetaTrayPresentSensor1,Input,Td,2,X00203,1,1,0,WS <20><> <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>޸<EFBFBD>Ӧ1
4,WS,PG.WS.ThetaTrayPresentSensor2,Input,Td,2,X00204,1,1,0,WS <20><> <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>޸<EFBFBD>Ӧ2
5,WS,PG.WS.ThetaTrayPresentSensor3,Input,Td,2,X00205,1,1,0,WS <20><> <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>޸<EFBFBD>Ӧ3
6,WS,PG.WS.ThetaTrayPresentSensor4,Input,Td,2,X00206,1,1,0,WS <20><> <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>޸<EFBFBD>Ӧ4
7,WS,PG.WS.BondHead1InPlace,Input,Td,2,X00207,1,1,0,WS <20>̾<EFBFBD>ͷ1<CDB7><31>λ
8,WS,PG.WS.BondHead2InPlace,Input,Td,2,X00208,1,1,0,WS <20>̾<EFBFBD>ͷ2<CDB7><32>λ
9,WS,PG.WS.BondHead3InPlace,Input,Td,2,X00209,1,1,0,WS <20>̾<EFBFBD>ͷ3<CDB7><33>λ
10,WS,PG.WS.BondHead4InPlace,Input,Td,2,X00210,1,1,0,WS <20>̾<EFBFBD>ͷ4<CDB7><34>λ
11,WEU,PG.WEU.Z11MaterialSensor1,Input,Td,2,X00211,1,1,0,WEU Z11 <20><><EFBFBD><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ1
12,WEU,PG.WEU.Z11MaterialSensor2,Input,Td,2,X00212,1,1,0,WEU Z11 <20><><EFBFBD><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ2
13,WEU,PG.WEU.Z12MaterialSensor3,Input,Td,2,X00213,1,1,0,WEU Z12 <20><><EFBFBD><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ3
14,WEU,PG.WEU.Z12MaterialSensor4,Input,Td,2,X00214,1,1,0,WEU Z12 <20><><EFBFBD><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ4
0,CV,PG.CV.UpperInletSensor,Input,Td,3,X00300,1,1,0,CV <20>ϲ<EFBFBD><CFB2><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ
1,CV,PG.CV.UpperInPlaceSensor,Input,Td,3,X00301,1,1,0,CV <20>ϲ㵽λ<E3B5BD><CEBB>Ӧ
2,CV,PG.CV.LowerOutletSensor,Input,Td,3,X00302,1,1,0,CV <20>²<EFBFBD><C2B2><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ
3,CV,PG.CV.LowerInPlaceSensor,Input,Td,3,X00303,1,1,0,CV <20>²㵽λ<E3B5BD><CEBB>Ӧ
4,WZ,PG.WZ.SafetyDoor1Closed,Input,Td,3,X00304,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>1<EFBFBD><31><EFBFBD>ż<EFBFBD><C5BC><EFBFBD>
5,WZ,PG.WZ.SafetyDoor2Closed,Input,Td,3,X00305,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>2<EFBFBD><32><EFBFBD>ż<EFBFBD><C5BC><EFBFBD>
6,WZ,PG.WZ.SafetyDoor3Closed,Input,Td,3,X00306,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>3<EFBFBD><33><EFBFBD>ż<EFBFBD><C5BC><EFBFBD>
7,WZ,PG.WZ.SafetyDoor4Closed,Input,Td,3,X00307,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>4<EFBFBD><34><EFBFBD>ż<EFBFBD><C5BC><EFBFBD>
