shiji/test_demo
1
0
Fork 0
Code Issues Pull Requests Actions Packages Projects Releases Wiki Activity

添加 MX-PD-盘古 项目文件

Browse Source 
将 MX-PD-盘古 - new 目录下的所有文件添加到主仓库
This commit is contained in:
Shi.Ji
2026-05-18 11:43:09 +08:00
parent 03632a379d
commit e31d3560bb
739 changed files with 99783 additions and 0 deletions
Download Patch File Download Diff File Expand all files Collapse all files

581
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/AxisCardPO.xml Normal file
View File

@@ -0,0 +1,581 @@
<?xml version="1.0"?>
<ArrayOfPersistenceObject xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<PersistenceObject xsi:type="AxisCardPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>AcsCard</CategoryName>
<ID>2d23c400-ccf2-469a-add5-ae92a98a85e6</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardPO.xml</ConfigPath>
<AxisCardType>DEMO</AxisCardType>
<AxisCardNum>0</AxisCardNum>
<PortNo>0</PortNo>
<ListAxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-X1</CategoryName>
<ID>3a9c772b-4a9c-4077-abbc-80fc038b81ee</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>0</AxisNum>
<AxisName>PHS-X1</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-X2</CategoryName>
<ID>c83e5f81-ef2c-413c-ace9-24bc97c30b32</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>1</AxisNum>
<AxisName>PHS-X2</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>WS-X3</CategoryName>
<ID>e0a2d6ed-2972-4595-a8dc-53a504187a9f</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>4</AxisNum>
<AxisName>WS-X3</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Y1</CategoryName>
<ID>4e145d2a-f7f7-4ce2-a5b0-919375a03d87</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>2</AxisNum>
<AxisName>PHS-Y1</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>WS-R</CategoryName>
<ID>cebe7f5c-8cdd-47e8-906a-6083047a078d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>6</AxisNum>
<AxisName>WS-R</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>SZ</CategoryName>
<ID>ce1f8f65-3409-4124-9c9a-ba750c848e36</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>8</AxisNum>
<AxisName>SZ</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Y3</CategoryName>
<ID>05dfa6d1-401b-4a55-808b-5af2efeb358c</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>7</AxisNum>
<AxisName>Stage-Y3</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
</ListAxisCardParaPO>
<Version>1</Version>
<Core>0</Core>
<CrossCompensate>0</CrossCompensate>
<IsServoSeparate>false</IsServoSeparate>
</PersistenceObject>
<PersistenceObject xsi:type="AxisCardPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>Plc</CategoryName>
<ID>80a2e320-d4da-46a6-9f35-0a6d0996ea22</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardPO.xml</ConfigPath>
<AxisCardType>DEMO</AxisCardType>
<AxisCardNum>0</AxisCardNum>
<PortNo>0</PortNo>
<ListAxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z1</CategoryName>
<ID>471e0395-0918-4e0b-b9cb-d0727281ef6c</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>0</AxisNum>
<AxisName>PHS-Z1</AxisName>
<Direction>Z</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z3</CategoryName>
<ID>5dd115ab-09a4-4bbb-9fdf-e9b76cc5e88e</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>1</AxisNum>
<AxisName>PHS-Z3</AxisName>
<Direction>Z</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z4</CategoryName>
<ID>e359bc21-c1e8-4e06-acdb-1df94ee7931b</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>10</AxisNum>
<AxisName>PHS-Z4</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z5</CategoryName>
<ID>9d948211-59ae-498c-b124-531a69855752</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>2</AxisNum>
<AxisName>PHS-Z5</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z6</CategoryName>
<ID>477c569a-e460-4c45-917f-a0744ebed5ec</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>11</AxisNum>
<AxisName>PHS-Z6</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z7</CategoryName>
<ID>f761791c-8fb4-4a5b-8fef-0380e996e81f</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>7</AxisNum>
<AxisName>Stage-Z7</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z8</CategoryName>
<ID>28a1caa3-01bc-48ed-8551-68829b280a6f</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>8</AxisNum>
<AxisName>Stage-Z8</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z9</CategoryName>
<ID>71c8587a-1e85-4fa4-8809-14f00111a230</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>9</AxisNum>
<AxisName>Stage-Z9</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z10</CategoryName>
<ID>fc66c8d2-c35f-46b5-9c14-f3a017311e86</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>14</AxisNum>
<AxisName>Stage-Z10</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-CV-Y4</CategoryName>
<ID>6ebf862a-c91e-4bb2-a5b7-e67f307333b4</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>15</AxisNum>
<AxisName>Stage-CV-Y4</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-CV-Y5</CategoryName>
<ID>e1cf2e06-fe51-4115-8ad2-2a0b3dc53c00</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>16</AxisNum>
<AxisName>Stage-CV-Y5</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>WEU-Z11</CategoryName>
<ID>a765e366-03a3-451f-ab44-1e6129a6ac61</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>3</AxisNum>
<AxisName>WEU-Z11</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>WEU-Z12</CategoryName>
<ID>a4c43082-6841-45b4-83f2-b89a952a6547</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>4</AxisNum>
<AxisName>WEU-Z12</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>WEU-Y6</CategoryName>
<ID>670409e3-1e19-45c8-94b8-1f3fb1905dc2</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>5</AxisNum>
<AxisName>WEU-Y6</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Z13</CategoryName>
<ID>eb009565-40bf-4923-9b9b-fdf483dc1532</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>6</AxisNum>
<AxisName>CV-Z13</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y7</CategoryName>
<ID>d75ee50a-ba99-4ec1-bb36-6e65cbd84180</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>18</AxisNum>
<AxisName>CV-Y7</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y8</CategoryName>
<ID>8845c4e8-4d09-4f0a-b073-1b29e1ca59e6</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>19</AxisNum>
<AxisName>CV-Y8</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y9</CategoryName>
<ID>4970be79-b46a-4004-84bf-82e922fb5cb8</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>20</AxisNum>
<AxisName>CV-Y9</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y10</CategoryName>
<ID>36583278-40bd-48ad-a749-02b4e58dcbca</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>21</AxisNum>
<AxisName>CV-Y10</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
</ListAxisCardParaPO>
<Version>1</Version>
<Core>0</Core>
<CrossCompensate>0</CrossCompensate>
<IsServoSeparate>false</IsServoSeparate>
</PersistenceObject>
</ArrayOfPersistenceObject>

9
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/CylinderDefinitions.csv Normal file
View File

@@ -0,0 +1,9 @@
# 气缸定义表
# 列顺序：Name,Module,ControlType,ExtendOutputIds,RetractOutputIds,ExtendedFeedbackIds,RetractedFeedbackIds,Description
# ControlType: SingleOutput / DualOutput / MultiOutput
# ExtendOutputIds / RetractOutputIds / ExtendedFeedbackIds / RetractedFeedbackIds 支持填写多个 IO 引用，使用分号分隔
# IO 引用优先使用 Configuration\DeviceIoPoints.csv 中的 Name；若 Id 在全表唯一，也兼容旧 Id 写法
Name,Module,ControlType,ExtendOutputIds,RetractOutputIds,ExtendedFeedbackIds,RetractedFeedbackIds,Description
WS θ夹紧气缸,WS,SingleOutput,PG.WS.ThetaClampCylAct,,PG.WS.ThetaClampCyl1WorkPos;PG.WS.ThetaClampCyl2WorkPos;PG.WS.ThetaClampCyl3WorkPos;PG.WS.ThetaClampCyl4WorkPos,PG.WS.ThetaClampCyl1HomePos;PG.WS.ThetaClampCyl2HomePos;PG.WS.ThetaClampCyl3HomePos;PG.WS.ThetaClampCyl4HomePos,WS θ 夹紧气缸总动作输出，对应 4 组伸出/缩回反馈
WS θ刹车压紧气缸,WS,SingleOutput,PG.WS.ThetaBrakePressCylAct,,,,当前 DeviceIoPoints.csv 未配置到位反馈
Stage 顶升同步气缸,Stage,MultiOutput,PG.Stage.LifterCyl1Act;PG.Stage.LifterCyl2Act,,PG.Stage.LifterCyl1WorkPos;PG.Stage.LifterCyl2WorkPos,PG.Stage.LifterCyl1HomePos;PG.Stage.LifterCyl2HomePos,Stage 顶升气缸1和2同步动作，统一伸出/缩回
1 # 气缸定义表
2 # 列顺序：Name,Module,ControlType,ExtendOutputIds,RetractOutputIds,ExtendedFeedbackIds,RetractedFeedbackIds,Description
3 # ControlType: SingleOutput / DualOutput / MultiOutput
4 # ExtendOutputIds / RetractOutputIds / ExtendedFeedbackIds / RetractedFeedbackIds 支持填写多个 IO 引用，使用分号分隔
5 # IO 引用优先使用 Configuration\DeviceIoPoints.csv 中的 Name；若 Id 在全表唯一，也兼容旧 Id 写法
6 Name,Module,ControlType,ExtendOutputIds,RetractOutputIds,ExtendedFeedbackIds,RetractedFeedbackIds,Description
7 WS θ夹紧气缸,WS,SingleOutput,PG.WS.ThetaClampCylAct,,PG.WS.ThetaClampCyl1WorkPos;PG.WS.ThetaClampCyl2WorkPos;PG.WS.ThetaClampCyl3WorkPos;PG.WS.ThetaClampCyl4WorkPos,PG.WS.ThetaClampCyl1HomePos;PG.WS.ThetaClampCyl2HomePos;PG.WS.ThetaClampCyl3HomePos;PG.WS.ThetaClampCyl4HomePos,WS θ 夹紧气缸总动作输出，对应 4 组伸出/缩回反馈
8 WS θ刹车压紧气缸,WS,SingleOutput,PG.WS.ThetaBrakePressCylAct,,,,当前 DeviceIoPoints.csv 未配置到位反馈
9 Stage 顶升同步气缸,Stage,MultiOutput,PG.Stage.LifterCyl1Act;PG.Stage.LifterCyl2Act,,PG.Stage.LifterCyl1WorkPos;PG.Stage.LifterCyl2WorkPos,PG.Stage.LifterCyl1HomePos;PG.Stage.LifterCyl2HomePos,Stage 顶升气缸1和2同步动作，统一伸出/缩回

97
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/DeviceIoPoints.csv Normal file
View File