8,WZ,PG.WZ.SecurityDoorShield,Input,Td,3,X00308,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
10,General,PG.General.PhaseLossSensor,Input,Td,3,X00310,1,1,0,ȱ<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
11,General,PG.General.SafetyCircuitStatus1,Input,Td,3,X00311,1,1,0,<EFBFBD><EFBFBD>ȫ<EFBFBD><EFBFBD>·״̬1
12,General,PG.General.SafetyCircuitStatus2,Input,Td,3,X00312,1,1,0,<EFBFBD><EFBFBD>ȫ<EFBFBD><EFBFBD>·״̬2
13,CV,PG.CV.IonWindRodAlarmDetection,Input,Td,3,X00313,1,1,0,CV <20><><EFBFBD>ӷ<EFBFBD><D3B7><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
14,EFEM,PG.EFEM.IonWindRodAlarmDetection1,Input,Td,3,X00314,1,1,0,EFEM<EFBFBD><EFBFBD><EFBFBD>ӷ<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
15,EFEM,PG.EFEM.IonWindRodAlarmDetection2,Input,Td,3,X00315,1,1,0,EFEM<EFBFBD><EFBFBD><EFBFBD>ӷ<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2
0,AxisZ,PG.AxisZ.Z1GuideRailBrake,Output,Td,4,Y00100,1,1,0,Z1<EFBFBD>ᵼ<EFBFBD>챧բ
1,AxisZ,PG.AxisZ.Z3CameraAirCooling,Output,Td,4,Y00101,1,1,0,Z3<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
2,AxisZ,PG.AxisZ.Z5CameraAirCooling,Output,Td,4,Y00102,1,1,0,Z5<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
3,AxisZ,PG.AxisZ.Z10CameraAirCooling,Output,Td,4,Y00103,1,1,0,Z10<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
4,AxisZ,PG.AxisZ.Z2BondHeadAirCooling,Output,Td,4,Y00104,1,1,0,Z2<EFBFBD>̾<EFBFBD>ͷ<EFBFBD><EFBFBD><EFBFBD><EFBFBD>
5,CV,PG.CV.IonBarAct,Output,Td,4,Y00105,1,1,0,CV <20><><EFBFBD>ӷ<EFBFBD><D3B7><EFBFBD>
6,WEU,PG.WEU.IonBarAct1,Output,Td,4,Y00106,1,1,0,WEU<EFBFBD><EFBFBD><EFBFBD>ӷ<EFBFBD><EFBFBD><EFBFBD>1
7,WEU,PG.WEU.IonBarAct2,Output,Td,4,Y00107,1,1,0,WEU<EFBFBD><EFBFBD><EFBFBD>ӷ<EFBFBD><EFBFBD><EFBFBD>2
8,WS,PG.WS.ThetaClampCylAct,Output,Td,4,Y00108,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD>׶<EFBFBD><D7B6><EFBFBD>
9,WS,PG.WS.ThetaBrakePressCylAct,Output,Td,4,Y00109,1,1,0,WS <20><>ɲ<EFBFBD><C9B2>ѹ<EFBFBD><D1B9><EFBFBD><EFBFBD><EFBFBD>׶<EFBFBD><D7B6><EFBFBD>
10,Stage,PG.Stage.LifterCyl1Act,Output,Td,4,Y00110,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1<EFBFBD><31><EFBFBD><EFBFBD>
11,Stage,PG.Stage.LifterCyl2Act,Output,Td,4,Y00111,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2<EFBFBD><32><EFBFBD><EFBFBD>
0,WZ,PG.WZ.StartButtonLight,Output,Td,5,Y00200,1,1,0,WZ <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>ť<EFBFBD><C5A5>
1,WZ,PG.WZ.StopButtonLight,Output,Td,5,Y00201,1,1,0,WZ ֹͣ<CDA3><D6B9>ť<EFBFBD><C5A5>
2,WZ,PG.WZ.ResetButtonLight,Output,Td,5,Y00202,1,1,0,WZ <20><>λ<EFBFBD><CEBB>ť<EFBFBD><C5A5>
3,WZ,PG.WZ.BlueButtonLight,Output,Td,5,Y00203,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>ť<EFBFBD><C5A5>
4,WZ,PG.WZ.WorkLight1,Output,Td,5,Y00204,1,1,0,WZ <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
6,EFEM,PG.EFEM.WorkLight1,Output,Td,5,Y00206,1,1,0,EFEM <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
8,WZ,PG.WZ.StackLightRed,Output,Td,5,Y00208,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>-<2D><>
9,WZ,PG.WZ.StackLightYellow,Output,Td,5,Y00209,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>-<2D><>
10,WZ,PG.WZ.StackLightGreen,Output,Td,5,Y00210,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>-<2D><>
11,WZ,PG.WZ.StackLightBlue,Output,Td,5,Y00211,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>-<2D><>
12,WZ,PG.WZ.BuzzerAct,Output,Td,5,Y00212,1,1,0,WZ <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
0,Stage,PG.Stage.BreakingTheVacuum1,Output,Td,6,Y00300,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
1,Stage,PG.Stage.BreakingTheVacuum2,Output,Td,6,Y00301,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2
2,Stage,PG.Stage.BreakingTheVacuum3,Output,Td,6,Y00302,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>3
3,Stage,PG.Stage.BreakingTheVacuum4,Output,Td,6,Y00303,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>4
4,WEU,PG.WEU.TrayBreakVacuum1,Output,Td,6,Y00304,1,1,0,WEU <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
5,WEU,PG.WEU.TrayBreakVacuum2,Output,Td,6,Y00305,1,1,0,WEU <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2
6,AxisZ,PG.AxisZ.Z2BondHeadBreakVacuum,Output,Td,6,Y00306,1,1,0,PHS Z2 <20>̾<EFBFBD>ͷ<EFBFBD><CDB7><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
7,Stage,PG.Stage.Vacuum1,Output,Td,6,Y00307,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
8,Stage,PG.Stage.Vacuum2,Output,Td,6,Y00308,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2
9,Stage,PG.Stage.Vacuum3,Output,Td,6,Y00309,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>3
10,Stage,PG.Stage.Vacuum4,Output,Td,6,Y00310,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>4
11,WEU,PG.WEU.TrayVacuum1,Output,Td,6,Y00311,1,1,0,WEU <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