@@ -0,0 +1,97 @@
# Device IO 定义表
# 列顺序：Id Module Name Type Card StationNo LineNo Enabled DefaultValue IsInverse Description
# Module: 业务模块名（如 SubstrateLoad/ChipLoad/SubstrateOut/ChipUnload）
# Type: Input/Output (也支持 IN/OUT/DI/DO)
# Card: Td/Acs
# StationNo: 台达站号
# LineNo: 实际接线线标/号码管标识
# Enabled: 1/0 或 true/false
# DefaultValue: 当 IO 未启用或无法读取时使用的默认状态，1/0 或 true/false
Id,Module,Name,Type,Card,StationNo,LineNo,Enabled,DefaultValue,IsInverse,Description
0,WZ,PG.WZ.StartButton,Input,Td,1,X00100,1,1,0,WZ 启动按钮
1,WZ,PG.WZ.StopButton,Input,Td,1,X00101,1,1,0,WZ 停止按钮
2,WZ,PG.WZ.ResetButton,Input,Td,1,X00102,1,1,0,WZ 复位按钮
3,WZ,PG.WZ.EmergencyStopButton,Input,Td,1,X00103,1,1,0,WZ 急停按钮
4,WZ,PG.WZ.BlueButton,Input,Td,1,X00104,1,1,0,WZ 蓝色按钮(预留)
5,Stage,PG.Stage.ToolSetterSignal,Input,Td,1,X00105,1,1,0,Stage 对刀信号
6,Stage,PG.Stage.SubstrateInPlace,Input,Td,1,X00106,1,1,0,Stage 基板到位感应
7,Stage,PG.Stage.LifterCyl1WorkPos,Input,Td,1,X00107,1,1,0,Stage 顶升气缸1动点
8,Stage,PG.Stage.LifterCyl1HomePos,Input,Td,1,X00108,1,1,0,Stage 顶升气缸1原点
9,Stage,PG.Stage.LifterCyl2WorkPos,Input,Td,1,X00109,1,1,0,Stage 顶升气缸2动点
10,Stage,PG.Stage.LifterCyl2HomePos,Input,Td,1,X00110,1,1,0,Stage 顶升气缸2原点
11,WS,PG.WS.ThetaClampCyl1WorkPos,Input,Td,1,X00111,1,1,0,WS θ夹紧气缸1动点
12,WS,PG.WS.ThetaClampCyl1HomePos,Input,Td,1,X00112,1,1,0,WS θ夹紧气缸1原点
13,WS,PG.WS.ThetaClampCyl2WorkPos,Input,Td,1,X00113,1,1,0,WS θ夹紧气缸2动点
14,WS,PG.WS.ThetaClampCyl2HomePos,Input,Td,1,X00114,1,1,0,WS θ夹紧气缸2原点
15,WS,PG.WS.ThetaClampCyl3WorkPos,Input,Td,1,X00115,1,1,0,WS θ夹紧气缸3动点
0,WS,PG.WS.ThetaClampCyl3HomePos,Input,Td,2,X00200,1,1,0,WS θ夹紧气缸3原点
1,WS,PG.WS.ThetaClampCyl4WorkPos,Input,Td,2,X00201,1,1,0,WS θ夹紧气缸4动点
2,WS,PG.WS.ThetaClampCyl4HomePos,Input,Td,2,X00202,1,1,0,WS θ夹紧气缸4原点
3,WS,PG.WS.ThetaTrayPresentSensor1,Input,Td,2,X00203,1,1,0,WS θ料盘有无感应1
4,WS,PG.WS.ThetaTrayPresentSensor2,Input,Td,2,X00204,1,1,0,WS θ料盘有无感应2
5,WS,PG.WS.ThetaTrayPresentSensor3,Input,Td,2,X00205,1,1,0,WS θ料盘有无感应3
6,WS,PG.WS.ThetaTrayPresentSensor4,Input,Td,2,X00206,1,1,0,WS θ料盘有无感应4
7,WS,PG.WS.BondHead1InPlace,Input,Td,2,X00207,1,1,0,WS 刺晶头1在位
8,WS,PG.WS.BondHead2InPlace,Input,Td,2,X00208,1,1,0,WS 刺晶头2在位
9,WS,PG.WS.BondHead3InPlace,Input,Td,2,X00209,1,1,0,WS 刺晶头3在位
10,WS,PG.WS.BondHead4InPlace,Input,Td,2,X00210,1,1,0,WS 刺晶头4在位
11,WEU,PG.WEU.Z11MaterialSensor1,Input,Td,2,X00211,1,1,0,WEU Z11 有无料感应1
12,WEU,PG.WEU.Z11MaterialSensor2,Input,Td,2,X00212,1,1,0,WEU Z11 有无料感应2
13,WEU,PG.WEU.Z12MaterialSensor3,Input,Td,2,X00213,1,1,0,WEU Z12 有无料感应3
14,WEU,PG.WEU.Z12MaterialSensor4,Input,Td,2,X00214,1,1,0,WEU Z12 有无料感应4
0,CV,PG.CV.UpperInletSensor,Input,Td,3,X00300,1,1,0,CV 上层进料感应
1,CV,PG.CV.UpperInPlaceSensor,Input,Td,3,X00301,1,1,0,CV 上层到位感应
2,CV,PG.CV.LowerOutletSensor,Input,Td,3,X00302,1,1,0,CV 下层出料感应
3,CV,PG.CV.LowerInPlaceSensor,Input,Td,3,X00303,1,1,0,CV 下层到位感应
4,WZ,PG.WZ.SafetyDoor1Closed,Input,Td,3,X00304,1,1,0,WZ 安全门1关门检测
5,WZ,PG.WZ.SafetyDoor2Closed,Input,Td,3,X00305,1,1,0,WZ 安全门2关门检测
6,WZ,PG.WZ.SafetyDoor3Closed,Input,Td,3,X00306,1,1,0,WZ 安全门3关门检测
7,WZ,PG.WZ.SafetyDoor4Closed,Input,Td,3,X00307,1,1,0,WZ 安全门4关门检测
8,WZ,PG.WZ.SecurityDoorShield,Input,Td,3,X00308,1,1,0,WZ 安全门屏蔽
10,General,PG.General.PhaseLossSensor,Input,Td,3,X00310,1,1,0,缺相检测
11,General,PG.General.SafetyCircuitStatus1,Input,Td,3,X00311,1,1,0,安全回路状态1
12,General,PG.General.SafetyCircuitStatus2,Input,Td,3,X00312,1,1,0,安全回路状态2
13,CV,PG.CV.IonWindRodAlarmDetection,Input,Td,3,X00313,1,1,0,CV 离子风棒报警检测
14,EFEM,PG.EFEM.IonWindRodAlarmDetection1,Input,Td,3,X00314,1,1,0,EFEM离子风棒报警检测1
15,EFEM,PG.EFEM.IonWindRodAlarmDetection2,Input,Td,3,X00315,1,1,0,EFEM离子风棒报警检测2
0,AxisZ,PG.AxisZ.Z1GuideRailBrake,Output,Td,4,Y00100,1,1,0,Z1轴导轨抱闸
1,AxisZ,PG.AxisZ.Z3CameraAirCooling,Output,Td,4,Y00101,1,1,0,Z3相机气冷
2,AxisZ,PG.AxisZ.Z5CameraAirCooling,Output,Td,4,Y00102,1,1,0,Z5相机气冷
3,AxisZ,PG.AxisZ.Z10CameraAirCooling,Output,Td,4,Y00103,1,1,0,Z10相机气冷
4,AxisZ,PG.AxisZ.Z2BondHeadAirCooling,Output,Td,4,Y00104,1,1,0,Z2刺晶头气冷
5,CV,PG.CV.IonBarAct,Output,Td,4,Y00105,1,1,0,CV 离子风棒
6,WEU,PG.WEU.IonBarAct1,Output,Td,4,Y00106,1,1,0,WEU离子风棒1
7,WEU,PG.WEU.IonBarAct2,Output,Td,4,Y00107,1,1,0,WEU离子风棒2
8,WS,PG.WS.ThetaClampCylAct,Output,Td,4,Y00108,1,1,0,WS θ 夹紧气缸动作
9,WS,PG.WS.ThetaBrakePressCylAct,Output,Td,4,Y00109,1,1,0,WS θ 刹车压紧气缸动作
10,Stage,PG.Stage.LifterCyl1Act,Output,Td,4,Y00110,1,1,0,Stage 顶升气缸1动作
11,Stage,PG.Stage.LifterCyl2Act,Output,Td,4,Y00111,1,1,0,Stage 顶升气缸2动作
0,WZ,PG.WZ.StartButtonLight,Output,Td,5,Y00200,1,1,0,WZ 启动按钮灯
1,WZ,PG.WZ.StopButtonLight,Output,Td,5,Y00201,1,1,0,WZ 停止按钮灯
2,WZ,PG.WZ.ResetButtonLight,Output,Td,5,Y00202,1,1,0,WZ 复位按钮灯
3,WZ,PG.WZ.BlueButtonLight,Output,Td,5,Y00203,1,1,0,WZ 蓝色按钮灯
4,WZ,PG.WZ.WorkLight1,Output,Td,5,Y00204,1,1,0,WZ 照明灯1
6,EFEM,PG.EFEM.WorkLight1,Output,Td,5,Y00206,1,1,0,EFEM 照明灯1
8,WZ,PG.WZ.StackLightRed,Output,Td,5,Y00208,1,1,0,WZ 四色灯-红
9,WZ,PG.WZ.StackLightYellow,Output,Td,5,Y00209,1,1,0,WZ 四色灯-黄
10,WZ,PG.WZ.StackLightGreen,Output,Td,5,Y00210,1,1,0,WZ 四色灯-绿
11,WZ,PG.WZ.StackLightBlue,Output,Td,5,Y00211,1,1,0,WZ 四色灯-蓝
12,WZ,PG.WZ.BuzzerAct,Output,Td,5,Y00212,1,1,0,WZ 蜂鸣器
0,Stage,PG.Stage.BreakingTheVacuum1,Output,Td,6,Y00300,1,1,0,Stage 破真空1
1,Stage,PG.Stage.BreakingTheVacuum2,Output,Td,6,Y00301,1,1,0,STAGE 破真空2
2,Stage,PG.Stage.BreakingTheVacuum3,Output,Td,6,Y00302,1,1,0,STAGE 破真空3
3,Stage,PG.Stage.BreakingTheVacuum4,Output,Td,6,Y00303,1,1,0,STAGE 破真空4
4,WEU,PG.WEU.TrayBreakVacuum1,Output,Td,6,Y00304,1,1,0,WEU 料盘破真空1
5,WEU,PG.WEU.TrayBreakVacuum2,Output,Td,6,Y00305,1,1,0,WEU 料盘破真空2
6,AxisZ,PG.AxisZ.Z2BondHeadBreakVacuum,Output,Td,6,Y00306,1,1,0,PHS Z2 刺晶头破真空
7,Stage,PG.Stage.Vacuum1,Output,Td,6,Y00307,1,1,0,STAGE 吸真空1
8,Stage,PG.Stage.Vacuum2,Output,Td,6,Y00308,1,1,0,STAGE 吸真空2
9,Stage,PG.Stage.Vacuum3,Output,Td,6,Y00309,1,1,0,STAGE 吸真空3
10,Stage,PG.Stage.Vacuum4,Output,Td,6,Y00310,1,1,0,STAGE 吸真空4
11,WEU,PG.WEU.TrayVacuum1,Output,Td,6,Y00311,1,1,0,WEU 料盘吸真空1
12,WEU,PG.WEU.TrayVacuum2,Output,Td,6,Y00312,1,1,0,WEU 料盘吸真空2
13,AxisZ,PG.AxisZ.Z2BondHeadVacuum,Output,Td,6,Y00313,1,1,0,PHS Z2 刺晶头吸真空
1,WZ,PG.WZ.SafetyDoor1Open,Output,Td,7,Y00401,1,1,0,WZ 安全门1打开
2,WZ,PG.WZ.SafetyDoor2Open,Output,Td,7,Y00402,1,1,0,WZ 安全门2打开
3,WZ,PG.WZ.SafetyDoor3Open,Output,Td,7,Y00402,1,1,0,WZ 安全门3打开
4,WZ,PG.WZ.SafetyDoor4Open,Output,Td,7,Y00403,1,1,0,WZ 安全门4打开
1 # Device IO 定义表
2 # 列顺序：Id Module Name Type Card StationNo LineNo Enabled DefaultValue IsInverse Description
3 # Module: 业务模块名（如 SubstrateLoad/ChipLoad/SubstrateOut/ChipUnload）
4 # Type: Input/Output (也支持 IN/OUT/DI/DO)
5 # Card: Td/Acs
6 # StationNo: 台达站号
7 # LineNo: 实际接线线标/号码管标识
8 # Enabled: 1/0 或 true/false
9 # DefaultValue: 当 IO 未启用或无法读取时使用的默认状态，1/0 或 true/false
10 Id,Module,Name,Type,Card,StationNo,LineNo,Enabled,DefaultValue,IsInverse,Description
11 0,WZ,PG.WZ.StartButton,Input,Td,1,X00100,1,1,0,WZ 启动按钮
12 1,WZ,PG.WZ.StopButton,Input,Td,1,X00101,1,1,0,WZ 停止按钮
13 2,WZ,PG.WZ.ResetButton,Input,Td,1,X00102,1,1,0,WZ 复位按钮
14 3,WZ,PG.WZ.EmergencyStopButton,Input,Td,1,X00103,1,1,0,WZ 急停按钮
15 4,WZ,PG.WZ.BlueButton,Input,Td,1,X00104,1,1,0,WZ 蓝色按钮(预留)
16 5,Stage,PG.Stage.ToolSetterSignal,Input,Td,1,X00105,1,1,0,Stage 对刀信号
17 6,Stage,PG.Stage.SubstrateInPlace,Input,Td,1,X00106,1,1,0,Stage 基板到位感应
18 7,Stage,PG.Stage.LifterCyl1WorkPos,Input,Td,1,X00107,1,1,0,Stage 顶升气缸1动点
19 8,Stage,PG.Stage.LifterCyl1HomePos,Input,Td,1,X00108,1,1,0,Stage 顶升气缸1原点
20 9,Stage,PG.Stage.LifterCyl2WorkPos,Input,Td,1,X00109,1,1,0,Stage 顶升气缸2动点
21 10,Stage,PG.Stage.LifterCyl2HomePos,Input,Td,1,X00110,1,1,0,Stage 顶升气缸2原点
22 11,WS,PG.WS.ThetaClampCyl1WorkPos,Input,Td,1,X00111,1,1,0,WS θ夹紧气缸1动点
23 12,WS,PG.WS.ThetaClampCyl1HomePos,Input,Td,1,X00112,1,1,0,WS θ夹紧气缸1原点
24 13,WS,PG.WS.ThetaClampCyl2WorkPos,Input,Td,1,X00113,1,1,0,WS θ夹紧气缸2动点
25 14,WS,PG.WS.ThetaClampCyl2HomePos,Input,Td,1,X00114,1,1,0,WS θ夹紧气缸2原点
26 15,WS,PG.WS.ThetaClampCyl3WorkPos,Input,Td,1,X00115,1,1,0,WS θ夹紧气缸3动点
27 0,WS,PG.WS.ThetaClampCyl3HomePos,Input,Td,2,X00200,1,1,0,WS θ夹紧气缸3原点
28 1,WS,PG.WS.ThetaClampCyl4WorkPos,Input,Td,2,X00201,1,1,0,WS θ夹紧气缸4动点
29 2,WS,PG.WS.ThetaClampCyl4HomePos,Input,Td,2,X00202,1,1,0,WS θ夹紧气缸4原点
30 3,WS,PG.WS.ThetaTrayPresentSensor1,Input,Td,2,X00203,1,1,0,WS θ料盘有无感应1
31 4,WS,PG.WS.ThetaTrayPresentSensor2,Input,Td,2,X00204,1,1,0,WS θ料盘有无感应2
32 5,WS,PG.WS.ThetaTrayPresentSensor3,Input,Td,2,X00205,1,1,0,WS θ料盘有无感应3
33 6,WS,PG.WS.ThetaTrayPresentSensor4,Input,Td,2,X00206,1,1,0,WS θ料盘有无感应4
34 7,WS,PG.WS.BondHead1InPlace,Input,Td,2,X00207,1,1,0,WS 刺晶头1在位
35 8,WS,PG.WS.BondHead2InPlace,Input,Td,2,X00208,1,1,0,WS 刺晶头2在位
36 9,WS,PG.WS.BondHead3InPlace,Input,Td,2,X00209,1,1,0,WS 刺晶头3在位
37 10,WS,PG.WS.BondHead4InPlace,Input,Td,2,X00210,1,1,0,WS 刺晶头4在位
38 11,WEU,PG.WEU.Z11MaterialSensor1,Input,Td,2,X00211,1,1,0,WEU Z11 有无料感应1
39 12,WEU,PG.WEU.Z11MaterialSensor2,Input,Td,2,X00212,1,1,0,WEU Z11 有无料感应2
40 13,WEU,PG.WEU.Z12MaterialSensor3,Input,Td,2,X00213,1,1,0,WEU Z12 有无料感应3
41 14,WEU,PG.WEU.Z12MaterialSensor4,Input,Td,2,X00214,1,1,0,WEU Z12 有无料感应4
42 0,CV,PG.CV.UpperInletSensor,Input,Td,3,X00300,1,1,0,CV 上层进料感应
43 1,CV,PG.CV.UpperInPlaceSensor,Input,Td,3,X00301,1,1,0,CV 上层到位感应
44 2,CV,PG.CV.LowerOutletSensor,Input,Td,3,X00302,1,1,0,CV 下层出料感应
45 3,CV,PG.CV.LowerInPlaceSensor,Input,Td,3,X00303,1,1,0,CV 下层到位感应
46 4,WZ,PG.WZ.SafetyDoor1Closed,Input,Td,3,X00304,1,1,0,WZ 安全门1关门检测
47 5,WZ,PG.WZ.SafetyDoor2Closed,Input,Td,3,X00305,1,1,0,WZ 安全门2关门检测
48 6,WZ,PG.WZ.SafetyDoor3Closed,Input,Td,3,X00306,1,1,0,WZ 安全门3关门检测
49 7,WZ,PG.WZ.SafetyDoor4Closed,Input,Td,3,X00307,1,1,0,WZ 安全门4关门检测
50 8,WZ,PG.WZ.SecurityDoorShield,Input,Td,3,X00308,1,1,0,WZ 安全门屏蔽
51 10,General,PG.General.PhaseLossSensor,Input,Td,3,X00310,1,1,0,缺相检测
52 11,General,PG.General.SafetyCircuitStatus1,Input,Td,3,X00311,1,1,0,安全回路状态1
53 12,General,PG.General.SafetyCircuitStatus2,Input,Td,3,X00312,1,1,0,安全回路状态2
54 13,CV,PG.CV.IonWindRodAlarmDetection,Input,Td,3,X00313,1,1,0,CV 离子风棒报警检测
55 14,EFEM,PG.EFEM.IonWindRodAlarmDetection1,Input,Td,3,X00314,1,1,0,EFEM离子风棒报警检测1
56 15,EFEM,PG.EFEM.IonWindRodAlarmDetection2,Input,Td,3,X00315,1,1,0,EFEM离子风棒报警检测2
57 0,AxisZ,PG.AxisZ.Z1GuideRailBrake,Output,Td,4,Y00100,1,1,0,Z1轴导轨抱闸
58 1,AxisZ,PG.AxisZ.Z3CameraAirCooling,Output,Td,4,Y00101,1,1,0,Z3相机气冷
59 2,AxisZ,PG.AxisZ.Z5CameraAirCooling,Output,Td,4,Y00102,1,1,0,Z5相机气冷
60 3,AxisZ,PG.AxisZ.Z10CameraAirCooling,Output,Td,4,Y00103,1,1,0,Z10相机气冷
61 4,AxisZ,PG.AxisZ.Z2BondHeadAirCooling,Output,Td,4,Y00104,1,1,0,Z2刺晶头气冷
62 5,CV,PG.CV.IonBarAct,Output,Td,4,Y00105,1,1,0,CV 离子风棒
63 6,WEU,PG.WEU.IonBarAct1,Output,Td,4,Y00106,1,1,0,WEU离子风棒1
64 7,WEU,PG.WEU.IonBarAct2,Output,Td,4,Y00107,1,1,0,WEU离子风棒2
65 8,WS,PG.WS.ThetaClampCylAct,Output,Td,4,Y00108,1,1,0,WS θ 夹紧气缸动作
66 9,WS,PG.WS.ThetaBrakePressCylAct,Output,Td,4,Y00109,1,1,0,WS θ 刹车压紧气缸动作
67 10,Stage,PG.Stage.LifterCyl1Act,Output,Td,4,Y00110,1,1,0,Stage 顶升气缸1动作
68 11,Stage,PG.Stage.LifterCyl2Act,Output,Td,4,Y00111,1,1,0,Stage 顶升气缸2动作
69 0,WZ,PG.WZ.StartButtonLight,Output,Td,5,Y00200,1,1,0,WZ 启动按钮灯
70 1,WZ,PG.WZ.StopButtonLight,Output,Td,5,Y00201,1,1,0,WZ 停止按钮灯
71 2,WZ,PG.WZ.ResetButtonLight,Output,Td,5,Y00202,1,1,0,WZ 复位按钮灯
72 3,WZ,PG.WZ.BlueButtonLight,Output,Td,5,Y00203,1,1,0,WZ 蓝色按钮灯
73 4,WZ,PG.WZ.WorkLight1,Output,Td,5,Y00204,1,1,0,WZ 照明灯1
74 6,EFEM,PG.EFEM.WorkLight1,Output,Td,5,Y00206,1,1,0,EFEM 照明灯1
75 8,WZ,PG.WZ.StackLightRed,Output,Td,5,Y00208,1,1,0,WZ 四色灯-红
76 9,WZ,PG.WZ.StackLightYellow,Output,Td,5,Y00209,1,1,0,WZ 四色灯-黄
77 10,WZ,PG.WZ.StackLightGreen,Output,Td,5,Y00210,1,1,0,WZ 四色灯-绿
78 11,WZ,PG.WZ.StackLightBlue,Output,Td,5,Y00211,1,1,0,WZ 四色灯-蓝
79 12,WZ,PG.WZ.BuzzerAct,Output,Td,5,Y00212,1,1,0,WZ 蜂鸣器
80 0,Stage,PG.Stage.BreakingTheVacuum1,Output,Td,6,Y00300,1,1,0,Stage 破真空1
81 1,Stage,PG.Stage.BreakingTheVacuum2,Output,Td,6,Y00301,1,1,0,STAGE 破真空2
82 2,Stage,PG.Stage.BreakingTheVacuum3,Output,Td,6,Y00302,1,1,0,STAGE 破真空3
83 3,Stage,PG.Stage.BreakingTheVacuum4,Output,Td,6,Y00303,1,1,0,STAGE 破真空4
84 4,WEU,PG.WEU.TrayBreakVacuum1,Output,Td,6,Y00304,1,1,0,WEU 料盘破真空1
85 5,WEU,PG.WEU.TrayBreakVacuum2,Output,Td,6,Y00305,1,1,0,WEU 料盘破真空2
86 6,AxisZ,PG.AxisZ.Z2BondHeadBreakVacuum,Output,Td,6,Y00306,1,1,0,PHS Z2 刺晶头破真空
87 7,Stage,PG.Stage.Vacuum1,Output,Td,6,Y00307,1,1,0,STAGE 吸真空1
88 8,Stage,PG.Stage.Vacuum2,Output,Td,6,Y00308,1,1,0,STAGE 吸真空2
89 9,Stage,PG.Stage.Vacuum3,Output,Td,6,Y00309,1,1,0,STAGE 吸真空3
90 10,Stage,PG.Stage.Vacuum4,Output,Td,6,Y00310,1,1,0,STAGE 吸真空4
91 11,WEU,PG.WEU.TrayVacuum1,Output,Td,6,Y00311,1,1,0,WEU 料盘吸真空1
92 12,WEU,PG.WEU.TrayVacuum2,Output,Td,6,Y00312,1,1,0,WEU 料盘吸真空2
93 13,AxisZ,PG.AxisZ.Z2BondHeadVacuum,Output,Td,6,Y00313,1,1,0,PHS Z2 刺晶头吸真空
94 1,WZ,PG.WZ.SafetyDoor1Open,Output,Td,7,Y00401,1,1,0,WZ 安全门1打开
95 2,WZ,PG.WZ.SafetyDoor2Open,Output,Td,7,Y00402,1,1,0,WZ 安全门2打开
96 3,WZ,PG.WZ.SafetyDoor3Open,Output,Td,7,Y00402,1,1,0,WZ 安全门3打开
97 4,WZ,PG.WZ.SafetyDoor4Open,Output,Td,7,Y00403,1,1,0,WZ 安全门4打开