12,WEU,PG.WEU.TrayVacuum2,Output,Td,6,Y00312,1,1,0,WEU <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2
13,AxisZ,PG.AxisZ.Z2BondHeadVacuum,Output,Td,6,Y00313,1,1,0,PHS Z2 <20>̾<EFBFBD>ͷ<EFBFBD><CDB7><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
1,WZ,PG.WZ.SafetyDoor1Open,Output,Td,7,Y00400,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>1<EFBFBD><31><EFBFBD><EFBFBD>
2,WZ,PG.WZ.SafetyDoor2Open,Output,Td,7,Y00401,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>2<EFBFBD><32><EFBFBD><EFBFBD>
3,WZ,PG.WZ.SafetyDoor3Open,Output,Td,7,Y00402,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>3<EFBFBD><33><EFBFBD><EFBFBD>
4,WZ,PG.WZ.SafetyDoor4Open,Output,Td,7,Y00403,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>4<EFBFBD><34><EFBFBD><EFBFBD>
1 # Device IO 定义表
2 # 列顺序：Id Module Name Type Card StationNo LineNo Enabled DefaultValue IsInverse Description
3 # Module: 业务模块名（如 SubstrateLoad/ChipLoad/SubstrateOut/ChipUnload）
4 # Type: Input/Output (也支持 IN/OUT/DI/DO)
5 # Card: Td/Acs
6 # StationNo: 台达站号
7 # LineNo: 实际接线线标/号码管标识
8 # Enabled: 1/0 或 true/false
9 # DefaultValue: 当 IO 未启用或无法读取时使用的默认状态，1/0 或 true/false
10 Id Module Name Type Card StationNo LineNo Enabled DefaultValue IsInverse Description
11 0 WZ PG.WZ.StartButton Input Td 1 X00100 1 1 0 WZ 启动按钮
12 1 WZ PG.WZ.StopButton Input Td 1 X00101 1 1 0 WZ 停止按钮
13 2 WZ PG.WZ.ResetButton Input Td 1 X00102 1 1 0 WZ 复位按钮
14 3 WZ PG.WZ.EmergencyStopButton Input Td 1 X00103 1 1 0 WZ 急停按钮
15 4 WZ PG.WZ.BlueButton Input Td 1 X00104 1 1 0 WZ 蓝色按钮（预留）
16 5 Stage PG.Stage.ToolSetterSignal Input Td 1 X00105 1 1 0 Stage 对刀信号
17 6 Stage PG.Stage.SubstrateInPlace Input Td 1 X00106 1 1 0 Stage 基板到位感应
18 7 Stage PG.Stage.LifterCyl1WorkPos Input Td 1 X00107 1 1 0 Stage 顶升气缸1动点
19 8 Stage PG.Stage.LifterCyl1HomePos Input Td 1 X00108 1 1 0 Stage 顶升气缸1原点
20 9 Stage PG.Stage.LifterCyl2WorkPos Input Td 1 X00109 1 1 0 Stage 顶升气缸2动点
21 10 Stage PG.Stage.LifterCyl2HomePos Input Td 1 X00110 1 1 0 Stage 顶升气缸2原点
22 11 WS PG.WS.ThetaClampCyl1WorkPos Input Td 1 X00111 1 1 0 WS θ 夹紧气缸1动点
23 12 WS PG.WS.ThetaClampCyl1HomePos Input Td 1 X00112 1 1 0 WS θ 夹紧气缸1原点
24 13 WS PG.WS.ThetaClampCyl2WorkPos Input Td 1 X00113 1 1 0 WS θ 夹紧气缸2动点
25 14 WS PG.WS.ThetaClampCyl2HomePos Input Td 1 X00114 1 1 0 WS θ 夹紧气缸2原点
26 15 WS PG.WS.ThetaClampCyl3WorkPos Input Td 1 X00115 1 1 0 WS θ 夹紧气缸3动点
27 0 WS PG.WS.ThetaClampCyl3HomePos Input Td 2 X00200 1 1 0 WS θ 夹紧气缸3原点