97
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/DeviceIoPoints1.csv Normal file
View File

@@ -0,0 +1,97 @@
# Device IO <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>,,,,,,,,,,
"# <20><>˳<EFBFBD><CBB3><EFBFBD><EFBFBD>Id Module Name Type Card StationNo LineNo Enabled DefaultValue IsInverse Description",,,,,,,,,,
# Module: ҵ<><D2B5>ģ<EFBFBD><C4A3><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD> SubstrateLoad/ChipLoad/SubstrateOut/ChipUnload<61><64>,,,,,,,,,,
# Type: Input/Output (Ҳ֧<D2B2><D6A7> IN/OUT/DI/DO),,,,,,,,,,
# Card: Td/Acs,,,,,,,,,,
# StationNo: ̨<><CCA8>վ<EFBFBD><D5BE>,,,,,,,,,,
# LineNo: ʵ<>ʽ<EFBFBD><CABD><EFBFBD><EFBFBD>߱<EFBFBD>/<2F><><EFBFBD><EFBFBD><EFBFBD>ܱ<EFBFBD>ʶ,,,,,,,,,,
# Enabled: 1/0 <20><> true/false,,,,,,,,,,
# DefaultValue: <20><> IO δ<><CEB4><EFBFBD>û<EFBFBD><C3BB>޷<EFBFBD><DEB7><EFBFBD>ȡʱʹ<CAB1>õ<EFBFBD>Ĭ<EFBFBD><C4AC>״̬<D7B4><CCAC>1/0 <20><> true/false,,,,,,,,,,
Id,Module,Name,Type,Card,StationNo,LineNo,Enabled,DefaultValue,IsInverse,Description
0,WZ,PG.WZ.StartButton,Input,Td,1,X00100,1,1,0,WZ <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>ť
1,WZ,PG.WZ.StopButton,Input,Td,1,X00101,1,1,0,WZ ֹͣ<CDA3><D6B9>ť
2,WZ,PG.WZ.ResetButton,Input,Td,1,X00102,1,1,0,WZ <20><>λ<EFBFBD><CEBB>ť
3,WZ,PG.WZ.EmergencyStopButton,Input,Td,1,X00103,1,1,0,WZ <20><>ͣ<EFBFBD><CDA3>ť
4,WZ,PG.WZ.BlueButton,Input,Td,1,X00104,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>ť<EFBFBD><C5A5>Ԥ<EFBFBD><D4A4><EFBFBD><EFBFBD>
5,Stage,PG.Stage.ToolSetterSignal,Input,Td,1,X00105,1,1,0,Stage <20>Ե<EFBFBD><D4B5>ź<EFBFBD>
6,Stage,PG.Stage.SubstrateInPlace,Input,Td,1,X00106,1,1,0,Stage <20><><EFBFBD>嵽λ<E5B5BD><CEBB>Ӧ
7,Stage,PG.Stage.LifterCyl1WorkPos,Input,Td,1,X00107,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1<EFBFBD><31><EFBFBD><EFBFBD>
8,Stage,PG.Stage.LifterCyl1HomePos,Input,Td,1,X00108,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1ԭ<31><D4AD>
9,Stage,PG.Stage.LifterCyl2WorkPos,Input,Td,1,X00109,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2<EFBFBD><32><EFBFBD><EFBFBD>
10,Stage,PG.Stage.LifterCyl2HomePos,Input,Td,1,X00110,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2ԭ<32><D4AD>
11,WS,PG.WS.ThetaClampCyl1WorkPos,Input,Td,1,X00111,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>1<EFBFBD><31><EFBFBD><EFBFBD>
12,WS,PG.WS.ThetaClampCyl1HomePos,Input,Td,1,X00112,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>1ԭ<31><D4AD>
13,WS,PG.WS.ThetaClampCyl2WorkPos,Input,Td,1,X00113,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>2<EFBFBD><32><EFBFBD><EFBFBD>
14,WS,PG.WS.ThetaClampCyl2HomePos,Input,Td,1,X00114,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>2ԭ<32><D4AD>
15,WS,PG.WS.ThetaClampCyl3WorkPos,Input,Td,1,X00115,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>3<EFBFBD><33><EFBFBD><EFBFBD>
0,WS,PG.WS.ThetaClampCyl3HomePos,Input,Td,2,X00200,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>3ԭ<33><D4AD>
1,WS,PG.WS.ThetaClampCyl4WorkPos,Input,Td,2,X00201,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>4<EFBFBD><34><EFBFBD><EFBFBD>
2,WS,PG.WS.ThetaClampCyl4HomePos,Input,Td,2,X00202,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD><EFBFBD>4ԭ<34><D4AD>
3,WS,PG.WS.ThetaTrayPresentSensor1,Input,Td,2,X00203,1,1,0,WS <20><> <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>޸<EFBFBD>Ӧ1
4,WS,PG.WS.ThetaTrayPresentSensor2,Input,Td,2,X00204,1,1,0,WS <20><> <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>޸<EFBFBD>Ӧ2
5,WS,PG.WS.ThetaTrayPresentSensor3,Input,Td,2,X00205,1,1,0,WS <20><> <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>޸<EFBFBD>Ӧ3
6,WS,PG.WS.ThetaTrayPresentSensor4,Input,Td,2,X00206,1,1,0,WS <20><> <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>޸<EFBFBD>Ӧ4
7,WS,PG.WS.BondHead1InPlace,Input,Td,2,X00207,1,1,0,WS <20>̾<EFBFBD>ͷ1<CDB7><31>λ
8,WS,PG.WS.BondHead2InPlace,Input,Td,2,X00208,1,1,0,WS <20>̾<EFBFBD>ͷ2<CDB7><32>λ
9,WS,PG.WS.BondHead3InPlace,Input,Td,2,X00209,1,1,0,WS <20>̾<EFBFBD>ͷ3<CDB7><33>λ
10,WS,PG.WS.BondHead4InPlace,Input,Td,2,X00210,1,1,0,WS <20>̾<EFBFBD>ͷ4<CDB7><34>λ
11,WEU,PG.WEU.Z11MaterialSensor1,Input,Td,2,X00211,1,1,0,WEU Z11 <20><><EFBFBD><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ1
12,WEU,PG.WEU.Z11MaterialSensor2,Input,Td,2,X00212,1,1,0,WEU Z11 <20><><EFBFBD><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ2
13,WEU,PG.WEU.Z12MaterialSensor3,Input,Td,2,X00213,1,1,0,WEU Z12 <20><><EFBFBD><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ3
14,WEU,PG.WEU.Z12MaterialSensor4,Input,Td,2,X00214,1,1,0,WEU Z12 <20><><EFBFBD><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ4
0,CV,PG.CV.UpperInletSensor,Input,Td,3,X00300,1,1,0,CV <20>ϲ<EFBFBD><CFB2><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ
1,CV,PG.CV.UpperInPlaceSensor,Input,Td,3,X00301,1,1,0,CV <20>ϲ㵽λ<E3B5BD><CEBB>Ӧ
2,CV,PG.CV.LowerOutletSensor,Input,Td,3,X00302,1,1,0,CV <20>²<EFBFBD><C2B2><EFBFBD><EFBFBD>ϸ<EFBFBD>Ӧ
3,CV,PG.CV.LowerInPlaceSensor,Input,Td,3,X00303,1,1,0,CV <20>²㵽λ<E3B5BD><CEBB>Ӧ
4,WZ,PG.WZ.SafetyDoor1Closed,Input,Td,3,X00304,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>1<EFBFBD><31><EFBFBD>ż<EFBFBD><C5BC><EFBFBD>
5,WZ,PG.WZ.SafetyDoor2Closed,Input,Td,3,X00305,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>2<EFBFBD><32><EFBFBD>ż<EFBFBD><C5BC><EFBFBD>
6,WZ,PG.WZ.SafetyDoor3Closed,Input,Td,3,X00306,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>3<EFBFBD><33><EFBFBD>ż<EFBFBD><C5BC><EFBFBD>
7,WZ,PG.WZ.SafetyDoor4Closed,Input,Td,3,X00307,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>4<EFBFBD><34><EFBFBD>ż<EFBFBD><C5BC><EFBFBD>
8,WZ,PG.WZ.SecurityDoorShield,Input,Td,3,X00308,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
10,General,PG.General.PhaseLossSensor,Input,Td,3,X00310,1,1,0,ȱ<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
11,General,PG.General.SafetyCircuitStatus1,Input,Td,3,X00311,1,1,0,<EFBFBD><EFBFBD>ȫ<EFBFBD><EFBFBD>·״̬1
12,General,PG.General.SafetyCircuitStatus2,Input,Td,3,X00312,1,1,0,<EFBFBD><EFBFBD>ȫ<EFBFBD><EFBFBD>·״̬2
13,CV,PG.CV.IonWindRodAlarmDetection,Input,Td,3,X00313,1,1,0,CV <20><><EFBFBD>ӷ<EFBFBD><D3B7><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
14,EFEM,PG.EFEM.IonWindRodAlarmDetection1,Input,Td,3,X00314,1,1,0,EFEM<EFBFBD><EFBFBD><EFBFBD>ӷ<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
15,EFEM,PG.EFEM.IonWindRodAlarmDetection2,Input,Td,3,X00315,1,1,0,EFEM<EFBFBD><EFBFBD><EFBFBD>ӷ<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2
0,AxisZ,PG.AxisZ.Z1GuideRailBrake,Output,Td,4,Y00100,1,1,0,Z1<EFBFBD>ᵼ<EFBFBD>챧բ
1,AxisZ,PG.AxisZ.Z3CameraAirCooling,Output,Td,4,Y00101,1,1,0,Z3<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
2,AxisZ,PG.AxisZ.Z5CameraAirCooling,Output,Td,4,Y00102,1,1,0,Z5<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
3,AxisZ,PG.AxisZ.Z10CameraAirCooling,Output,Td,4,Y00103,1,1,0,Z10<EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
4,AxisZ,PG.AxisZ.Z2BondHeadAirCooling,Output,Td,4,Y00104,1,1,0,Z2<EFBFBD>̾<EFBFBD>ͷ<EFBFBD><EFBFBD><EFBFBD><EFBFBD>
5,CV,PG.CV.IonBarAct,Output,Td,4,Y00105,1,1,0,CV <20><><EFBFBD>ӷ<EFBFBD><D3B7><EFBFBD>
6,WEU,PG.WEU.IonBarAct1,Output,Td,4,Y00106,1,1,0,WEU<EFBFBD><EFBFBD><EFBFBD>ӷ<EFBFBD><EFBFBD><EFBFBD>1
7,WEU,PG.WEU.IonBarAct2,Output,Td,4,Y00107,1,1,0,WEU<EFBFBD><EFBFBD><EFBFBD>ӷ<EFBFBD><EFBFBD><EFBFBD>2
8,WS,PG.WS.ThetaClampCylAct,Output,Td,4,Y00108,1,1,0,WS <20><> <20>н<EFBFBD><D0BD><EFBFBD><EFBFBD>׶<EFBFBD><D7B6><EFBFBD>
9,WS,PG.WS.ThetaBrakePressCylAct,Output,Td,4,Y00109,1,1,0,WS <20><>ɲ<EFBFBD><C9B2>ѹ<EFBFBD><D1B9><EFBFBD><EFBFBD><EFBFBD>׶<EFBFBD><D7B6><EFBFBD>
10,Stage,PG.Stage.LifterCyl1Act,Output,Td,4,Y00110,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1<EFBFBD><31><EFBFBD><EFBFBD>
11,Stage,PG.Stage.LifterCyl2Act,Output,Td,4,Y00111,1,1,0,Stage <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2<EFBFBD><32><EFBFBD><EFBFBD>
0,WZ,PG.WZ.StartButtonLight,Output,Td,5,Y00200,1,1,0,WZ <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>ť<EFBFBD><C5A5>
1,WZ,PG.WZ.StopButtonLight,Output,Td,5,Y00201,1,1,0,WZ ֹͣ<CDA3><D6B9>ť<EFBFBD><C5A5>
2,WZ,PG.WZ.ResetButtonLight,Output,Td,5,Y00202,1,1,0,WZ <20><>λ<EFBFBD><CEBB>ť<EFBFBD><C5A5>
3,WZ,PG.WZ.BlueButtonLight,Output,Td,5,Y00203,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>ť<EFBFBD><C5A5>
4,WZ,PG.WZ.WorkLight1,Output,Td,5,Y00204,1,1,0,WZ <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
6,EFEM,PG.EFEM.WorkLight1,Output,Td,5,Y00206,1,1,0,EFEM <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
8,WZ,PG.WZ.StackLightRed,Output,Td,5,Y00208,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>-<2D><>
9,WZ,PG.WZ.StackLightYellow,Output,Td,5,Y00209,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>-<2D><>
10,WZ,PG.WZ.StackLightGreen,Output,Td,5,Y00210,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>-<2D><>
11,WZ,PG.WZ.StackLightBlue,Output,Td,5,Y00211,1,1,0,WZ <20><>ɫ<EFBFBD><C9AB>-<2D><>
12,WZ,PG.WZ.BuzzerAct,Output,Td,5,Y00212,1,1,0,WZ <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
0,Stage,PG.Stage.BreakingTheVacuum1,Output,Td,6,Y00300,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
1,Stage,PG.Stage.BreakingTheVacuum2,Output,Td,6,Y00301,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2
2,Stage,PG.Stage.BreakingTheVacuum3,Output,Td,6,Y00302,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>3
3,Stage,PG.Stage.BreakingTheVacuum4,Output,Td,6,Y00303,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>4
4,WEU,PG.WEU.TrayBreakVacuum1,Output,Td,6,Y00304,1,1,0,WEU <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
5,WEU,PG.WEU.TrayBreakVacuum2,Output,Td,6,Y00305,1,1,0,WEU <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2
6,AxisZ,PG.AxisZ.Z2BondHeadBreakVacuum,Output,Td,6,Y00306,1,1,0,PHS Z2 <20>̾<EFBFBD>ͷ<EFBFBD><CDB7><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
7,Stage,PG.Stage.Vacuum1,Output,Td,6,Y00307,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
8,Stage,PG.Stage.Vacuum2,Output,Td,6,Y00308,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2
9,Stage,PG.Stage.Vacuum3,Output,Td,6,Y00309,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>3
10,Stage,PG.Stage.Vacuum4,Output,Td,6,Y00310,1,1,0,STAGE <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD>4
11,WEU,PG.WEU.TrayVacuum1,Output,Td,6,Y00311,1,1,0,WEU <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>1
12,WEU,PG.WEU.TrayVacuum2,Output,Td,6,Y00312,1,1,0,WEU <20><><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD><EFBFBD>2
13,AxisZ,PG.AxisZ.Z2BondHeadVacuum,Output,Td,6,Y00313,1,1,0,PHS Z2 <20>̾<EFBFBD>ͷ<EFBFBD><CDB7><EFBFBD><EFBFBD><EFBFBD><EFBFBD>
1,WZ,PG.WZ.SafetyDoor1Open,Output,Td,7,Y00400,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>1<EFBFBD><31><EFBFBD><EFBFBD>
2,WZ,PG.WZ.SafetyDoor2Open,Output,Td,7,Y00401,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>2<EFBFBD><32><EFBFBD><EFBFBD>
3,WZ,PG.WZ.SafetyDoor3Open,Output,Td,7,Y00402,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>3<EFBFBD><33><EFBFBD><EFBFBD>
4,WZ,PG.WZ.SafetyDoor4Open,Output,Td,7,Y00403,1,1,0,WZ <20><>ȫ<EFBFBD><C8AB>4<EFBFBD><34><EFBFBD><EFBFBD>
1 # Device IO 定义表
2 # 列顺序：Id Module Name Type Card StationNo LineNo Enabled DefaultValue IsInverse Description
3 # Module: 业务模块名（如 SubstrateLoad/ChipLoad/SubstrateOut/ChipUnload）
4 # Type: Input/Output (也支持 IN/OUT/DI/DO)
5 # Card: Td/Acs
6 # StationNo: 台达站号
7 # LineNo: 实际接线线标/号码管标识
8 # Enabled: 1/0 或 true/false
9 # DefaultValue: 当 IO 未启用或无法读取时使用的默认状态，1/0 或 true/false
10 Id Module Name Type Card StationNo LineNo Enabled DefaultValue IsInverse Description
11 0 WZ PG.WZ.StartButton Input Td 1 X00100 1 1 0 WZ 启动按钮
12 1 WZ PG.WZ.StopButton Input Td 1 X00101 1 1 0 WZ 停止按钮
13 2 WZ PG.WZ.ResetButton Input Td 1 X00102 1 1 0 WZ 复位按钮
14 3 WZ PG.WZ.EmergencyStopButton Input Td 1 X00103 1 1 0 WZ 急停按钮
15 4 WZ PG.WZ.BlueButton Input Td 1 X00104 1 1 0 WZ 蓝色按钮（预留）
16 5 Stage PG.Stage.ToolSetterSignal Input Td 1 X00105 1 1 0 Stage 对刀信号
17 6 Stage PG.Stage.SubstrateInPlace Input Td 1 X00106 1 1 0 Stage 基板到位感应
18 7 Stage PG.Stage.LifterCyl1WorkPos Input Td 1 X00107 1 1 0 Stage 顶升气缸1动点
19 8 Stage PG.Stage.LifterCyl1HomePos Input Td 1 X00108 1 1 0 Stage 顶升气缸1原点
20 9 Stage PG.Stage.LifterCyl2WorkPos Input Td 1 X00109 1 1 0 Stage 顶升气缸2动点
21 10 Stage PG.Stage.LifterCyl2HomePos Input Td 1 X00110 1 1 0 Stage 顶升气缸2原点
22 11 WS PG.WS.ThetaClampCyl1WorkPos Input Td 1 X00111 1 1 0 WS θ 夹紧气缸1动点
23 12 WS PG.WS.ThetaClampCyl1HomePos Input Td 1 X00112 1 1 0 WS θ 夹紧气缸1原点
24 13 WS PG.WS.ThetaClampCyl2WorkPos Input Td 1 X00113 1 1 0 WS θ 夹紧气缸2动点
25 14 WS PG.WS.ThetaClampCyl2HomePos Input Td 1 X00114 1 1 0 WS θ 夹紧气缸2原点
26 15 WS PG.WS.ThetaClampCyl3WorkPos Input Td 1 X00115 1 1 0 WS θ 夹紧气缸3动点
27 0 WS PG.WS.ThetaClampCyl3HomePos Input Td 2 X00200 1 1 0 WS θ 夹紧气缸3原点
28 1 WS PG.WS.ThetaClampCyl4WorkPos Input Td 2 X00201 1 1 0 WS θ 夹紧气缸4动点
29 2 WS PG.WS.ThetaClampCyl4HomePos Input Td 2 X00202 1 1 0 WS θ 夹紧气缸4原点
30 3 WS PG.WS.ThetaTrayPresentSensor1 Input Td 2 X00203 1 1 0 WS θ 料盘有无感应1
31 4 WS PG.WS.ThetaTrayPresentSensor2 Input Td 2 X00204 1 1 0 WS θ 料盘有无感应2
32 5 WS PG.WS.ThetaTrayPresentSensor3 Input Td 2 X00205 1 1 0 WS θ 料盘有无感应3
33 6 WS PG.WS.ThetaTrayPresentSensor4 Input Td 2 X00206 1 1 0 WS θ 料盘有无感应4
34 7 WS PG.WS.BondHead1InPlace Input Td 2 X00207 1 1 0 WS 刺晶头1在位
35 8 WS PG.WS.BondHead2InPlace Input Td 2 X00208 1 1 0 WS 刺晶头2在位
36 9 WS PG.WS.BondHead3InPlace Input Td 2 X00209 1 1 0 WS 刺晶头3在位
37 10 WS PG.WS.BondHead4InPlace Input Td 2 X00210 1 1 0 WS 刺晶头4在位
38 11 WEU PG.WEU.Z11MaterialSensor1 Input Td 2 X00211 1 1 0 WEU Z11 有无料感应1
39 12 WEU PG.WEU.Z11MaterialSensor2 Input Td 2 X00212 1 1 0 WEU Z11 有无料感应2
40 13 WEU PG.WEU.Z12MaterialSensor3 Input Td 2 X00213 1 1 0 WEU Z12 有无料感应3
41 14 WEU PG.WEU.Z12MaterialSensor4 Input Td 2 X00214 1 1 0 WEU Z12 有无料感应4
42 0 CV PG.CV.UpperInletSensor Input Td 3 X00300 1 1 0 CV 上层进料感应
43 1 CV PG.CV.UpperInPlaceSensor Input Td 3 X00301 1 1 0 CV 上层到位感应
44 2 CV PG.CV.LowerOutletSensor Input Td 3 X00302 1 1 0 CV 下层出料感应
45 3 CV PG.CV.LowerInPlaceSensor Input Td 3 X00303 1 1 0 CV 下层到位感应
46 4 WZ PG.WZ.SafetyDoor1Closed Input Td 3 X00304 1 1 0 WZ 安全门1关门检测
47 5 WZ PG.WZ.SafetyDoor2Closed Input Td 3 X00305 1 1 0 WZ 安全门2关门检测
48 6 WZ PG.WZ.SafetyDoor3Closed Input Td 3 X00306 1 1 0 WZ 安全门3关门检测
49 7 WZ PG.WZ.SafetyDoor4Closed Input Td 3 X00307 1 1 0 WZ 安全门4关门检测
50 8 WZ PG.WZ.SecurityDoorShield Input Td 3 X00308 1 1 0 WZ 安全门屏蔽
51 10 General PG.General.PhaseLossSensor Input Td 3 X00310 1 1 0 缺相检测
52 11 General PG.General.SafetyCircuitStatus1 Input Td 3 X00311 1 1 0 安全回路状态1
53 12 General PG.General.SafetyCircuitStatus2 Input Td 3 X00312 1 1 0 安全回路状态2
54 13 CV PG.CV.IonWindRodAlarmDetection Input Td 3 X00313 1 1 0 CV 离子风棒报警检测
55 14 EFEM PG.EFEM.IonWindRodAlarmDetection1 Input Td 3 X00314 1 1 0 EFEM离子风棒报警检测1
56 15 EFEM PG.EFEM.IonWindRodAlarmDetection2 Input Td 3 X00315 1 1 0 EFEM离子风棒报警检测2
57 0 AxisZ PG.AxisZ.Z1GuideRailBrake Output Td 4 Y00100 1 1 0 Z1轴导轨抱闸
58 1 AxisZ PG.AxisZ.Z3CameraAirCooling Output Td 4 Y00101 1 1 0 Z3相机气冷
59 2 AxisZ PG.AxisZ.Z5CameraAirCooling Output Td 4 Y00102 1 1 0 Z5相机气冷
60 3 AxisZ PG.AxisZ.Z10CameraAirCooling Output Td 4 Y00103 1 1 0 Z10相机气冷
61 4 AxisZ PG.AxisZ.Z2BondHeadAirCooling Output Td 4 Y00104 1 1 0 Z2刺晶头气冷
62 5 CV PG.CV.IonBarAct Output Td 4 Y00105 1 1 0 CV 离子风棒
63 6 WEU PG.WEU.IonBarAct1 Output Td 4 Y00106 1 1 0 WEU离子风棒1
64 7 WEU PG.WEU.IonBarAct2 Output Td 4 Y00107 1 1 0 WEU离子风棒2
65 8 WS PG.WS.ThetaClampCylAct Output Td 4 Y00108 1 1 0 WS θ 夹紧气缸动作
66 9 WS PG.WS.ThetaBrakePressCylAct Output Td 4 Y00109 1 1 0 WS θ刹车压紧气缸动作
67 10 Stage PG.Stage.LifterCyl1Act Output Td 4 Y00110 1 1 0 Stage 顶升气缸1动作
68 11 Stage PG.Stage.LifterCyl2Act Output Td 4 Y00111 1 1 0 Stage 顶升气缸2动作
69 0 WZ PG.WZ.StartButtonLight Output Td 5 Y00200 1 1 0 WZ 启动按钮灯
70 1 WZ PG.WZ.StopButtonLight Output Td 5 Y00201 1 1 0 WZ 停止按钮灯
71 2 WZ PG.WZ.ResetButtonLight Output Td 5 Y00202 1 1 0 WZ 复位按钮灯
72 3 WZ PG.WZ.BlueButtonLight Output Td 5 Y00203 1 1 0 WZ 蓝色按钮灯
73 4 WZ PG.WZ.WorkLight1 Output Td 5 Y00204 1 1 0 WZ 照明灯1
74 6 EFEM PG.EFEM.WorkLight1 Output Td 5 Y00206 1 1 0 EFEM 照明灯1
75 8 WZ PG.WZ.StackLightRed Output Td 5 Y00208 1 1 0 WZ 四色灯-红
76 9 WZ PG.WZ.StackLightYellow Output Td 5 Y00209 1 1 0 WZ 四色灯-黄
77 10 WZ PG.WZ.StackLightGreen Output Td 5 Y00210 1 1 0 WZ 四色灯-绿
78 11 WZ PG.WZ.StackLightBlue Output Td 5 Y00211 1 1 0 WZ 四色灯-蓝
79 12 WZ PG.WZ.BuzzerAct Output Td 5 Y00212 1 1 0 WZ 蜂鸣器
80 0 Stage PG.Stage.BreakingTheVacuum1 Output Td 6 Y00300 1 1 0 STAGE 破真空1
81 1 Stage PG.Stage.BreakingTheVacuum2 Output Td 6 Y00301 1 1 0 STAGE 破真空2
82 2 Stage PG.Stage.BreakingTheVacuum3 Output Td 6 Y00302 1 1 0 STAGE 破真空3
83 3 Stage PG.Stage.BreakingTheVacuum4 Output Td 6 Y00303 1 1 0 STAGE 破真空4
84 4 WEU PG.WEU.TrayBreakVacuum1 Output Td 6 Y00304 1 1 0 WEU 料盘破真空1
85 5 WEU PG.WEU.TrayBreakVacuum2 Output Td 6 Y00305 1 1 0 WEU 料盘破真空2
86 6 AxisZ PG.AxisZ.Z2BondHeadBreakVacuum Output Td 6 Y00306 1 1 0 PHS Z2 刺晶头破真空
87 7 Stage PG.Stage.Vacuum1 Output Td 6 Y00307 1 1 0 STAGE 吸真空1
88 8 Stage PG.Stage.Vacuum2 Output Td 6 Y00308 1 1 0 STAGE 吸真空2
89 9 Stage PG.Stage.Vacuum3 Output Td 6 Y00309 1 1 0 STAGE 吸真空3
90 10 Stage PG.Stage.Vacuum4 Output Td 6 Y00310 1 1 0 STAGE 吸真空4
91 11 WEU PG.WEU.TrayVacuum1 Output Td 6 Y00311 1 1 0 WEU 料盘吸真空1
92 12 WEU PG.WEU.TrayVacuum2 Output Td 6 Y00312 1 1 0 WEU 料盘吸真空2
93 13 AxisZ PG.AxisZ.Z2BondHeadVacuum Output Td 6 Y00313 1 1 0 PHS Z2 刺晶头吸真空
94 1 WZ PG.WZ.SafetyDoor1Open Output Td 7 Y00400 1 1 0 WZ 安全门1打开
95 2 WZ PG.WZ.SafetyDoor2Open Output Td 7 Y00401 1 1 0 WZ 安全门2打开
96 3 WZ PG.WZ.SafetyDoor3Open Output Td 7 Y00402 1 1 0 WZ 安全门3打开
97 4 WZ PG.WZ.SafetyDoor4Open Output Td 7 Y00403 1 1 0 WZ 安全门4打开