28 1 WS PG.WS.ThetaClampCyl4WorkPos Input Td 2 X00201 1 1 0 WS θ 夹紧气缸4动点
29 2 WS PG.WS.ThetaClampCyl4HomePos Input Td 2 X00202 1 1 0 WS θ 夹紧气缸4原点
30 3 WS PG.WS.ThetaTrayPresentSensor1 Input Td 2 X00203 1 1 0 WS θ 料盘有无感应1
31 4 WS PG.WS.ThetaTrayPresentSensor2 Input Td 2 X00204 1 1 0 WS θ 料盘有无感应2
32 5 WS PG.WS.ThetaTrayPresentSensor3 Input Td 2 X00205 1 1 0 WS θ 料盘有无感应3
33 6 WS PG.WS.ThetaTrayPresentSensor4 Input Td 2 X00206 1 1 0 WS θ 料盘有无感应4
34 7 WS PG.WS.BondHead1InPlace Input Td 2 X00207 1 1 0 WS 刺晶头1在位
35 8 WS PG.WS.BondHead2InPlace Input Td 2 X00208 1 1 0 WS 刺晶头2在位
36 9 WS PG.WS.BondHead3InPlace Input Td 2 X00209 1 1 0 WS 刺晶头3在位
37 10 WS PG.WS.BondHead4InPlace Input Td 2 X00210 1 1 0 WS 刺晶头4在位
38 11 WEU PG.WEU.Z11MaterialSensor1 Input Td 2 X00211 1 1 0 WEU Z11 有无料感应1
39 12 WEU PG.WEU.Z11MaterialSensor2 Input Td 2 X00212 1 1 0 WEU Z11 有无料感应2
40 13 WEU PG.WEU.Z12MaterialSensor3 Input Td 2 X00213 1 1 0 WEU Z12 有无料感应3
41 14 WEU PG.WEU.Z12MaterialSensor4 Input Td 2 X00214 1 1 0 WEU Z12 有无料感应4
42 0 CV PG.CV.UpperInletSensor Input Td 3 X00300 1 1 0 CV 上层进料感应
43 1 CV PG.CV.UpperInPlaceSensor Input Td 3 X00301 1 1 0 CV 上层到位感应
44 2 CV PG.CV.LowerOutletSensor Input Td 3 X00302 1 1 0 CV 下层出料感应
45 3 CV PG.CV.LowerInPlaceSensor Input Td 3 X00303 1 1 0 CV 下层到位感应
46 4 WZ PG.WZ.SafetyDoor1Closed Input Td 3 X00304 1 1 0 WZ 安全门1关门检测
47 5 WZ PG.WZ.SafetyDoor2Closed Input Td 3 X00305 1 1 0 WZ 安全门2关门检测
48 6 WZ PG.WZ.SafetyDoor3Closed Input Td 3 X00306 1 1 0 WZ 安全门3关门检测
49 7 WZ PG.WZ.SafetyDoor4Closed Input Td 3 X00307 1 1 0 WZ 安全门4关门检测
50 8 WZ PG.WZ.SecurityDoorShield Input Td 3 X00308 1 1 0 WZ 安全门屏蔽
51 10 General PG.General.PhaseLossSensor Input Td 3 X00310 1 1 0 缺相检测
52 11 General PG.General.SafetyCircuitStatus1 Input Td 3 X00311 1 1 0 安全回路状态1
53 12 General PG.General.SafetyCircuitStatus2 Input Td 3 X00312 1 1 0 安全回路状态2
54 13 CV PG.CV.IonWindRodAlarmDetection Input Td 3 X00313 1 1 0 CV 离子风棒报警检测
55 14 EFEM PG.EFEM.IonWindRodAlarmDetection1 Input Td 3 X00314 1 1 0 EFEM离子风棒报警检测1
56 15 EFEM PG.EFEM.IonWindRodAlarmDetection2 Input Td 3 X00315 1 1 0 EFEM离子风棒报警检测2
57 0 AxisZ PG.AxisZ.Z1GuideRailBrake Output Td 4 Y00100 1 1 0 Z1轴导轨抱闸
58 1 AxisZ PG.AxisZ.Z3CameraAirCooling Output Td 4 Y00101 1 1 0 Z3相机气冷
59 2 AxisZ PG.AxisZ.Z5CameraAirCooling Output Td 4 Y00102 1 1 0 Z5相机气冷
60 3 AxisZ PG.AxisZ.Z10CameraAirCooling Output Td 4 Y00103 1 1 0 Z10相机气冷
61 4 AxisZ PG.AxisZ.Z2BondHeadAirCooling Output Td 4 Y00104 1 1 0 Z2刺晶头气冷