130
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/FlowStageMapping.json Normal file
View File

@@ -0,0 +1,130 @@
{
"Rules": [
{
"WorkflowName": "SubstrateLoadFlow",
"ParentActivityName": "*",
"ActivityName": "*",
"Stage": 0,
"DisplayFlowName": "SubstrateLoadFlow"
},
{
"WorkflowName": "SubstratePositionFlow",
"ParentActivityName": "*",
"ActivityName": "*",
"Stage": 1,
"DisplayFlowName": "SubstratePositionFlow"
},
{
"WorkflowName": "WaferAngleAdjustmentFlow",
"ParentActivityName": "*",
"ActivityName": "*",
"Stage": 1,
"DisplayFlowName": "WaferAngleAdjustmentFlow"
},
{
"WorkflowName": "DiePositionFlow",
"ParentActivityName": "*",
"ActivityName": "*",
"Stage": 1,
"DisplayFlowName": "DiePositionFlow"
},
{
"WorkflowName": "DieTransferFlow",
"ParentActivityName": "*",
"ActivityName": "*",
"Stage": 2,
"DisplayFlowName": "DieTransferFlow"
},
{
"WorkflowName": "DieRecheckFlow",
"ParentActivityName": "*",
"ActivityName": "*",
"Stage": 3,
"DisplayFlowName": "DieRecheckFlow"
},
{
"WorkflowName": "SubstrateUnloadFlow",
"ParentActivityName": "*",
"ActivityName": "*",
"Stage": 4,
"DisplayFlowName": "SubstrateUnloadFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "SubstrateLoadFlow",
"ActivityName": "*",
"Stage": 0,
"DisplayFlowName": "SubstrateLoadFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "DieAlignFlow",
"ActivityName": "*SubstratePosition*",
"Stage": 1,
"DisplayFlowName": "SubstratePositionFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "DieAlignFlow",
"ActivityName": "WaferAngleAdjustmentFlow",
"Stage": 1,
"DisplayFlowName": "WaferAngleAdjustmentFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "DieAlignFlow",
"ActivityName": "DiePositionFlow",
"Stage": 1,
"DisplayFlowName": "DiePositionFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "DieAlignFlow",
"ActivityName": "*",
"Stage": 1,
"DisplayFlowName": "SubstratePositionFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "DieBondFlow",
"ActivityName": "*",
"Stage": 2,
"DisplayFlowName": "DieTransferFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "InspectFlow",
"ActivityName": "*",
"Stage": 3,
"DisplayFlowName": "DieRecheckFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "SubstrateUnloadFlow",
"ActivityName": "*",
"Stage": 4,
"DisplayFlowName": "SubstrateUnloadFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "DieAlignFlow",
"ActivityName": "SubstratePositionFlow",
"Stage": 1,
"DisplayFlowName": "SubstratePositionFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "DieBondFlow",
"ActivityName": "DieTransferFlow",
"Stage": 2,
"DisplayFlowName": "DieTransferFlow"
},
{
"WorkflowName": "AutoProduction",
"ParentActivityName": "InspectFlow",
"ActivityName": "DieRecheckFlow",
"Stage": 3,
"DisplayFlowName": "DieRecheckFlow"
}
]
}

30
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/Layout.xml Normal file
View File

@@ -0,0 +1,30 @@
<?xml version="1.0" encoding="utf-8"?>
<Layout Version="1.0.0.1" WindowHeight="1024" WindowWidth="1280" MachineId="12345678901234567">
<Header Title="PG-A1">
<HeaderItem Id="HideEMO"/>
<HeaderItem Id="HideCIMStatus"/>
</Header>
<Body>
<StatusBar>
<StatusLight Name="设备一" LangName="Device" Binding="Device"></StatusLight>
</StatusBar>
<Pages>
<Page Name="主页" LangName="PageHome" Target="Home">
</Page>
<Page Name="配方" LangName="PageRecipe" Target="Recipe">
</Page>
<Page Name="参数设置" LangName="PageSettings" Target="PageSettings" DisabledState="SemiAutomatic;Automatic" UserRightId="PageSettings">
</Page>
<Page Name="设备维护" LangName="MenuDeviceMaint" Target="MenuDeviceMaint" DisabledState="SemiAutomatic;Automatic" UserRightId="PageSettings">
</Page>
<Page Name="标定与校准" LangName="PageCalib" Target="PageCalib" DisabledState="SemiAutomatic;Automatic" UserRightId="PageCalib">
</Page>
<Page Name="半自动" LangName="ManualModeOperation" Target="ManualOperate">
</Page>
</Pages>
</Body>
<Footer Target="Footer"/>
</Layout>

581
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/ModelMotion/AxisCardPO.xml Normal file
View File

@@ -0,0 +1,581 @@
<?xml version="1.0"?>
<ArrayOfPersistenceObject xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<PersistenceObject xsi:type="AxisCardPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>AcsCard</CategoryName>
<ID>2d23c400-ccf2-469a-add5-ae92a98a85e6</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardPO.xml</ConfigPath>
<AxisCardType>DEMO</AxisCardType>
<AxisCardNum>0</AxisCardNum>
<PortNo>0</PortNo>
<ListAxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-X1</CategoryName>
<ID>3a9c772b-4a9c-4077-abbc-80fc038b81ee</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>0</AxisNum>
<AxisName>PHS-X1</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-X2</CategoryName>
<ID>c83e5f81-ef2c-413c-ace9-24bc97c30b32</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>1</AxisNum>
<AxisName>PHS-X2</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>WS-X3</CategoryName>
<ID>e0a2d6ed-2972-4595-a8dc-53a504187a9f</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>4</AxisNum>
<AxisName>WS-X3</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Y1</CategoryName>
<ID>4e145d2a-f7f7-4ce2-a5b0-919375a03d87</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>2</AxisNum>
<AxisName>PHS-Y1</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>WS-R</CategoryName>
<ID>cebe7f5c-8cdd-47e8-906a-6083047a078d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>6</AxisNum>
<AxisName>WS-R</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>SZ</CategoryName>
<ID>ce1f8f65-3409-4124-9c9a-ba750c848e36</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>8</AxisNum>
<AxisName>SZ</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Y3</CategoryName>
<ID>05dfa6d1-401b-4a55-808b-5af2efeb358c</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>AcsCard</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>7</AxisNum>
<AxisName>Stage-Y3</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
</ListAxisCardParaPO>
<Version>1</Version>
<Core>0</Core>
<CrossCompensate>0</CrossCompensate>
<IsServoSeparate>false</IsServoSeparate>
</PersistenceObject>
<PersistenceObject xsi:type="AxisCardPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>Plc</CategoryName>
<ID>80a2e320-d4da-46a6-9f35-0a6d0996ea22</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardPO.xml</ConfigPath>
<AxisCardType>DEMO</AxisCardType>
<AxisCardNum>0</AxisCardNum>
<PortNo>0</PortNo>
<ListAxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z1</CategoryName>
<ID>471e0395-0918-4e0b-b9cb-d0727281ef6c</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>0</AxisNum>
<AxisName>PHS-Z1</AxisName>
<Direction>Z</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z3</CategoryName>
<ID>5dd115ab-09a4-4bbb-9fdf-e9b76cc5e88e</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>1</AxisNum>
<AxisName>PHS-Z3</AxisName>
<Direction>Z</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z4</CategoryName>
<ID>e359bc21-c1e8-4e06-acdb-1df94ee7931b</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>10</AxisNum>
<AxisName>PHS-Z4</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z5</CategoryName>
<ID>9d948211-59ae-498c-b124-531a69855752</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>2</AxisNum>
<AxisName>PHS-Z5</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z6</CategoryName>
<ID>477c569a-e460-4c45-917f-a0744ebed5ec</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>11</AxisNum>
<AxisName>PHS-Z6</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z7</CategoryName>
<ID>f761791c-8fb4-4a5b-8fef-0380e996e81f</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>7</AxisNum>
<AxisName>Stage-Z7</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z8</CategoryName>
<ID>28a1caa3-01bc-48ed-8551-68829b280a6f</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>8</AxisNum>
<AxisName>Stage-Z8</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z9</CategoryName>
<ID>71c8587a-1e85-4fa4-8809-14f00111a230</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>9</AxisNum>
<AxisName>Stage-Z9</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z10</CategoryName>
<ID>fc66c8d2-c35f-46b5-9c14-f3a017311e86</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>14</AxisNum>
<AxisName>Stage-Z10</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-CV-Y4</CategoryName>
<ID>6ebf862a-c91e-4bb2-a5b7-e67f307333b4</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>15</AxisNum>
<AxisName>Stage-CV-Y4</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-CV-Y5</CategoryName>
<ID>e1cf2e06-fe51-4115-8ad2-2a0b3dc53c00</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>16</AxisNum>
<AxisName>Stage-CV-Y5</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>WEU-Z11</CategoryName>
<ID>a765e366-03a3-451f-ab44-1e6129a6ac61</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>3</AxisNum>
<AxisName>WEU-Z11</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>WEU-Z12</CategoryName>
<ID>a4c43082-6841-45b4-83f2-b89a952a6547</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>4</AxisNum>
<AxisName>WEU-Z12</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>WEU-Y6</CategoryName>
<ID>670409e3-1e19-45c8-94b8-1f3fb1905dc2</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>5</AxisNum>
<AxisName>WEU-Y6</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Z13</CategoryName>
<ID>eb009565-40bf-4923-9b9b-fdf483dc1532</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>6</AxisNum>
<AxisName>CV-Z13</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y7</CategoryName>
<ID>d75ee50a-ba99-4ec1-bb36-6e65cbd84180</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>18</AxisNum>
<AxisName>CV-Y7</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y8</CategoryName>
<ID>8845c4e8-4d09-4f0a-b073-1b29e1ca59e6</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>19</AxisNum>
<AxisName>CV-Y8</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y9</CategoryName>
<ID>4970be79-b46a-4004-84bf-82e922fb5cb8</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>20</AxisNum>
<AxisName>CV-Y9</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
<AxisCardParaPO>
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y10</CategoryName>
<ID>36583278-40bd-48ad-a749-02b4e58dcbca</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisCardParaPO.xml</ConfigPath>
<AxisCardId>0</AxisCardId>
<AxisCardName>Plc</AxisCardName>
<AxisCardNum>0</AxisCardNum>
<AxisNum>21</AxisNum>
<AxisName>CV-Y10</AxisName>
<Direction>X</Direction>
<GoogalCore>0</GoogalCore>
<GoogalAxisNum>0</GoogalAxisNum>
<GoolgalPosErr>0</GoolgalPosErr>
<HomeDir>0</HomeDir>
<EscapeStep>0</EscapeStep>
<HomeMode>HOME_MODE_ERROR</HomeMode>
<HomeCheck>false</HomeCheck>
<MaxCheckPos>0.001</MaxCheckPos>
</AxisCardParaPO>
</ListAxisCardParaPO>
<Version>1</Version>
<Core>0</Core>
<CrossCompensate>0</CrossCompensate>
<IsServoSeparate>false</IsServoSeparate>
</PersistenceObject>
</ArrayOfPersistenceObject>