62 5 CV PG.CV.IonBarAct Output Td 4 Y00105 1 1 0 CV 离子风棒
63 6 WEU PG.WEU.IonBarAct1 Output Td 4 Y00106 1 1 0 WEU离子风棒1
64 7 WEU PG.WEU.IonBarAct2 Output Td 4 Y00107 1 1 0 WEU离子风棒2
65 8 WS PG.WS.ThetaClampCylAct Output Td 4 Y00108 1 1 0 WS θ 夹紧气缸动作
66 9 WS PG.WS.ThetaBrakePressCylAct Output Td 4 Y00109 1 1 0 WS θ刹车压紧气缸动作
67 10 Stage PG.Stage.LifterCyl1Act Output Td 4 Y00110 1 1 0 Stage 顶升气缸1动作
68 11 Stage PG.Stage.LifterCyl2Act Output Td 4 Y00111 1 1 0 Stage 顶升气缸2动作
69 0 WZ PG.WZ.StartButtonLight Output Td 5 Y00200 1 1 0 WZ 启动按钮灯
70 1 WZ PG.WZ.StopButtonLight Output Td 5 Y00201 1 1 0 WZ 停止按钮灯
71 2 WZ PG.WZ.ResetButtonLight Output Td 5 Y00202 1 1 0 WZ 复位按钮灯
72 3 WZ PG.WZ.BlueButtonLight Output Td 5 Y00203 1 1 0 WZ 蓝色按钮灯
73 4 WZ PG.WZ.WorkLight1 Output Td 5 Y00204 1 1 0 WZ 照明灯1
74 6 EFEM PG.EFEM.WorkLight1 Output Td 5 Y00206 1 1 0 EFEM 照明灯1
75 8 WZ PG.WZ.StackLightRed Output Td 5 Y00208 1 1 0 WZ 四色灯-红
76 9 WZ PG.WZ.StackLightYellow Output Td 5 Y00209 1 1 0 WZ 四色灯-黄
77 10 WZ PG.WZ.StackLightGreen Output Td 5 Y00210 1 1 0 WZ 四色灯-绿
78 11 WZ PG.WZ.StackLightBlue Output Td 5 Y00211 1 1 0 WZ 四色灯-蓝
79 12 WZ PG.WZ.BuzzerAct Output Td 5 Y00212 1 1 0 WZ 蜂鸣器
80 0 Stage PG.Stage.BreakingTheVacuum1 Output Td 6 Y00300 1 1 0 STAGE 破真空1
81 1 Stage PG.Stage.BreakingTheVacuum2 Output Td 6 Y00301 1 1 0 STAGE 破真空2
82 2 Stage PG.Stage.BreakingTheVacuum3 Output Td 6 Y00302 1 1 0 STAGE 破真空3
83 3 Stage PG.Stage.BreakingTheVacuum4 Output Td 6 Y00303 1 1 0 STAGE 破真空4
84 4 WEU PG.WEU.TrayBreakVacuum1 Output Td 6 Y00304 1 1 0 WEU 料盘破真空1
85 5 WEU PG.WEU.TrayBreakVacuum2 Output Td 6 Y00305 1 1 0 WEU 料盘破真空2
86 6 AxisZ PG.AxisZ.Z2BondHeadBreakVacuum Output Td 6 Y00306 1 1 0 PHS Z2 刺晶头破真空
87 7 Stage PG.Stage.Vacuum1 Output Td 6 Y00307 1 1 0 STAGE 吸真空1
88 8 Stage PG.Stage.Vacuum2 Output Td 6 Y00308 1 1 0 STAGE 吸真空2
89 9 Stage PG.Stage.Vacuum3 Output Td 6 Y00309 1 1 0 STAGE 吸真空3
90 10 Stage PG.Stage.Vacuum4 Output Td 6 Y00310 1 1 0 STAGE 吸真空4
91 11 WEU PG.WEU.TrayVacuum1 Output Td 6 Y00311 1 1 0 WEU 料盘吸真空1
92 12 WEU PG.WEU.TrayVacuum2 Output Td 6 Y00312 1 1 0 WEU 料盘吸真空2
93 13 AxisZ PG.AxisZ.Z2BondHeadVacuum Output Td 6 Y00313 1 1 0 PHS Z2 刺晶头吸真空
94 1 WZ PG.WZ.SafetyDoor1Open Output Td 7 Y00400 1 1 0 WZ 安全门1打开
95 2 WZ PG.WZ.SafetyDoor2Open Output Td 7 Y00401 1 1 0 WZ 安全门2打开
96 3 WZ PG.WZ.SafetyDoor3Open Output Td 7 Y00402 1 1 0 WZ 安全门3打开
97 4 WZ PG.WZ.SafetyDoor4Open Output Td 7 Y00403 1 1 0 WZ 安全门4打开