887
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/ModelMotion/AxisMoveParaPO.xml Normal file
View File

@@ -0,0 +1,887 @@
<?xml version="1.0"?>
<ArrayOfPersistenceObject xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z1</CategoryName>
<ID>aef7d248-e5cc-4753-b1ea-c2d1c971d643</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>1</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z3</CategoryName>
<ID>cfae0e29-b625-49b0-a4d1-3738ba6919cd</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>0</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z4</CategoryName>
<ID>f9f1ed8a-cd73-49a7-bec8-018d7b498772</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>3</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z5</CategoryName>
<ID>8514cd0e-49f9-421f-9f0b-a8080ddcf7de</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>4</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Z6</CategoryName>
<ID>42482b11-f96c-4684-ba14-ed3dd1f595a0</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>5</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z7</CategoryName>
<ID>380f6bc0-35dc-4224-a792-e32aa26a22d0</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>8</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z8</CategoryName>
<ID>442a647d-bdc0-45b6-856d-114988b332e4</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>9</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z9</CategoryName>
<ID>25396ce5-106a-4a10-a7d8-98fefc970d0b</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>10</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Z10</CategoryName>
<ID>8e10a13b-e6bf-4b1d-bc7c-86442fa85f7d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>11</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-CV-Y4</CategoryName>
<ID>1d5273bf-4cd5-485e-a9d4-b6782b81dc76</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>12</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-CV-Y5</CategoryName>
<ID>cc9ee33f-ba66-4718-8894-8941f54d9927</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>13</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>WEU-Z11</CategoryName>
<ID>cb2a3d76-1f2e-484a-88d7-0ed23b73ab9d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>14</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>WEU-Z12</CategoryName>
<ID>cb2a3d76-1f2e-484a-88d7-0ed23b73ab9d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>14</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>WEU-Y6</CategoryName>
<ID>cb2a3d76-1f2e-484a-88d7-0ed23b73ab9d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>14</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Z13</CategoryName>
<ID>cb2a3d76-1f2e-484a-88d7-0ed23b73ab9d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>14</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y7</CategoryName>
<ID>cb2a3d76-1f2e-484a-88d7-0ed23b73ab9d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>14</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y8</CategoryName>
<ID>cb2a3d76-1f2e-484a-88d7-0ed23b73ab9d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>14</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y9</CategoryName>
<ID>cb2a3d76-1f2e-484a-88d7-0ed23b73ab9d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>14</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>CV-Y10</CategoryName>
<ID>cb2a3d76-1f2e-484a-88d7-0ed23b73ab9d</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>0</CardNum>
<AxisNum>14</AxisNum>
<MaxVel>50</MaxVel>
<HomeSpeed>5</HomeSpeed>
<HomeLabel>Homing</HomeLabel>
<HomeBufferId>0</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>50</Velocity>
<Accelerate>500</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-X1</CategoryName>
<ID>af7168b4-8aab-45a8-be8a-28f13976acfd</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>1</CardNum>
<AxisNum>1</AxisNum>
<MaxVel>1000</MaxVel>
<HomeSpeed>10</HomeSpeed>
<HomeLabel>HOMING_X1</HomeLabel>
<HomeBufferId>2</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>100</Velocity>
<Accelerate>1000</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>300</Velocity>
<Accelerate>3000</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-X2</CategoryName>
<ID>af7168b4-8aab-45a8-be8a-28f13976acfd</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>1</CardNum>
<AxisNum>1</AxisNum>
<MaxVel>1000</MaxVel>
<HomeSpeed>10</HomeSpeed>
<HomeLabel>HOMING_X2</HomeLabel>
<HomeBufferId>2</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>100</Velocity>
<Accelerate>1000</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>300</Velocity>
<Accelerate>3000</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>WS-X3</CategoryName>
<ID>f854496b-00b2-42be-816a-15b09cfe7f64</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>1</CardNum>
<AxisNum>0</AxisNum>
<MaxVel>1000</MaxVel>
<HomeSpeed>10</HomeSpeed>
<HomeLabel>HOMING_Y1</HomeLabel>
<HomeBufferId>1</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>100</Velocity>
<Accelerate>1000</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>300</Velocity>
<Accelerate>3000</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>PHS-Y1</CategoryName>
<ID>5377b562-4e41-4dcf-914a-d0e05d14aaf4</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>1</CardNum>
<AxisNum>2</AxisNum>
<MaxVel>1000</MaxVel>
<HomeSpeed>10</HomeSpeed>
<HomeLabel>HOMING_X2</HomeLabel>
<HomeBufferId>3</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>100</Velocity>
<Accelerate>1000</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>300</Velocity>
<Accelerate>3000</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>WS-R</CategoryName>
<ID>858b75b5-8918-4856-a387-8c92eb96a2f2</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>1</CardNum>
<AxisNum>3</AxisNum>
<MaxVel>1000</MaxVel>
<HomeSpeed>10</HomeSpeed>
<HomeLabel>HOMING_Y2</HomeLabel>
<HomeBufferId>4</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
<Decelerate>100</Decelerate>
<Jerk>1000</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>10</Velocity>
<Accelerate>100</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>100</Velocity>
<Accelerate>1000</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>300</Velocity>
<Accelerate>3000</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>SZ</CategoryName>
<ID>3c7a13d8-3b7b-4d1f-bac2-61d7496ff736</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>1</CardNum>
<AxisNum>8</AxisNum>
<MaxVel>5</MaxVel>
<HomeSpeed>1</HomeSpeed>
<HomeLabel>HOMING_CYCZ</HomeLabel>
<HomeBufferId>5</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
<Decelerate>10</Decelerate>
<Jerk>100</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>0.1</Velocity>
<Accelerate>1</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>300</Velocity>
<Accelerate>3000</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
<PersistenceObject xsi:type="AxisMoveParaPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>Stage-Y3</CategoryName>
<ID>80d675b6-39c0-4f56-829b-11670fc683c9</ID>
<EnableLog>false</EnableLog>
<ConfigPath>AxisMoveParaPO.xml</ConfigPath>
<CardNum>1</CardNum>
<AxisNum>9</AxisNum>
<MaxVel>5</MaxVel>
<HomeSpeed>1</HomeSpeed>
<HomeLabel>HOMING_CYCZ</HomeLabel>
<HomeBufferId>5</HomeBufferId>
<StepDistance>0</StepDistance>
<MovePara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
<Decelerate>10</Decelerate>
<Jerk>100</Jerk>
<Inc>0</Inc>
</MovePara>
<LowJogPara>
<Velocity>0.1</Velocity>
<Accelerate>1</Accelerate>
</LowJogPara>
<MidJogPara>
<Velocity>1</Velocity>
<Accelerate>10</Accelerate>
</MidJogPara>
<HighJogPara>
<Velocity>300</Velocity>
<Accelerate>3000</Accelerate>
</HighJogPara>
<AxisBand>0</AxisBand>
</PersistenceObject>
</ArrayOfPersistenceObject>

57
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/ModelMotion/CameraPO.xml Normal file
View File

@@ -0,0 +1,57 @@
<?xml version="1.0"?>
<ArrayOfPersistenceObject xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<PersistenceObject xsi:type="CameraPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>MapCamera</CategoryName>
<ID>2595f60b-d5fb-4fa8-998e-1931d1a071bf</ID>
<EnableLog>false</EnableLog>
<ConfigPath>CameraPO.xml</ConfigPath>
<Port>0</Port>
<CamType>DEMO</CamType>
<PixWidth>0</PixWidth>
<PixHeight>0</PixHeight>
<MirrorType>None</MirrorType>
<RotateType>Zero</RotateType>
<IsGanRaw>true</IsGanRaw>
<IsSimulate>false</IsSimulate>
<BufferAttach>0</BufferAttach>
<Interval>100</Interval>
<HeartBeatTime xsi:nil="true" />
</PersistenceObject>
<PersistenceObject xsi:type="CameraPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>TopWideCamera</CategoryName>
<ID>5dc88b03-cdfb-44e2-b954-f5b97e0e68a3</ID>
<EnableLog>false</EnableLog>
<ConfigPath>CameraPO.xml</ConfigPath>
<Port>0</Port>
<CamType>DEMO</CamType>
<PixWidth>0</PixWidth>
<PixHeight>0</PixHeight>
<MirrorType>None</MirrorType>
<RotateType>Zero</RotateType>
<IsGanRaw>true</IsGanRaw>
<IsSimulate>false</IsSimulate>
<BufferAttach>0</BufferAttach>
<Interval>100</Interval>
<HeartBeatTime xsi:nil="true" />
</PersistenceObject>
<PersistenceObject xsi:type="CameraPO">
<AlarmOffset>0</AlarmOffset>
<CategoryName>TopPositionCamera</CategoryName>
<ID>618de1c8-08ac-4abf-b778-17f26fa61a63</ID>
<EnableLog>false</EnableLog>
<ConfigPath>CameraPO.xml</ConfigPath>
<Port>0</Port>
<CamType>DEMO</CamType>
<PixWidth>0</PixWidth>
<PixHeight>0</PixHeight>
<MirrorType>None</MirrorType>
<RotateType>Zero</RotateType>
<IsGanRaw>true</IsGanRaw>
<IsSimulate>false</IsSimulate>
<BufferAttach>0</BufferAttach>
<Interval>100</Interval>
<HeartBeatTime xsi:nil="true" />
</PersistenceObject>
</ArrayOfPersistenceObject>

BIN
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/SystemConfig.bin Normal file
View File

Binary file not shown.

40
MX-PD-盘古 - new/PanGu.DieBonderApp/Configuration/WaferHandlingFlow.json Normal file
View File

@@ -0,0 +1,40 @@
{
"Nodes": [
{
"Key": "WaferLoad",
"DisplayName": "晶圆上料",
"ActivityKeywords": [
"ChipLoad",
"ChipLoadExecute"
],
"WorkflowKeywords": [],
"ParentKeywords": []
},
{
"Key": "WaferSupply",
"DisplayName": "供片准备",
"ActivityKeywords": [],
"WorkflowKeywords": [
"WaferAngleAdjustmentFlow",
"DiePositionFlow",
"DieTransferFlow",
"DieRecheckFlow"
],
"ParentKeywords": [
"DieAlign",
"DieBond",
"Inspect"
]
},
{
"Key": "WaferUnload",
"DisplayName": "晶圆下料",
"ActivityKeywords": [
"ChipUnload",
"ChipUnloadExecute"
],
"WorkflowKeywords": [],
"ParentKeywords": []
}
]
}